Patent classifications
H05B2203/008
Electrostatic chuck and semiconductor manufacturing apparatus
An electrostatic chuck includes a ceramic dielectric substrate; a base plate; and a heater unit which heats the ceramic dielectric substrate. The heater unit includes a first heater element. The first heater element has a plurality of sub-zones. The sub-zones include a first sub-zone. The first sub-zone includes a sub-heater line generating heat by allowing a current to flow, a first sub-power feeding portion feeding a power to the sub-heater line, and a second sub-power feeding portion feeding a power to the sub-heater line. The first sub-zone has a central region located centrally in the first sub-zone and an outer peripheral region located outside the central region when viewed along a Z-direction perpendicular to the first major surface. At least one of the first sub-power feeding portion and the second sub-power feeding portion is provided in the central region.
Electrostatic chuck and semiconductor manufacturing apparatus
An electrostatic chuck includes a ceramic dielectric substrate; a base plate; and a heater unit which heats the ceramic dielectric substrate. The heater unit includes first and second heater elements. The second heater element has a plurality of main zones separated from each other in a radial direction. The first heater element has a plurality of sub-zones separated from each other. A number of the sub-zones is larger than a number of the main zones. The main zones include a first main zone. The first main zone has a main heater line and a first main power feeding portion. The sub-zones include a first sub-zone overlapping the first main zone. The first sub-zone has a central region and an outer peripheral region. The first main power feeding portion is provided at a position where the first main power feeding portion overlaps the central region.
PANE WITH PATTERN FOR HIGH-FREQUENCY TRANSMISSION
A pane, in particular a vehicle pane, includes at least one first pane with an outer side and an inner side, at least one transparent, electrically conductive coating, which is arranged on the outer side and/or on the inner side of the first pane, and at least one pattern, which is formed by decoated, linear regions within the transparent, electrically conductive coating such that the linear regions are partially in contact with one another and, as a result, form a plurality of electrically isolated zones within the coating, wherein the decoated linear regions have a sinusoidal shape, wherein the pane has regions with different amplitude and/or frequency of the sinusoidal decoated regions.
FILM HEATER
A film heater includes a transparent conductive film and first and second electrodes. The transparent conductive film includes a heat generating portion that generates heat when energized by the first and second electrodes. An outer edge of the heat generating portion has a short side, a long side, and first and second oblique sides. The first and second electrodes include a plurality of first and second connection portions corresponding to a plurality of first and second ports, respectively. A plurality of first and second current suppression portions is disposed to suppress flow of the current between the inside and outside of the heat generating portion through a region between the plurality of first and second ports, respectively. For each of some or all of the plurality of first ports, the current flows through the heat generating portion between the first port and at least two second ports.
GLASS PLATE WITH ELECTRIC HEATING WIRE
A glass plate with an electric heating wire includes a glass plate having an information acquisition area through which information outside a vehicle is acquired by an information acquisition apparatus; and an electric heating wire provided in the information acquisition area. When the glass plate is mounted to a vehicle body in an inclined state, the information acquisition area has a rectangular shape viewed from a direction of an optical axis of the information acquisition apparatus, and has horizontal upper and lower sides. A plurality of streaks caused by waviness of the glass plate are arranged at intervals in a lateral direction parallel to the upper and lower sides, each streak extending in a vertical direction perpendicular to the lateral direction. The electric heating wire has a vertical portion that vertically traverses the information acquisition area. A plurality of vertical portions are provided at intervals in the lateral direction.
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
An electrostatic chuck includes a ceramic dielectric substrate; a base plate; and a heater unit which heats the ceramic dielectric substrate. The heater unit includes first and second heater elements. The second heater element has a plurality of main zones separated from each other in a radial direction. The first heater element has a plurality of sub-zones separated from each other. A number of the sub-zones is larger than a number of the main zones. The main zones include a first main zone. The first main zone has a main heater line and a first main power feeding portion. The sub-zones include a first sub-zone overlapping the first main zone. The first sub-zone has a central region and an outer peripheral region. The first main power feeding portion is provided at a position where the first main power feeding portion overlaps the central region.
ELECTROSTATIC CHUCK AND SEMICONDUCTOR MANUFACTURING APPARATUS
An electrostatic chuck includes a ceramic dielectric substrate; a base plate; and a heater unit which heats the ceramic dielectric substrate. The heater unit includes a first heater element. The first heater element has a plurality of sub-zones. The sub-zones include a first sub-zone. The first sub-zone includes a sub-heater line generating heat by allowing a current to flow, a first sub-power feeding portion feeding a power to the sub-heater line, and a second sub-power feeding portion feeding a power to the sub-heater line. The first sub-zone has a central region located centrally in the first sub-zone and an outer peripheral region located outside the central region when viewed along a Z-direction perpendicular to the first major surface. At least one of the first sub-power feeding portion and the second sub-power feeding portion is provided in the central region.
APPARATUS FOR MAKING A BEVERAGE, COMPRISING AN IMAGE ACQUISITION DEVICE
This invention relates to an apparatus (1) for making a beverage, comprising an infusion chamber (21) suitable for receiving a capsule containing a food substance for making a beverage, an insertion opening (31) for inserting the capsule into the apparatus (1), a transfer channel (32) for transferring the 5 capsule from the insertion opening (31) to the infusion chamber (21), an image acquisition device (4) which is intended, in use, to acquire at least one image of a portion of the capsule. The image acquisition device (4) includes an optical sensor (42) facing an image capture zone (40) in which, in use, said capsule is located or passes. The apparatus (1) further comprises a 0 viewing window (45), made of transparent material, which is interposed between the optical sensor (42) and the image capture zone (40). The viewing window (45) has a first face (451) facing the optical sensor (42) and a second face (452) facing the image capture zone (40). The apparatus (1) further comprises a heating element (6) applied to the viewing window (45) 5 or incorporated in the viewing window (45). The heating element (6) is an electrical resistor-type heater and is electrically connectable to an electricity supply. The heating element (6) is intended for heating the viewing window (45) during use of the apparatus (1).
REAR GLASS
A rear glass according to the present invention is a rear glass that is attachable to a resin lift-up back door in a rear of a vehicle, the rear glass including a glass plate, a defogger that is arranged in the vicinity of a center of the glass plate in an up-down direction, and an AM antenna that is arranged upward of the defogger on the glass plate, in which the AM antenna includes a power supply part and an antenna element that extends from the power supply part.
CAMERA MODULE, VEHICLE CAMERA AND MONITORING SYSTEM
The disclosure provides a camera module, a monitoring system and a vehicle camera, the camera module includes a lens barrel, a first lens and a heating element, the lens barrel includes a light entrance, the first lens is disposed at the light entrance, the first lens includes an image side surface, the heating element directly acts on the image side surface to heat the first lens. By directly applying the heating element to the image side surface of the first lens, the heating element can directly transmit heat energy to the first lens, thereby achieving the effect of defogging and defrosting automatically.