A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. One of (a) a channel region of the transistor, or (b) a pair of electrodes of the capacitor, is directly above the other of (a) and (b). Additional embodiments and aspects are disclosed.

A semiconductor device and method of manufacturing the same is provided in the present invention. The method includes the step of forming first mask patterns on a substrate, wherein the first mask patterns extend in a second direction and are spaced apart in a first direction to expose a portion of first insulating layer, removing the exposed first insulating layer to form multiple recesses in the first insulating layer, performing a surface treatment to the recess surface, filling up the recesses with a second insulating layer and exposing a portion of the first insulating layer, removing the exposed first insulating layer to form a mesh-type isolation structure, and forming storage node contact plugs in the openings of mesh-type isolation structure.

Some embodiments include an integrated assembly having a semiconductor-containing structure with a body region vertically between an upper region and a lower region. The upper region includes a first source/drain region. The lower region is split into two legs which are both joined to the body region. One of the legs includes a second source/drain region and the other of the legs includes a body contact region. The first and second source/drain regions are of a first conductivity type, and the body contact region is of a second conductivity type which is opposite to the first conductivity type. An insulative material is adjacent to the body region. A conductive gate is adjacent to the insulative material. A transistor includes the semiconductor-containing structure, the conductive gate and the insulative material. Some embodiments include methods of forming integrated assemblies.

The memory capacity of a DRAM is enhanced. A semiconductor memory device includes a driver circuit including part of a single crystal semiconductor substrate, a multilayer wiring layer provided over the driver circuit, and a memory cell array layer provided over the multilayer wiring layer. That is, the memory cell array overlaps with the driver circuit. Accordingly, the integration degree of the semiconductor memory device can be increased as compared to the case where a driver circuit and a memory cell array are provided in the same plane of a substrate containing a singe crystal semiconductor material.

A memory array comprises vertically-alternating tiers of insulative material and memory cells. The memory cells individually comprise a transistor and a capacitor. One of (a) a channel region of e transistor, or (b) a pair of electrodes of the capacitor, is directly above the other of (a) and (b). Additional embodiments and aspects are disclosed.

A method of forming an integrated assembly includes providing a construction having laterally-spaced digit-line-contact-regions and having intervening regions between the laterally-spaced digit-line-contact-regions; forming an expanse of non-conductive-semiconductor-material which extends across the digit-line-contact-regions and the intervening regions; a lower surface of the non-conductive-semiconductor-material being vertically-spaced from upper surfaces of the digit-line-contact-regions; forming openings extending through the non-conductive-semiconductor-material to the digit-line-contact-regions; forming conductive-semiconductor-material-interconnects within the openings and coupled with the digit-line-contact-regions, upper surfaces of the conductive-semiconductor-material-interconnects being beneath the lower surface of the non-conductive-semiconductor-material; and forming metal-containing-digit-lines over the non-conductive-semiconductor-material.

The invention discloses a dynamic random access memory (DRAM) device and a method of fabricating such DRAM device. The DRAM device according to the invention includes a plurality of bit lines formed on a semiconductor substrate, a plurality of first isolation stripes, a plurality of second isolation stripes, a plurality of transistors formed between the first isolation stripes and the second isolation stripes, a plurality of word lines, and a plurality of capacitors formed above the first isolation stripes and the second isolation stripes. The semiconductor substrate defines a longitudinal direction, a transverse direction, a normal direction, a plurality of columns in the longitudinal direction, and a plurality of rows in the transverse direction. The first isolation stripes and the second isolation stripes extend in the longitudinal direction. Each transistor corresponds to one of the columns and one of the rows. The transistors on one side of each first isolation stripe and the transistors on the other side of said one first isolation stripe are staggeredly arranged. Each word line corresponds to one of the columns and connects the gate conductors of the transistors along the corresponding column. Each capacitor corresponds to one of the transistors and connects the source region of the corresponding transistor.

The invention discloses a NOR-type memory device and a method of fabricating such NOR-type memory device. The NOR-type memory device according to a preferred embodiment of the invention includes a semiconductor substrate, a plurality of bit lines formed on the semiconductor substrate, a plurality of first isolation stripes, a plurality of second isolation stripes, a plurality of multi-layer stripes, a plurality of memory cells, a plurality of first sub-bit lines, a plurality of second sub-bit line, a plurality of word lines, an insulating layer, a plurality of grounded via contacts, and a grounding layer. The first isolation stripes and the second isolation stripes extend in a longitudinal direction defined by the semiconductor substrate. Each memory cell corresponds to one of the columns and one of the rows defined by the semiconductor substrate. The memory cells on one side of each first isolation stripe and the memory cells on the other side of said one first isolation stripe are staggeredly arranged. Each word line corresponds to one of the columns and connects the gate conductors of the memory cells along the corresponding column. The insulating layer is formed on the multi-layer stripes, the first isolation stripes and the second isolation stripes. Each of the grounded via contacts corresponds to one of the second sub-bit lines, and is formed through the insulating layer to connect the corresponding second sub-bit line. The grounding layer is formed on the insulating layer to connect all of the grounded via contacts.

A semiconductor device including conductive lines is disclosed. First conductive lines each comprise a first portion, a second portion, and an enlarged portion, the enlarged portion connecting the first portion and the second portion of the first conductive line. The semiconductor device includes second conductive lines, at least some of the second conductive lines disposed between a pair of the first conductive lines, each second conductive line including a larger cross-sectional area at an end portion of the second conductive line than at other portions thereof. The semiconductor device includes a pad on each of the first conductive lines and the second conductive lines, wherein the pad on each of the second conductive lines is on the end portion thereof and the pad on each of the first conductive lines is on the enlarged portion thereof.

A method for fabricating an electronic device comprising a semiconductor memory is described. The method comprises forming material layers over a substrate; forming a hard mask pattern over the material layers, the hard mask pattern including an amorphous carbon layer; forming a capping protective layer including a portion on sidewalls of the hard mask pattern; and etching the material layers using the hard mask pattern as an etch barrier.