A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.

A moveable micromachined member of a microelectromechanical system (MEMS) device includes an insulating layer disposed between first and second electrically conductive layers. First and second mechanical structures secure the moveable micromachined member to a substrate of the MEMS device and include respective first and second electrical interconnect layers coupled in series, with the first electrically conductive layer of the moveable micromachined member and each other, between first and second electrical terminals to enable conduction of a first joule-heating current from the first electrical terminal to the second electrical terminal through the first electrically conductive layer of the moveable micromachined member.

Certain aspects of the present disclosure provide a filter circuit and techniques for filtering using the filter circuit. The filter circuit generally includes a first filter stage having a first acoustic wave resonator coupled in a series path between a first port of the filter circuit and a second port of the filter circuit, a first inductor-capacitor (LC) tank circuit, a first capacitor coupled between a first terminal of the first acoustic wave resonator and the first LC tank circuit, the first LC tank circuit being coupled between the first capacitor and a reference potential node, and a second capacitor coupled between a second terminal of the first acoustic wave resonator and the first LC tank circuit. In some aspects, the filter circuit includes one or more other filter stages coupled to the first filter stage.

Certain aspects of the present disclosure provide a filter circuit and techniques for filtering using the filter circuit. The filter circuit generally includes a first filter stage having a first acoustic wave resonator coupled in a series path between a first port of the filter circuit and a second port of the filter circuit, a first inductor-capacitor (LC) tank circuit, a first capacitor coupled between a first terminal of the first acoustic wave resonator and the first LC tank circuit, the first LC tank circuit being coupled between the first capacitor and a reference potential node, and a second capacitor coupled between a second terminal of the first acoustic wave resonator and the first LC tank circuit. In some aspects, the filter circuit includes one or more other filter stages coupled to the first filter stage.

A substrate includes a substrate main body that includes a first main surface and a second main surface facing the first main surface. First electrode lands are disposed inside a recessed portion of the first main surface of the substrate main body. Second electrode lands are disposed in a region outside the recessed portion. The first electrode land and the second electrode land are connected to different electric potentials.

A substrate includes a substrate main body that includes a first main surface and a second main surface facing the first main surface. First electrode lands are disposed inside a recessed portion of the first main surface of the substrate main body. Second electrode lands are disposed in a region outside the recessed portion. The first electrode land and the second electrode land are connected to different electric potentials.

Acoustic filters devices and methods of making the same. A filter device includes a plurality of series resonators acoustically coupled along a first shared acoustic track and a plurality of shunt resonators acoustically coupled along a second shared acoustic track and electrically coupled to the plurality of series resonators.

Acoustic filters devices and methods of making the same. A filter device includes a plurality of series resonators acoustically coupled along a first shared acoustic track and a plurality of shunt resonators acoustically coupled along a second shared acoustic track and electrically coupled to the plurality of series resonators.

Disclosed herein is a wireless medical device powering system configured to power an untethered medical device including a first medical device having an induction receiving coil, the induction receiving coil in communication with each of one or more electrical systems and a first medical device console comprising one or more processors, a non-transitory computer readable medium, and a plurality of logic modules. The system can include a wireless powering device configured to wirelessly provide power to the first medical device, the wireless powering device having a body including an induction transmitting coil.

Disclosed herein is a wireless medical device powering system configured to power an untethered medical device including a first medical device having an induction receiving coil, the induction receiving coil in communication with each of one or more electrical systems and a first medical device console comprising one or more processors, a non-transitory computer readable medium, and a plurality of logic modules. The system can include a wireless powering device configured to wirelessly provide power to the first medical device, the wireless powering device having a body including an induction transmitting coil.