When a thick frequency adjustment metal film of a tuning fork-type vibration piece is irradiated with a beam on a wafer for frequency coarse adjustment, projections are possibly formed on a roughened end of the frequency adjustment metal film. Such projections are pressurized and pushed down not to chip off under any impact, so that the risk of frequency fluctuations is suppressed.

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

A vibration element includes a base and a vibrating arm extending from the base. The vibrating arm includes an arm positioned between the base and a weight. A weight film is disposed on the weight. The weight has a first principal surface and a second principal surface in a front and back relationship with respect to a center plane of the arm. A center of gravity of the weight is located between the first principal surface and the center plane of the arm. A center of gravity of the weight film is located between the second principal surface and the center plane of the arm.

An oscillator circuit includes an amplifying unit and a first feedback resistor. The amplifying unit includes an inverter at an input stage being connected to the one end of a crystal resonator, an inverter at an output stage being connected to the other end of the crystal resonator, and a linear amplifier. The linear amplifier is connected between an output terminal of the inverter at the input stage and an input terminal of the inverter at the output stage. The linear amplifier includes at least one inverter and a second feedback resistor. The second feedback resistor is connected in parallel to the at least one inverter. The linear amplifier has a conductance with a magnitude larger than a conductance of the inverter at the input stage and equal to or less than a conductance of the inverter at the output stage.

An oscillator circuit includes an amplifying unit and a first feedback resistor. The amplifying unit includes an inverter at an input stage being connected to the one end of a crystal resonator, an inverter at an output stage being connected to the other end of the crystal resonator, and a linear amplifier. The linear amplifier is connected between an output terminal of the inverter at the input stage and an input terminal of the inverter at the output stage. The linear amplifier includes at least one inverter and a second feedback resistor. The second feedback resistor is connected in parallel to the at least one inverter. The linear amplifier has a conductance with a magnitude larger than a conductance of the inverter at the input stage and equal to or less than a conductance of the inverter at the output stage.

When a thick frequency adjustment metal film of a tuning fork-type vibration piece is irradiated with a beam on a wafer for frequency coarse adjustment, projections are possibly formed on a roughened end of the frequency adjustment metal film. Such projections are pressurized and pushed down not to chip off under any impact, so that the risk of frequency fluctuations is suppressed.

When a thick frequency adjustment metal film of a tuning fork-type vibration piece is irradiated with a beam on a wafer for frequency coarse adjustment, projections are possibly formed on a roughened end of the frequency adjustment metal film. Such projections are pressurized and pushed down not to chip off under any impact, so that the risk of frequency fluctuations is suppressed.

The resonator includes a vibrating portion that has three or more vibrating arms each having a fixed end and an open end and at least two vibrating arms undergoing out-of-plane bending in different phases. Moreover, the resonator includes a first base portion having a first front end connected to the fixed ends and a first rear end facing the first front end, a second base portion having a second front end facing the first rear end and a second rear end facing the second front end, and a connecting portion connected between a vicinity of a center of the first rear end and a vicinity of a center of the second front end, a holding portion that is provided in at least a part of a periphery of the vibrating portion, and a holding arm that is provided between the vibrating portion and the holding portion.

The resonator includes a vibrating portion that has three or more vibrating arms each having a fixed end and an open end and at least two vibrating arms undergoing out-of-plane bending in different phases. Moreover, the resonator includes a first base portion having a first front end connected to the fixed ends and a first rear end facing the first front end, a second base portion having a second front end facing the first rear end and a second rear end facing the second front end, and a connecting portion connected between a vicinity of a center of the first rear end and a vicinity of a center of the second front end, a holding portion that is provided in at least a part of a periphery of the vibrating portion, and a holding arm that is provided between the vibrating portion and the holding portion.

An array substrate is disclosed. The array substrate may include a base substrate (21), a pixel defining layer (22) on the base substrate (21), and a charge generating layer (24) above the pixel defining layer (22). The pixel defining layer (22) may define a plurality of pixel regions. The pixel defining layer (22) may include a plurality of acoustic structures (220), and each of the plurality of acoustic structures (220) may be configured to resonate under an action of an acoustic wave of a threshold frequency to form a slit to disconnect the charge generating layer (24) of two adjacent pixel regions of the plurality of pixel regions.