Embodiments of methods and apparatus for thermally treating a substrate are provided herein. In some embodiments, a thermal treatment apparatus includes a chamber body including an interior volume; a plurality of substrate supports disposed within the interior volume, wherein each of the plurality of substrate supports includes a heating element; a selectively sealable opening in the chamber body sized to allow substrates to be inserted into or removed from the interior volume; a robotic arm disposed in the interior volume to move substrates onto and off of the plurality of substrate supports; and a heating assembly configured to heat substrates disposed on the robotic arm.

The invention relates to an apparatus (1) for irradiating a substrate (2), which apparatus comprises a platform (4), which is straight or curved in relation to the longitudinal axis (3) of the platform (4), wherein one, two, three, four, five, six, seven, eight, nine, ten or more irradiation modules (6) and/or substrate supply air modules (36) and/or substrate exhaust air modules (37) are reversibly attachable directly or indirectly to the bottom side (8) of the platform (4) by sliding or inserting or mounting in one or more fixed or telescoping module attachment devices (10) provided on the bottom side (8) of the platform (4) - each extending from the front side (5) of the apparatus (1) and in the direction of the back side (9) of the apparatus (1).

The present invention discloses an automatic lamp replacement device and ultraviolet curing equipment, wherein the automatic lamp replacement device comprises: an acquisition unit used for acquiring the luminous intensity information of ultraviolet lamps; a processing unit used for determining that the ultraviolet lamps need to be replaced and generating a control signal when points with values which are less than a set value exist in the luminous intensity information received from the acquisition unit; a control unit used for controlling a carrying device to work according to the control signal received from the processing unit; and the carrying device used for removing the ultraviolet lamps determined to be the ones needing to be replaced and installing new ultraviolet lamps under the control of the control unit. The automatic lamp replacement device provided by the present invention can improve the automatic control accuracy of the ultraviolet curing equipment.

A pitot tube is provided having a tube wall and a heating arrangement for generating heat for heating thereby at least a portion of the tube wall to prevent the tube from becoming clogged with ice. The heating arrangement includes a radiation absorbing surface configured for absorbing electromagnetic radiation (EMR) and generating the heat. At least one radiation conveying portion is provided for receiving EMR from an EMR source and conveying it to the radiation absorbing surface.

Power outputs in a heating control and/or regulation device are each electrically connectable to a heating element, especially a radiant heater. A power input is able to be connected electrically to a power supply for the heating elements. A power distribution device is connected electrically on its input side to the power input and is connected electrically on its output side via a branch to each of the power outputs to supply the power outputs with electric power from the power supply. A switching element is disposed in each of the branches or between each of the power outputs and the heating elements. A control and/or regulation unit is configured such that it controls and/or regulates the switching state of the switching elements as a function of set values. An interface receiving set values has at least one additional connection to a temperature measurement device that measures actual values of temperature. The control and/or regulation unit is configured such that it acquires the actual values of the temperature from the temperature measurement device and additionally controls and/or regulates the switching state of the switching elements as a function of these actual values of the temperature.

A ceramic reflector (100) for at least one IR lamp comprises at least one elongated concave reflector body (102). Each of the at least one elongated concave reflector bodies comprises an elongated bottom section and two elongated upstanding walls. Each of the elongated concave reflector bodies is provided for containing at least one IR lamp (150) and for reflecting the IR light from the at least one IR lamp. Each elongated concave reflector body has in each cross section at both of its upstanding walls a wall height. The wall height is the vertical distance between the deepest level of the bottom section of the reflector body and the highest level of the upstanding wall. At one or at both longitudinal ends of at least one reflector body; the wall height is at both upstanding walls larger than in the middle section of the elongated concave reflector body.

Embodiments of the present invention generally relate to simplified, high voltage, tungsten halogen lamps for use as source of heat radiation in a rapid thermal processing (RTP) chamber or other lamp heated thermal processing chambers. Embodiments include a lamp design that includes an external fuse while reducing the number of part and expense of prior art lamps. In addition, embodiments of the lamps described herein provide sufficient rigidity to handle compressive forces of inserting the lamps into a heating assembly base, while maintaining a simplified fuse design.

A method for manufacturing a glass article includes a heating step that heats a heating object made of glass. The heating step includes heating the heating object by converting, by a converter arranged between the heating object and a radiant heat source that radiates infrared light, a spectrum of the infrared light radiated from the radiant heat source and causing the heating object to absorb the infrared light radiated from the converter. The converter includes: an infrared light absorber that generates heat by absorbing the infrared light radiated from the radiant heat source; and an infrared light radiator made of a silicon-containing material. The infrared light radiator is heated through thermal conduction from the infrared light absorber. At least part of a surface of the converter facing the heating object includes at least part of a surface of the infrared light radiator.

A high temperature heater lamp including a ceramic envelope is disclosed. The ceramic envelope is substantially infrared transparent and is composed of a refractory ceramic. The heater lamp also includes two lead wires communicatively coupled via a filament. The filament is enclosed within the ceramic envelope, which is evacuated. The heater lamp may include at least two metallic IR shields within the ceramic envelope, at least one located on either side of the filament. The filament may be tungsten, a carbon filament, or molybdenum. At least one end of the ceramic envelope may be sealed with a metal cap affixed to the ceramic envelope by a high vacuum sealant. The heater lamp may be configured to operate at above 1500° C. The ceramic envelope may have a wall thickness less than 1 mm thick.

An inexpensive system for maintaining an LCD display above an operative temperature includes ultraviolet (UV) light-emitting diodes (LEDs) incorporated into a backlight structure. The UV LEDs operate in a frequency range sufficiently removed from the visible band to not interfere with the user. A temperature sensor continuously or periodically monitors the temperature of the LCD and activates the UV LEDs to maintain the LCD in a predetermined temperature range for a desired response time.