A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.

A plurality of contact plugs to be connected to a drain region or a source region of each of transistors constituting a sub-word line driver that drives a sub-word line are formed, by using a SAC line technique of selectively etching an insulation layer that covers each of the transistors by using a mask having line-shaped openings provided across a portion in which the contact plugs of each of the transistors are to be formed.

A display substrate, a method for manufacturing the same and a display device are provided. The display substrate includes a base substrate, wherein a plurality of first touch electrodes is separated from each other and arranged on a first surface of the base substrate, first conductive lines and second conductive lines intersect each other and are arranged on a second surface of the base substrate, and each of the first touch electrodes is electrically connected to the first conductive line through the respective first via hole penetrating the base substrate.

A memory array comprises vertically-alternating tiers of insulative material and memory cells, with the memory cells individually comprising a transistor comprising first and second source/drain regions having a channel region there-between and a gate operatively proximate the channel region. At least a portion of the channel region is horizontally-oriented for horizontal current flow in the portion between the first and second source/drain regions. A capacitor of the memory cell comprises first and second electrodes having a capacitor insulator there-between. The first electrode is electrically coupled to the first source/drain region. A horizontal longitudinally-elongated sense line is in individual of the memory-cell tiers. Individual of the second source/drain regions of individual of the transistors that are in the same memory-cell tier are electrically coupled to the horizontal longitudinally-elongated sense line in that individual tier of memory cells. A capacitor-electrode structure extends elevationally through the vertically-alternating tiers. Individual of the second electrodes of individual of the capacitors are electrically coupled to the elevationally-extending capacitor-electrode structure. An access-line pillar extends elevationally through the vertically-alternating tiers. The gate of individual of the transistors in different of the memory-cell tiers comprises a portion of the elevationally-extending access-line pillar. Other embodiments, including method, are disclosed.

Some embodiments relate to a memory device including first and second conductive lines extending generally in parallel with one another within over a row of memory cells. A centerline extends generally in parallel with the first and second conductive lines and is spaced between the first and second conductive lines. A first plurality of conductive line segments is over the first conductive line. Conductive line segments of the first plurality of conductive line segments are coupled to different locations on the first conductive line. A second plurality of conductive line segments are disposed over the second conductive line, and are coupled to different locations on the second conductive line. The first plurality of conductive line segments and the second plurality of conductive line segments are collinear along the centerline.

A method includes forming insulative material along the opposing sides of a conductive via and a conductive line in a vertical cross-section comprising forming a laterally-inner-insulator material comprising silicon, oxygen, and carbon laterally-outward of the opposing sides of the conductive via and the conductive line in the vertical cross-section. A laterally-intervening-insulator material comprising silicon and oxygen is formed laterally-outward of opposing sides of the laterally-inner-insulator material in the vertical cross-section. The laterally-intervening-insulator material comprises less carbon, if any, than the laterally-inner-insulator material. A laterally-outer-insulator material comprising silicon, oxygen, and carbon is formed laterally-outward of opposing sides of the laterally-intervening-insulator material in the vertical cross-section. The laterally-outer-insulator material comprises more carbon than the laterally-inner-insulator material. Elevationally-extending-conductor material is formed laterally between and along the insulative material in the vertical cross-section. Additional method aspects, including structure independent of method of fabrication, are disclosed.

Semiconductor devices and method of manufacturing the same are provided. The devices may include a substrate including a first impurity region and second impurity regions spaced apart from the first impurity region and a conductive line. The conductive line may extend in a first direction and may be electrically connected to the first impurity region. The devices may also include first conductive contacts on a side of the conductive line and arranged in the first direction and first insulation patterns on the side of the conductive line and arranged in the first direction. The first conductive contacts may be electrically connected to the second impurity regions. The first conductive contacts and the first insulation patterns may be alternately disposed along the first direction. Top surfaces of the first insulation patterns may be lower than a top surface of the conductive line relative to an upper surface of the substrate.

Disclosed is an organic light emitting display including: a display panel on which a plurality of gate lines, a plurality of data lines, and a plurality of pixels are arranged, each pixel including an organic light emitting diode (OLED); a gate driving circuit connected to the pixels through the gate lines; and a data driving circuit connected to the pixels through the data lines, wherein each of the pixels comprises: a driving thin film transistor (TFT); a first switch TFT; a second switch TFT; a third switch TFT; and a storage capacitor, and wherein the first to third TFTs and the driving TFT are P-type TFTs.

An interconnect structure includes a lower interconnect layer, an intermediate interconnect layer, and an upper interconnect layer. First and second conductive lines in the lower interconnect layer extend generally in a first direction over a memory array region, and additional lower conductive lines in the lower interconnect layer extend generally in the first direction over a peripheral region. A first plurality of conductive line segments in the intermediate interconnect layer extend generally in the first direction over the memory array region, and additional intermediate conductive line segments in the intermediate interconnect layer extend generally in a second, perpendicular direction over the peripheral region. A second plurality of conductive line segments in the upper interconnect layer extend generally in the first direction over the memory array region, and additional upper conductive line segments in the upper interconnect layer extend generally in the first direction over the peripheral region.

A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. One of (a) a channel region of e transistor, or (b) a pair of electrodes of the capacitor, is directly above the other of (a) and (b). Additional embodiments and aspects are disclosed.