An apparatus for generating x-rays includes an electron beam generator and a first device arranged to apply an RF electric field to accelerate the electron beam from the generator. A photon source is arranged to provide photons to a zone to interact with the electron beam from the first device so as to generate x-rays via inverse-Compton scattering. A second device is arranged to apply an RF electric field to decelerate the electron beam after it has interacted. The first and second devices are connected by RF energy transmission means arranged to recover RF energy from the decelerated electron beam as it passes through the second device and transfer the recovered RF energy into the first device.

Disclosed embodiments include an electron accelerator, having a resonant cavity having an outer conductor and an inner conductor; an electron source configured to generate and to inject a beam of electrons transversally into the resonant cavity; a radio frequency (RF) source coupled to the resonant cavity and configured to: energize the resonant cavity with an RF power at a nominal RF frequency, and generate an electric field into said resonant cavity that accelerates the electrons of the electron beam a plurality of times into the cavity and according to successive and different transversal trajectories; and at least one deflecting magnet configured to bend back the electron beam that emerges out of the cavity and to redirect the electron beam towards the cavity.

Disclosed embodiments include an electron accelerator, having a resonant cavity having an outer conductor and an inner conductor; an electron source configured to generate and to inject a beam of electrons transversally into the resonant cavity; a radio frequency (RF) source coupled to the resonant cavity and configured to: energize the resonant cavity with an RF power at a nominal RF frequency, and generate an electric field into said resonant cavity that accelerates the electrons of the electron beam a plurality of times into the cavity and according to successive and different transversal trajectories; and at least one deflecting magnet configured to bend back the electron beam that emerges out of the cavity and to redirect the electron beam towards the cavity.

An accelerating cavity includes an electrically conductive cylindrical housing and a plurality of cells that are made of a dielectric material and have openings in respective central portions of the cells through which charged particles are allowed to pass. The cells are arranged inside the housing while being aligned in the axial direction of the central axis of the housing, and sandwiched by the housing in the axial direction of the central axis to be immobilized. The housing has grooves provided on portions thereof that support the respective cells and each having a depth that is one fourth of the wavelength of radio frequency waves for the acceleration mode that propagate through the cells.

An accelerating cavity includes an electrically conductive cylindrical housing and a plurality of cells that are made of a dielectric material and have openings in respective central portions of the cells through which charged particles are allowed to pass. The cells are arranged inside the housing while being aligned in the axial direction of the central axis of the housing, and sandwiched by the housing in the axial direction of the central axis to be immobilized. The housing has grooves provided on portions thereof that support the respective cells and each having a depth that is one fourth of the wavelength of radio frequency waves for the acceleration mode that propagate through the cells.

A high-frequency acceleration cavity core is a toroidal core obtained by winding an Fe-based magnetic ribbon having crystals with an average crystal grain size of 1 μm or less, in which a space factor of the Fe-based magnetic ribbon is 40% or more and 59% or less, and a μQf value at 1 MHz is 3×10.sup.9 Hz or more. The average crystal grain size is preferably 0.1 μm or less. The toroidal core preferably has a portion having a gap portion from an inner diameter to an outer diameter.

Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.

Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, the linear accelerator assembly may include a central support within a chamber, and a plurality of modules coupled to the central support, at least one module of the plurality of modules including an electrode having an aperture for receiving and delivering an ion beam along a beamline axis.

An apparatus may include a drift tube assembly, arranged to transmit an ion beam. The drift tube assembly may include a first ground electrode; an RF drift tube assembly, disposed downstream of the first ground electrode; and a second ground electrode, disposed downstream of the RF drift tube assembly. The RF drift tube assembly may define a triple gap configuration. The apparatus may include a resonator, where the resonator comprises a toroidal coil, having a first end, connected to a first RF drift tube of the RF drift tube assembly, and a second end, connected to a second RF drift tube of the RF drift tube assembly.

Apparatuses and methods for accelerating electrons including an electron source configured to provide a beam of electrons and an accelerator utilize electron cyclotron resonance acceleration (eCRA). The accelerator includes a radio frequency (RF) cavity having a longitudinal axis, one or more inlets, and one or more outlets and an electromagnet substantially surrounding at least a portion of the cavity and configured to produce an axial magnetic field. At least one pair of waveguides couple the cavity to an RF source configured to generate an RF wave. The RF wave is a superposition of two orthogonal TE.sub.111 transverse electric modes excited in quadrature to produce an azimuthally rotating standing-wave mode configured to accelerate the beam of electrons axially entering the cavity with non-linear cyclotron resonance acceleration.