In a subcutaneous microphone used in medical devices, a structure is introduced that constrains the motion of the diaphragm during normal operation of the microphone. In one embodiment, a raised portion, such as a pole or pillar is placed in the chamber at the middle of the diaphragm. The raised portion may contact one or both of the bottom surface of the chamber and the underside of the membrane, and generally acts to reduce the amount of deflection experienced by the membrane.

In a subcutaneous microphone used in medical devices, a structure is introduced that constrains the motion of the diaphragm during normal operation of the microphone. In one embodiment, a raised portion, such as a pole or pillar is placed in the chamber at the middle of the diaphragm. The raised portion may contact one or both of the bottom surface of the chamber and the underside of the membrane, and generally acts to reduce the amount of deflection experienced by the membrane.

An acoustic transducer is configured to perform an acoustic transformation. The acoustic transducer is disposed within a wearable sound device or to be disposed within the wearable sound device. The acoustic transducer includes at least one anchor structure, a film structure and an actuator. The film structure is disposed within a first layer and anchored by the anchor structure disposed within a second layer. The actuator is disposed on the film structure, and the actuator is configured to actuate the film structure to form a vent temporarily. The film structure partitions a space into a first volume to be connected to an ear canal of a wearable sound device user and a second volume to be connected to an ambient of the wearable sound device. The ear canal and the ambient are to be connected via the vent temporarily opened when the film structure is actuated.

The present invention provides a piezoelectric MEMS microphone having a base with a cavity, a piezoelectric diaphragm, and a restraining element. The base has a ring base circumferentially forming a cavity, a support column. The piezoelectric diaphragm includes diaphragm sheets each having a fixing end connected to a support column and a free end suspended over the cavity. The restraining element has one end fixedly connected to the free end, the other end connected to the part on the base that is not connected to the fixing end. The piezoelectric MEMS microphone of the invention can constrain the deformation of the diaphragm sheet, thereby improving the resonant frequency of the piezoelectric diaphragm, reducing the noise of the whole piezoelectric MEMS microphone.

The present invention provides a piezoelectric MEMS microphone having a base with a cavity, a piezoelectric diaphragm, and a restraining element. The base has a ring base circumferentially forming a cavity, a support column. The piezoelectric diaphragm includes diaphragm sheets each having a fixing end connected to a support column and a free end suspended over the cavity. The restraining element has one end fixedly connected to the free end, the other end connected to the part on the base that is not connected to the fixing end. The piezoelectric MEMS microphone of the invention can constrain the deformation of the diaphragm sheet, thereby improving the resonant frequency of the piezoelectric diaphragm, reducing the noise of the whole piezoelectric MEMS microphone.

A microelectromechanical system (MEMS) transducer includes a transducer substrate including an opening; a back plate including a plurality of protrusions oriented substantially perpendicular to the back plate; and a diaphragm between the transducer substrate and the back plate. The diaphragm includes a lead and a plurality of spring members. The lead is structured to suspend the diaphragm over the transducer substrate. The spring members are structured to separate the diaphragm from the transducer substrate and the back plate in the absence of a bias voltage.

Planar loudspeaker comprising a planar sound panel (10), a mounting (12), at least one drive unit (14) for driving the sound panel (10), said drive unit preferably being attached to the mounting (12), and at least one stabilizing device (22) for stabilizing a movement of the sound panel (10), wherein the stabilizing device (22) is arranged between the sound panel (10) and the mounting (12) and comprises at least a stroke section (28), which is configured so as to be movable, flexible and/or elastic, and at least one centering device (36) for centering the sound panel (10) and/or at least a part of the drive unit (14), wherein the centering device (36) is arranged in a different plane than the stabilizing device (22) and comprises at least a stroke section (28), which is configured so as to be movable, flexible and/or elastic.

Planar loudspeaker comprising a planar sound panel (10), a mounting (12), at least one drive unit (14) for driving the sound panel (10), said drive unit preferably being attached to the mounting (12), and at least one stabilizing device (22) for stabilizing a movement of the sound panel (10), wherein the stabilizing device (22) is arranged between the sound panel (10) and the mounting (12) and comprises at least a stroke section (28), which is configured so as to be movable, flexible and/or elastic, and at least one centering device (36) for centering the sound panel (10) and/or at least a part of the drive unit (14), wherein the centering device (36) is arranged in a different plane than the stabilizing device (22) and comprises at least a stroke section (28), which is configured so as to be movable, flexible and/or elastic.

A speaker includes a diaphragm having a perfectly circular hole in which a bobbin is attached and an oval or elliptical outer peripheral end. The diaphragm includes a perfectly circular cross-sectional area in the range of a predetermined height above a base having the perfectly circular hole. The diaphragm further includes an intermediate area whose outer surface has a small curvature radius above the perfectly circular cross-sectional area and an expanded area that is oval in cross section above the intermediate area.

A MEMS capacitive microphone according to the present invention is configured such that a support plate 120 from which an inside thereof has been removed in a plane is attached to supports 110 each having an end fixed to a substrate 100, an anchor 130 is attached to an edge region of the support plate 120, an edge of a diaphragm 200 is supported by the anchor 130, and a “substrate-free area” includes the anchor 130 in a plan view, and pluralities of moving comb fingers 300 and stiffeners are attached to a top or bottom or a top and bottom of the diaphragm 200, and the supports 110 support the stationary comb fingers 400 arranged at predetermined intervals on both sides of the moving comb fingers 300 in a plan view.