Patent classifications
H03K3/36
VARIABLE OUTPUT IMPEDANCE RF GENERATOR
Various RF plasma systems are disclosed that do not require a matching network. In some embodiments, the RF plasma system includes an energy storage capacitor; a switching circuit coupled with the energy storage capacitor, the switching circuit producing a plurality of pulses with a pulse amplitude and a pulse frequency, the pulse amplitude being greater than 100 volts; a resonant circuit coupled with the switching circuit. In some embodiments, the resonant circuit includes: a transformer having a primary side and a secondary side; and at least one of a capacitor, an inductor, and a resistor. In some embodiments, the resonant circuit having a resonant frequency substantially equal to the pulse frequency, and the resonant circuit increases the pulse amplitude to a voltage greater than 2 kV.
VARIABLE OUTPUT IMPEDANCE RF GENERATOR
Various RF plasma systems are disclosed that do not require a matching network. In some embodiments, the RF plasma system includes an energy storage capacitor; a switching circuit coupled with the energy storage capacitor, the switching circuit producing a plurality of pulses with a pulse amplitude and a pulse frequency, the pulse amplitude being greater than 100 volts; a resonant circuit coupled with the switching circuit. In some embodiments, the resonant circuit includes: a transformer having a primary side and a secondary side; and at least one of a capacitor, an inductor, and a resistor. In some embodiments, the resonant circuit having a resonant frequency substantially equal to the pulse frequency, and the resonant circuit increases the pulse amplitude to a voltage greater than 2 kV.
BIAS SUPPLY WITH RESONANT SWITCHING
Embodiments of the invention includes various power supplies for plasma systems. These power supplies, for example, closes a switch to connect and disconnect a current pathway to cause an application of an asymmetric periodic voltage waveform. Where each cycle of the asymmetric periodic voltage waveform includes a first portion that begins with a first negative voltage and changes to a positive peak voltage, a second portion that changes from the positive peak voltage to a third voltage level and a fourth portion that includes a negative voltage ramp from the third voltage level to a fourth voltage level.
BIAS SUPPLY WITH RESONANT SWITCHING
Embodiments of the invention includes various power supplies for plasma systems. These power supplies, for example, closes a switch to connect and disconnect a current pathway to cause an application of an asymmetric periodic voltage waveform. Where each cycle of the asymmetric periodic voltage waveform includes a first portion that begins with a first negative voltage and changes to a positive peak voltage, a second portion that changes from the positive peak voltage to a third voltage level and a fourth portion that includes a negative voltage ramp from the third voltage level to a fourth voltage level.
Pulse signal multiplier for providing a secondary pulse signal from a primary pulse signal of a pulse signal generator
A pulse signal multiplier for the provision of a secondary pulse signal without retroactive effect from a primary pulse signal of a pulse signal generator, in particular for the multiplication of speed sensor signals for use in train protection systems, includes an input circuit which taps off the primary pulse signal via a shielded branch signal line, an output circuit which receives the signal transmitted via the potential barrier, and an optical signal transmission path bridging the potential barrier between the input circuit and the output circuit.
Pulse signal multiplier for providing a secondary pulse signal from a primary pulse signal of a pulse signal generator
A pulse signal multiplier for the provision of a secondary pulse signal without retroactive effect from a primary pulse signal of a pulse signal generator, in particular for the multiplication of speed sensor signals for use in train protection systems, includes an input circuit which taps off the primary pulse signal via a shielded branch signal line, an output circuit which receives the signal transmitted via the potential barrier, and an optical signal transmission path bridging the potential barrier between the input circuit and the output circuit.
Pulse signal multiplier for providing a secondary pulse signal from a primary pulse signal of a pulse signal generator
A pulse signal multiplier for the provision of a secondary pulse signal without retroactive effect from a primary pulse signal of a pulse signal generator, in particular for the multiplication of speed sensor signals for use in train protection systems, includes an input circuit which taps off the primary pulse signal via a shielded branch signal line, an output circuit which receives the signal transmitted via the potential barrier, and an optical signal transmission path bridging the potential barrier between the input circuit and the output circuit.
Pulse signal multiplier for providing a secondary pulse signal from a primary pulse signal of a pulse signal generator
A pulse signal multiplier for the provision of a secondary pulse signal without retroactive effect from a primary pulse signal of a pulse signal generator, in particular for the multiplication of speed sensor signals for use in train protection systems, includes an input circuit which taps off the primary pulse signal via a shielded branch signal line, an output circuit which receives the signal transmitted via the potential barrier, and an optical signal transmission path bridging the potential barrier between the input circuit and the output circuit.