H10B12/48

Methods of forming microelectronic devices, and related microelectronic devices, memory devices, and electronic systems

A method of forming a microelectronic device comprises forming a conductive shielding material over a conductive shielding structure and a first dielectric structure horizontally adjacent the conductive shielding structure. A second dielectric structure is formed on first dielectric structure and horizontally adjacent the conductive shielding material. The conductive shielding material and the second dielectric structure are patterned to form fin structures extending in parallel in a first horizontal direction. Each of the fin structures comprises two dielectric end structures integral with remaining portions of the second dielectric structure, and an additional conductive shielding structure interposed between the two dielectric end structures in the first horizontal direction. Conductive lines are formed to extend in parallel in the first horizontal direction and to horizontally alternate with the fin structures in a second horizontal direction orthogonal to the first horizontal direction. Microelectronic devices, memory devices, and electronic systems are also described.

Organic light-emitting diode display
09748323 · 2017-08-29 · ·

An organic light-emitting diode display is disclosed. In one aspect, the display includes a substrate, a scan line formed over the substrate and configured to provide a scan signal, and a data line crossing the scan line and configured to provide a data voltage. A driving voltage line crosses the scan line and is configured to provide a driving voltage. The display also includes a switching transistor electrically connected to the scan line and the data line and a driving transistor electrically connected to the switching transistor and including a driving gate electrode, a driving source electrode, and a driving drain electrode. The display further includes a storage capacitor including a first storage electrode formed over the driving transistor and the driving gate electrode as a second storage electrode. The second storage electrode overlaps the first storage electrode in the depth dimension and extends from the driving voltage line.

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURING THE SAME
20220037251 · 2022-02-03 ·

A semiconductor device may include a substrate including a cell region and a core/peripheral region. A plurality of bit line structures may be in the cell region of the substrate. A gate structure may be in the core/peripheral regions of the substrate. A lower contact plug and an upper contact plug may be between the bit line structures. The lower contact plug and the upper contact plug may be stacked in a vertical direction. A landing pad pattern may contact an upper sidewall of the upper contact plug. The landing pad pattern may be between an upper portion of the upper contact plug and an upper portion of one of the bit line structures. An upper surface of the landing pad pattern may be higher than an upper surface of each of the bit line structures. A peripheral contact plug may be formed in the core/peripheral regions of the substrate. A wiring may be electrically connected to an upper surface of the peripheral contact plug.

Stacked memory with interface providing offset interconnects

A stacked memory with interface providing offset interconnects. An embodiment of memory device includes a system element and a memory stack coupled with the system element, the memory stack including one or more memory die layers. Each memory die layer includes first face and a second face, the second face of each memory die layer including an interface for coupling data interface pins of the memory die layer with data interface pins of a first face of a coupled element. The interface of each memory die layer includes connections that provide an offset between each of the data interface pins of the memory die layer and a corresponding data interface pin of the data interface pins of the coupled element.

Integrated Circuitry, DRAM Circuitry, Method Used in Forming Integrated Circuitry, and Method Used in Forming Memory Circuitry
20210408007 · 2021-12-30 · ·

A method used in forming integrated circuitry comprises forming conductive line structures having conductive vias laterally between and spaced longitudinally along immediately-adjacent of the conductive line structures. First insulating material is formed laterally between immediately-adjacent of the conductive vias. Second insulating material is formed directly above the first insulating material and directly above the conductive vias. The second insulating material comprises silicon, carbon, nitrogen, and hydrogen. A third material is formed directly above the second insulating material. The third material and the second insulating material comprise different compositions relative one another. The third material is removed from being directly above the second insulating material and the thickness of the second insulating material is reduced thereafter. A fourth insulating material is formed directly above the second insulating material of reduced thickness. A plurality of electronic components is formed above the fourth insulating material and that individually are directly electrically coupled to individual of the conductive vias through the fourth and second insulating materials. Other embodiments, including structure, are disclosed.

SEMICONDUCTOR MEMORY DEVICE
20210375876 · 2021-12-02 ·

The memory capacity of a DRAM is enhanced. A semiconductor memory device includes a driver circuit including part of a single crystal semiconductor substrate, a multilayer wiring layer provided over the driver circuit, and a memory cell array layer provided over the multilayer wiring layer. That is, the memory cell array overlaps with the driver circuit. Accordingly, the integration degree of the semiconductor memory device can be increased as compared to the case where a driver circuit and a memory cell array are provided in the same plane of a substrate containing a singe crystal semiconductor material.

Memory arrays

A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. One of (a) a channel region of the transistor, or (b) a pair of electrodes of the capacitor, is directly above the other of (a) and (b). Additional embodiments and aspects are disclosed.

Method of manufacturing dynamic random access memory

A method for manufacturing a DRAM includes: forming a hard mask layer on a substrate with an opening therein; forming a dielectric layer on a sidewall of the opening; forming a first barrier layer and a first conductor layer in the opening; performing a first dry etching and a first wet etching processes to respectively partially remove the first barrier layer and the first conductor layer, to expose the dielectric layer on upper sidewall; forming a second barrier layer in the opening; forming a mask layer in the opening to cover the second barrier layer; removing a part of the second barrier layer and the mask layer to expose the dielectric layer on the upper sidewall of the opening; and forming a second conductor layer in the opening.

TRANSISTORS, MEMORY CELLS, AND ARRANGEMENTS THEREOF

Disclosed herein are transistors, memory cells, and arrangements thereof. For example, in some embodiments, an integrated circuit (IC) structure may include a plurality of transistors, wherein the transistors are distributed in a hexagonally packed arrangement. In another example, in some embodiments, an IC structure may include a memory cell including an axially symmetric transistor coupled to an axially symmetric capacitor, wherein the axis of the transistor is aligned with the axis of the capacitor.

TRANSISTORS, MEMORY CELLS, AND ARRANGEMENTS THEREOF

Disclosed herein are transistors, memory cells, and arrangements thereof. For example, in some embodiments, an integrated circuit (IC) structure may include a plurality of transistors, wherein the transistors are distributed in a hexagonally packed arrangement. In another example, in some embodiments, an IC structure may include a memory cell including an axially symmetric transistor coupled to an axially symmetric capacitor, wherein the axis of the transistor is aligned with the axis of the capacitor.