A mirror, e.g. for a microlithographic projection exposure apparatus, includes an optical effective surface, a mirror substrate, a reflection layer stack for reflecting electromagnetic radiation incident on the optical effective surface, at least one first electrode arrangement, at least one second electrode arrangement, and an actuator layer system situated between the first and the second electrode arrangements. The actuator layer system is arranged between the mirror substrate and the reflection layer stack, has a piezoelectric layer, and reacts to an electrical voltage applied between the first and the second electrode arrangements with a deformation response in a direction perpendicular to the optical effective surface. The deformation response varies locally by at least 20% in PV value for a predefined electrical voltage that is spatially constant across the piezoelectric layer.

The disclosed embodiments are generally directed to optical systems. The optical systems may include a proximal lens that may transmit light toward an eye of a user. The optical systems may also include a distal lens that may, in combination with the proximal lens, correct for at least a portion of a refractive error of the eye of the user. The optical systems may further include a selective transmission interface. The selective transmission interface may couple the proximal lens to the distal lens, transmits light having a selected property, and does not transmit light that does not have the selected property. The optical system can also include an accommodative lens, such as a liquid lens. Various other methods, systems, and computer-readable media are also disclosed.

A solid-state battery cell includes a cathode region, an anode region, a separator interconnecting the cathode region and the anode region, a cathode current collector on a surface of the cathode region, an anode current collector on a surface of the anode region, a first piezoelectric layer on a surface of the cathode current collector, and a second piezoelectric layer on a surface of the anode current collector. A method of operating a solid-state battery cell includes detecting a material change in the anode or the cathode, applying a voltage to the first piezoelectric material layer or the second piezoelectric material layer, and generating a pressure against the cathode current collector or the anode current collector by the first piezoelectric material layer or the second piezoelectric material layer, the pressure being generated as a result of the applied voltage.

An electroactive device may include (1) an electroactive polymer element having a first surface and a second surface opposite the first surface, the electroactive polymer element comprising a nanovoided polymer material, (2) a primary electrode abutting the first surface of the electroactive polymer element, and (3) a secondary electrode abutting the second surface of the electroactive polymer element. The electroactive polymer element may be deformable from an initial state to a deformed state by application of an electrostatic field produced by a potential difference between the primary electrode and the secondary electrode. Various other devices, systems, and methods are also disclosed.

An acoustic wave device includes: a piezoelectric substrate bonded on a support substrate, a surface including protruding portions and/or recessed portions being interposed between the piezoelectric substrate and the support substrate; a first acoustic wave resonator that includes first electrode fingers with a first average pitch and is disposed on the piezoelectric substrate in a first region where an average interval between the protruding portions and/or the recessed portions in a direction in which the first electrode fingers are arranged is a first interval; and a second acoustic wave resonator that includes second electrode fingers with a second average pitch different from the first average pitch, and is disposed on the piezoelectric substrate in a second region where an average interval between the protruding portions and/or the recessed portions in a direction in which the second electrode fingers are arranged is a second interval different from the first interval.

A method of manufacturing a disk drive suspension includes applying an adhesive to an actuator mounting portion, increasing viscosity of the adhesive by emitting light to the adhesive applied to the actuator mounting portion, arranging the piezoelectric element on the adhesive having the increased viscosity, detecting a height of the piezoelectric element arranged on the actuator mounting portion, and correcting an irradiation condition of the light in accordance with the detected height of the piezoelectric element.

A dielectric elastomer transducer according to the present invention includes a dielectric elastomer layer, and a pair of electrode layers sandwiching the dielectric elastomer layer. The electrode layers contain a binder and carbon black. The carbon black has a particle size distribution as measured by dynamic light scattering in which not less than 95% falls in a range of 0.15 to 8.0 μm. The carbon black has a particle size as measured by laser scattering ranging from 0.4 to 50 μm. The particle size distribution of the carbon black as measured by dynamic light scattering has a first peak that falls in a first range of 0.15 to 1.0 μm and a second peak that falls in a second range of 1.0 μm to 8.0 μm. This structure achieves both stretchability and electrical conductivity of the electrode layers.

A projection exposure apparatus comprises a projection objective, and the projection objective comprises an optical device, wherein the optical device comprises an optical element having an optically effective surface and an electrostrictive actuator. The electrostrictive actuator is deformable by a control voltage being applied. The electrostrictive actuator is functionally connected to the optical element to influence the surface shape of the optically effective surface. A control device supplies the electrostrictive actuator with the control voltage. A measuring device is configured, at least at times while the electrostrictive actuator influences the optically effective surface of the optical element, to measure directly and/or to determine indirectly the temperature and/or a temperature change of the electrostrictive actuator and/or the surroundings thereof to take account of a temperature-dependent influence during driving of the electrostrictive actuator by the control device.

Provided is a slot die coating device, and more specifically, a slot die coating device in which negative pressure generation is applied into a slot die and a method of using the same. The slot die coating device includes a first main body including a first surface, a second main body including a second surface corresponding to the first surface, and located to be spaced apart from the first surface by a regular interval, a main body unit including a head lip that is a space between the first surface and the second surface, and a negative pressure generation unit installed on at least one of the first main body and the second main body.

In some embodiments, a haptic actuator includes piezoelectric material and a pattern of voltage electrodes coupled to a surface of the piezoelectric material. The voltage electrodes are individually controllable to supply voltage to different portions of the piezoelectric material. Different sections of the piezoelectric material are operable to deflect, producing haptic output at those locations, in response to the application of the voltage. Differing voltages may be provided to one or more of the voltage electrodes to affect the location of the deflection, and thus the haptic output. In various embodiments, a haptic output system incorporates a sealed haptic element. The sealed haptic element includes a piezoelectric component that is coupled to one or more flexes and is sealed and/or enclosed by the flex(es) and an encapsulation or sealing material.