A resonator includes a base; and at least three vibrating arms having first ends connected to a front end of the base and second ends that are open ends spaced away from the front end. Each vibrating arm includes an arm portion having a part that extends from the fixed end in a direction toward the open end with a constant width and a mass-adding portion that is connected to a tip of the arm portion and has a larger width than the arm portion. An interval between the mass-adding portions is larger than an interval between the arm portions for any two vibrating arms that are adjacent to each other.

A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

Example methods include depositing a precursor layer onto a substrate where the precursor layer includes droplets comprising a polymerizable material, inducing a phase inversion in the precursor layer to obtain a modified precursor layer including droplets of a non-polymerizable liquid within a polymerizable liquid mixture, and polymerizing the polymerizable liquid mixture to obtain a nanovoided polymer element. Examples include devices fabricated using nanovoided polymer elements fabricated using such methods, including electroactive devices such as actuators and sensors.

Exemplary embodiments relate to a skin-adherable electronic device including a semiconductor circuit unit including a circuit element including an electrode and an interconnect, and a semiconductor device including an insulating layer and an active layer; and a flexible patch that can adhere to skin and including a plurality of through-holes, wherein the insulating layer includes a plurality of through-holes corresponding to the plurality of through-holes of the flexible patch, and a method of manufacturing the same. When the active layer is made of a piezoelectric material, the electronic device may be used as a skin sensor that can acquire skin deformation and/or elasticity information.

An optical element includes a nanovoided polymer layer having a first refractive index in an unactuated state and a second refractive index different than the first refractive index in an actuated state. Compression or expansion of the nanovoided polymer layer, for instance, can be used to reversibly control the size and shape of the nanovoids within the polymer layer and hence tune its refractive index over a range of values, e.g., during operation of the optical element. Various other apparatuses, systems, materials, and methods are also disclosed.

A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer. An electrically-conductive material layer is disposed on the piezoelectric material layer opposite the degenerately-doped single-crystal silicon layer, and patterned to form first and second electrodes.

[Object] It is an object of the present invention to provide a lithium tantalate single crystal substrate which undergoes only small warpage, is free from cracks and scratches, has better temperature non-dependence characteristics and a larger electromechanical coupling coefficient than a conventional Y-cut LiTaO.sub.3 substrate. [Means to solve the Problems] The lithium tantalate single crystal substrate of the present invention is a rotated Y-cut LiTaO.sub.3 single crystal substrate having a crystal orientation of 36° Y-49° Y cut characterized in that: the substrate is diffused with Li from its surface into its depth such that it has a Li concentration profile showing a difference in the Li concentration between the substrate surface and the depth of the substrate; and the substrate is treated with single polarization treatment so that the Li concentration is substantially uniform from the substrate surface to a depth which is equivalent to 5-15 times the wavelength of either a surface acoustic wave or a leaky surface acoustic wave propagating in the LiTaO.sub.3 substrate surface.

Embodiments of the invention include a display formed on an organic substrate and methods of forming such a device. According to an embodiment, an array of pixel mirrors may be formed on the organic substrate. For example, each of the pixel mirrors is actuatable about one or more axes out of the plane of the organic substrate. Additionally, embodiments of the invention may include an array of routing mirrors formed on the organic substrate. According to an embodiment, each of the routing mirrors is actuatable about two axes out of the plane of the organic substrate. In embodiments of the invention, a light source may be used for emitting light towards the array of routing mirrors. For example, light emitted from the light source may be reflected to one or more of the pixel mirrors by one of the routing mirrors.

A display device includes a scanned projector for projecting a beam of light, and a diffraction grating for dispersing the light at a plurality of angles into a waveguide, wherein at least a portion of the diffraction grating includes a nanovoided polymer. Manipulation of the nanovoid topology, such as through capacitive actuation, can be used to reversibly control the effective refractive index of the nanovoided polymer and hence the grating efficiency. The switchable grating can be used to control the amount of diffraction of an incident beam of light through the grating thereby decreasing optical loss. Various other methods, systems, apparatuses, and materials are also disclosed.

In some examples, a device includes a nanovoided polymer element, a planarization layer disposed on a surface of the nanovoided polymer element, a first electrode disposed on the planarization layer, and a second electrode. The nanovoided polymer element may be located at least in part between the first electrode and the second electrode. The planarization layer may be located between the nanovoided polymer element and the first electrode.