A device manufacturing method includes: forming a conductive layer, which is to be an air bridge, on a sacrificial layer in a first surface of a chip to pattern form the conductive layer; removing the sacrificial layer other than the sacrificial layer underneath the air bridge; mounting the chip with the sacrificial layer left underneath the air bridge on a board such that the first surface of the chip opposes the board; and removing the sacrificial layer left underneath the air bridge.

A device manufacturing method includes: forming a conductive layer, which is to be an air bridge, on a sacrificial layer in a first surface of a chip to pattern form the conductive layer; removing the sacrificial layer other than the sacrificial layer underneath the air bridge; mounting the chip with the sacrificial layer left underneath the air bridge on a board such that the first surface of the chip opposes the board; and removing the sacrificial layer left underneath the air bridge.

A first wiring made of a superconductor and a first electrode made of a superconductor connected to the first wiring are formed on a substrate. A resist mask that covers at least the first wiring is formed. A surface of the first electrode using the resist mask is etched. An insulator film on the surface of the first electrode using the resist mask is formed. A second electrode made of a superconductor on the surface of the insulator film using the resist mask is formed.

A first wiring made of a superconductor and a first electrode made of a superconductor connected to the first wiring are formed on a substrate. A resist mask that covers at least the first wiring is formed. A surface of the first electrode using the resist mask is etched. An insulator film on the surface of the first electrode using the resist mask is formed. A second electrode made of a superconductor on the surface of the insulator film using the resist mask is formed.

Provided are a frequency-tunable device using a magnetic field of a ferromagnetic material, and a superconducting device including the same. The superconducting device according to an embodiment may include: a frequency-tunable device including a Josephson, a first conductive pad and a second conductive pad connected with the first conductive pad by the Josephson junction; a structure including a ferromagnetic material; and a control circuit configured to control a resonant frequency of the frequency-tunable device by applying voltage to the structure to change the saturation magnetization of the ferromagnetic material.

Provided are a frequency-tunable device using a magnetic field of a ferromagnetic material, and a superconducting device including the same. The superconducting device according to an embodiment may include: a frequency-tunable device including a Josephson, a first conductive pad and a second conductive pad connected with the first conductive pad by the Josephson junction; a structure including a ferromagnetic material; and a control circuit configured to control a resonant frequency of the frequency-tunable device by applying voltage to the structure to change the saturation magnetization of the ferromagnetic material.

A superconductor-dielectric-superconductor including a first superconductor layer; a dielectric layer, and a second superconductor layer. Surface waves, in a microwave frequency range, propagate along the interface between dielectric and superconducting layers. The surface waves are hybrid waves composed of electromagnetic fields and supercurrent vortices.

A superconductor-dielectric-superconductor including a first superconductor layer; a dielectric layer, and a second superconductor layer. Surface waves, in a microwave frequency range, propagate along the interface between dielectric and superconducting layers. The surface waves are hybrid waves composed of electromagnetic fields and supercurrent vortices.

An electronic device (e.g., a diode) is provided that includes a substrate and a patterned layer of superconducting material disposed over the substrate. The patterned layer forms a first electrode, a second electrode, and a loop coupling the first electrode with the second electrode by a first channel and a second channel. The first channel and the second channel have different minimum widths. For a range of current magnitudes, when a magnetic field is applied to the patterned layer of superconducting material, the conductance from the first electrode to the second electrode is greater than the conductance from the second electrode to the first electrode.

An electronic device (e.g., a diode) is provided that includes a substrate and a patterned layer of superconducting material disposed over the substrate. The patterned layer forms a first electrode, a second electrode, and a loop coupling the first electrode with the second electrode by a first channel and a second channel. The first channel and the second channel have different minimum widths. For a range of current magnitudes, when a magnetic field is applied to the patterned layer of superconducting material, the conductance from the first electrode to the second electrode is greater than the conductance from the second electrode to the first electrode.