A filter including a piezoelectric substrate; a surface acoustic wave (SAW) device on the piezoelectric substrate and including unequally spaced interdigitated input and output transducer electrodes of unequal widths, wherein the input transducer electrodes are to convert an incoming radio frequency (RF) electrical signal into surface acoustic waves; a SAW propagation path between the input and output transducer electrodes; and a magnetostrictive film in the SAW propagation path to filter the surface acoustic waves that are at a ferromagnetic resonance frequency of the magnetostrictive film, wherein the output transducer electrodes are to convert the filtered surface acoustic waves into an outgoing electrical RF signal. The SAW device may operate in a wide-band pass configuration. The wide-band pass configuration result in a transmission of frequencies up to 60 dB. The magnetostrictive film may include a ferromagnetic material. The interdigitated input and output transducer electrodes may include unequal widths between adjacent electrodes.

A composite filter device includes a connection portion connected to a common terminal, a first filter between the connection portion and a first terminal, a second filter between the connection portion and a second terminal, a first inductor that is connected in series between the second filter and the connection portion, includes a first wiring electrode wound in a predetermined direction, and is provided at an internal layer of a multilayer board, and a second inductor that is connected in series between the common terminal and the connection portion, includes a second wiring electrode wound in the predetermined direction, and is provided at an internal layer of the multilayer board. The first and second wiring electrodes at least partially overlap when the multilayer board is viewed in plan.

A delay compensation apparatus is provided, where a surface acoustic wave component is used as a main delay component for delay compensation. A size of the surface acoustic wave component is relatively small. Therefore, the delay compensation apparatus provided in embodiments of the present invention features a relatively small size and a relatively high device integration level.

The present application relates to a biosensor that employs an acoustic cavity to store mechanical energy. In particular examples, the biosensor includes an electrode region and one or more reflector regions to form the acoustic cavity, as well as a functionalized active area disposed in proximity to the cavity. Methods of making and using such biosensors are also described herein.

Systems and devices for a self-interference cancelation scheme that allows for large numbers of delays while maintaining a small size and area. The main components of this scheme include AE delay line arrays (for re-constructing the interference to be subtracted); AE circulators (for providing isolation between the transmitter-to-antenna and antenna-to-receiver paths); and AE couplers (for tapping the signal from the transmit chain to the delay lines). Together, a fully micro-acoustic interference cancelation module is realized in thin-film piezoelectric-semiconductor heterostructures, which are usable in cellular communication devices, base stations, wireless communication modules, and similar transmission/reception systems.

An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.

An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.

A receiver includes a quadrature mixer to perform frequency conversion to convert a radio-frequency signal into an I signal and a Q signal that have a 90 phase difference from each other and a surface acoustic wave (SAW) device to perform phase conversion on the I signal and the Q signal that are output from the quadrature mixer. In the SAW device, when represents a phase rotation amount of the I signal, represents a phase rotation amount of the Q signal, and n is an integer, (+90n36035.1)(+90+n360+35.1) or (90+n36035.1)(90+n360+35.1).