Provided is an intelligent correction device control system for a super-resolution lithography precision mask, including: a sixteen-way pneumatic fine-tuning mask deformation control subsystem configured to deform a mask, detect a force value of a mask deformation, compare the force value of the mask deformation with an output force set value, and generate a first control feedback quantity to adjust a force deforming the mask, so as to control a deformation quantity of the mask; and an alignment subsystem configured to acquire images of the mask and a substrate, and adjust a position between the mask and the substrate according to the images, so as to align the mask with the substrate.

Provided is an intelligent correction device control system for a super-resolution lithography precision mask, including: a sixteen-way pneumatic fine-tuning mask deformation control subsystem configured to deform a mask, detect a force value of a mask deformation, compare the force value of the mask deformation with an output force set value, and generate a first control feedback quantity to adjust a force deforming the mask, so as to control a deformation quantity of the mask; and an alignment subsystem configured to acquire images of the mask and a substrate, and adjust a position between the mask and the substrate according to the images, so as to align the mask with the substrate.

A spot sub-pixel center positioning method based on pixel movement and cutting, the method includes driving the CCD image plane to move along the x direction and the y direction through a displacement platform, selecting target pixels to move and cut the spot, and recording the gray value change of the target pixels, constructing the mapping relationship between gray value and displacement, performing differential transformation on the gray value and displacement curve, and finally performing interpolation fitting to obtain the sub-pixel coordinate value of the center point of the light spot. The measurement accuracy can be maintained within ½ of the single-step displacement of cutting. The method is not only suitable for strong and weak distribution of light spots, but also for fully saturated light spots, and also for asymmetrically distributed and blurred edges. It also has a good measurement effect and can handle a variety of spot scenes.

A spot sub-pixel center positioning method based on pixel movement and cutting, the method includes driving the CCD image plane to move along the x direction and the y direction through a displacement platform, selecting target pixels to move and cut the spot, and recording the gray value change of the target pixels, constructing the mapping relationship between gray value and displacement, performing differential transformation on the gray value and displacement curve, and finally performing interpolation fitting to obtain the sub-pixel coordinate value of the center point of the light spot. The measurement accuracy can be maintained within ½ of the single-step displacement of cutting. The method is not only suitable for strong and weak distribution of light spots, but also for fully saturated light spots, and also for asymmetrically distributed and blurred edges. It also has a good measurement effect and can handle a variety of spot scenes.

An image capturing apparatus comprises a plurality of light-receiving circuits, each outputting a pulse signal in response to a photon being incident; a plurality of counter circuits that count the respective pulse signals output by the plurality of light-receiving circuits; and a correction circuit that corrects counts from the plurality of counter circuits and outputs the corrected counts as image data. The correction circuit calculates a correction coefficient on the basis of counts obtained by the plurality of counter circuits in a state where pulse widths of the pulse signals differ or under conditions where generation frequencies of the pulse signals differ, and performs the correction using the correction coefficient.

An apparatus includes a pixel unit including a plurality of pixels arranged in a plurality of rows and each including a quench element of which a control node a signal defining a start and an end of an exposure period is input to and a photodiode connected to the quench element, a scan unit that scans the pixel unit by performing processing of reading signals of the pixels, processing of starting the exposure period, and processing of ending the exposure period on the plurality of rows sequentially in units of one row or two or more rows, and a control unit that outputs a synchronization signal to the scan unit to control a timing of the reading processing, wherein at least one of a timing of the start processing and a timing of the end processing is controlled by another control signal different from the synchronization signal.

Disclosed is an image sensing device including a plurality of selectors suitable for generating a plurality of selected pixel signals corresponding to one of a plurality of pixel signals; a plurality of signal converters suitable for: setting a plurality of initial voltages which are different from one another, on the basis of a plurality of initialization signals during an initialization period, and generating a plurality of converted pixel signals to which the plurality of initial voltages are respectively reflected, on the basis of the plurality of selected pixel signals and a ramp signal during a readout period; and a calculation circuit suitable for averaging the plurality of converted pixel signals.

A device includes a pixel unit, a selection unit, and a first generation unit. The pixel unit has a plurality of pixels arranged in a plurality of rows. Each pixel includes a quenching circuit configured to receive a signal for determining start and end of an exposure period and a photodiode coupled to the quenching circuit. The selection unit is configured to simultaneously receive a plurality of clock signals of different periods and select a clock signal to be outputted from the plurality of clock signals. The first generation unit is configured to generate the signal by using the outputted clock.

This disclosure describes devices, systems, and methods that relate to obtaining image frames with variable resolutions in synchronization with a clock source. An example device may include an image sensor, a clock input, and a controller. The controller includes at least one processor and a memory. The at least one processor is operable to execute program instructions stored in the memory so as to carry out operations. The operations include receiving, by the clock input, a clock signal. The clock signal is a periodic signal defining at least one scan interval. The operations also include during the scan interval, causing the image sensor to capture a full resolution image frame. The operations yet further include during the scan interval, causing the image sensor to capture at least one reduced resolution image frame.

An image sensor includes image sensor cells generating an image signal in response to one or more control signals, and a first driver generating a first control signal. The first driver includes a first positive supply terminal connected to a first power supply node. The image sensor also includes a voltage generator generating a first voltage at the first power supply node, where the voltage generator includes charge pump cells to receive clock signals and to source charge to the first power supply node, a delay line including delay line elements generating clock signals, where a first charge pump cell receives a first clock signal generated by a first delay line element, where a second charge pump cell receives a second clock signal generated by a second delay line element, and where a delay between the first clock signal and the second clock signal is determined by the delay line.