A piezoelectric device includes a beam portion that has a plate shape perpendicular to an axial direction of a directional axis, and has a fixed end provided on one side in a first direction perpendicular to the axial direction, a free end provided on an opposite side in the first direction, one surface provided on one side in the axial direction, and an opposite surface provided on an opposite side in the axial direction. The beam portion includes a concave and convex structure portion having a concave and a convex one of which is provided on the one surface and the other is provided on the opposite surface so as to overlap each other in the axial direction. The concave and the convex extend linearly in a second direction perpendicular to the axial direction and the first direction.

A piezoelectric microelectromechanical systems microphone is provided comprising a sensor, an anchor region at which the sensor is supported by a substrate, a first region of the sensor adjacent to the anchor region having a first compliance, the first region having at least one piezoelectric layer and at least one electrode, and a second region of the sensor, the second region being adjacent to the first region, having at least one piezoelectric layer and at least one electrode, and having a second compliance, the first and second compliances being different. A method for manufacturing a piezoelectric microelectromechanical systems microphone is also provided.

Vibrational energy produced by fans in electronic devices remain largely untapped. To address this, devices, systems, methods, and processes for harnessing the vibrational energy produced by such fans are described herein. The electronic device includes one or more electronic components and a fan tray. The fan tray includes one or more fans and a housing frame that houses the one or more fans. The one or more fans generate an airflow to cool the one or more electronic components and at least one fan of the one or more fans produces a vibration signal when in operation. The fan tray further includes one or more piezoelectric assemblies disposed relative to the housing frame. The one or more piezoelectric assemblies convert the vibration signal into respective electrical signals. The electrical signals can be converted to direct current (DC) to power the one or more electronic devices.