The present invention discloses a piezoelectric device comprising an amino acid crystal.

A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, and the fourth electrode configures a common electrode for the plurality of active portions.

A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, and the fourth electrode configures a common electrode for the plurality of active portions.

A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, the second electrode, the third electrode, and the fourth electrode configure common electrodes for the plurality of active portions, and the first electrode configures an individual electrode provided independently for each of the active portions.

A piezoelectric device includes a substrate on which a plurality of recesses are arranged in a first direction, a vibration plate, and a piezoelectric actuator having a first electrode, a second electrode and a third electrode, a fourth electrode, and a piezoelectric layer, in which a plurality of active portions are provided, the second electrode and the third electrode are provided from an edge of a region facing a recess to an outside of the recess, the first electrode is formed between the second electrode and the third electrode, the second electrode, the third electrode, and the fourth electrode configure common electrodes for the plurality of active portions, and the first electrode configures an individual electrode provided independently for each of the active portions.

A vibration device includes: a piezoelectric unit including a piezoelectric element; a housing that holds the piezoelectric unit; a wiring member electrically connected to the piezoelectric unit; and a joining member that joins the housing to an external device. The housing includes a bottom surface portion to which the piezoelectric unit is fixed, and a side surface portion standing at an edge portion of the bottom surface portion. The side surface portion has a first surface formed on a top portion of the side surface portion, and a second surface that is one step lowered from the first surface by a cutout portion formed in the top portion. The joining member extends along the first surface to bridge over the cutout portion. The wiring member is joined to the joining member at a position of the first surface, and passes through the cutout portion in a state where the wiring member is not joined to the second surface.

A vibration device includes: a piezoelectric unit including a piezoelectric element; and a housing made of metal that holds the piezoelectric unit. The housing includes a bottom surface portion to which the piezoelectric unit is fixed, and side surface portions that stand at an edge portion of the bottom surface portion to surround the piezoelectric unit. The side surface portions are continuous with the bottom surface portion, and are inclined to open outward from the edge portion with respect to the bottom surface portion.

A micropump device is formed in a monolithic semiconductor body integrating a plurality of actuator elements arranged side-by-side. Each actuator element has a first chamber extending at a distance from a first face of the monolithic body; a membrane arranged between the first face and the first chamber; a piezoelectric element extending on the first face over the membrane; a second chamber, arranged between the first chamber and a second face of the monolithic body; a fluidic inlet path fluidically connecting the second chamber with the outside of the monolithic body; and a fluid outlet opening extending in a transverse direction in the monolithic body from the second face as far as the second chamber, through the first chamber. The monolithic formation of the actuator elements and the possibility of driving the actuator elements at different voltages enable precise adjustment of flows, from very low values to high values.

In a method for calibrating at least one sensor, wherein the sensor includes at least one piezoelectric element with at least one electrode, and wherein at least one electrode is embodied as a measurement electrode, it is provided as essential to the invention that an electrical excitation voltage is applied to at least one further electrode of the piezoelectric element, embodied as a calibration electrode, to create a mechanical deformation of the piezoelectric element, that the voltage induced by the deformation of the piezoelectric element is captured with at least one measurement electrode, and that the applied excitation voltage and captured voltage are compared.

A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.