Patent classifications
H03K3/021
Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device
A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner.
Designed waveform generator for semiconductor equipment, plasma processing apparatus, method of controlling plasma processing apparatus, and method of manufacturing semiconductor device
A designed waveform generator includes at least one first signal generator including a first switching device and generating a square wave having a constant voltage level during an on-period of the first switching device and at least one second signal generator including a second switching device and controlling a transition period of the second switching device to generate a variable waveform having a variable voltage level during the transition period of the second switching device. The at least one first signal generator and the at least one second signal generator are connected to each other in a cascade manner.
High voltage resistive output stage circuit
Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.
High voltage resistive output stage circuit
Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.
High voltage resistive output stage circuit
Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.
High voltage resistive output stage circuit
Some embodiments include a high voltage, high frequency switching circuit. The switching circuit may include a high voltage switching power supply that produces pulses having a voltage greater than 1 kV and with frequencies greater than 10 kHz and an output. The switching circuit may also include a resistive output stage electrically coupled in parallel with the output and between the output stage and the high voltage switching power supply, the resistive output stage comprising at least one resistor that discharges a load coupled with the output. In some embodiments, the resistive output stage may be configured to discharge over about 1 kilowatt of average power during each pulse cycle. In some embodiments, the output can produce a high voltage pulse having a voltage greater than 1 kV and with frequencies greater than 10 kHz with a pulse fall time less than about 400 ns.
TIME-WALK CORRECTION USING MULTIPLE ENERGY MEASUREMENTS
An apparatus and method are provided to correct for time-walk errors during photon detections (e.g., detecting gamma rays). A time-walk correction is determined using measurements of energy (or charge) that apply different time windows, enabling corrections accounting for variations in the ratio between fast and slow components in the detected pulse. For example, one time window can be used to integrate the leading end of the pulse, thereby predominantly measuring the fast component, while a second window is used to integrate a trailing end of the pulse to predominantly measure the slow component. Alternatively or additionally, low-pass and high-pass filters may select the slow and fast components, respectively. The time-walk correction is a function of multiple measurements representing different components (e.g., fast and slow) of the pulse shape.
TIME-WALK CORRECTION USING MULTIPLE ENERGY MEASUREMENTS
An apparatus and method are provided to correct for time-walk errors during photon detections (e.g., detecting gamma rays). A time-walk correction is determined using measurements of energy (or charge) that apply different time windows, enabling corrections accounting for variations in the ratio between fast and slow components in the detected pulse. For example, one time window can be used to integrate the leading end of the pulse, thereby predominantly measuring the fast component, while a second window is used to integrate a trailing end of the pulse to predominantly measure the slow component. Alternatively or additionally, low-pass and high-pass filters may select the slow and fast components, respectively. The time-walk correction is a function of multiple measurements representing different components (e.g., fast and slow) of the pulse shape.
CIRCUIT PRE-CHARGING
In some examples, a pulser circuit is configured to provide a pulse signal in a first operational state, pre-charge components of the pulser circuit via a first signal path in a second operational state following the first operational state, wherein the first signal path includes first components having a first voltage tolerance and second components having a second voltage tolerance, the first voltage tolerance being less than the second voltage tolerance, and discharge a voltage of the pulser circuit to ground in a third operational state between the first operational state and the second operational state, and following the second operational state.
CIRCUIT PRE-CHARGING
In some examples, a pulser circuit is configured to provide a pulse signal in a first operational state, pre-charge components of the pulser circuit via a first signal path in a second operational state following the first operational state, wherein the first signal path includes first components having a first voltage tolerance and second components having a second voltage tolerance, the first voltage tolerance being less than the second voltage tolerance, and discharge a voltage of the pulser circuit to ground in a third operational state between the first operational state and the second operational state, and following the second operational state.