H10N70/021

NON-VOLATILE MEMORY STRUCTURE WITH POSITIONED DOPING
20230225227 · 2023-07-13 ·

Disclosed is a resistive random access memory (RRAM). The RRAM includes a bottom electrode made of tungsten and a switching layer made of hafnium oxide disposed above the bottom electrode, wherein the switching layer includes a filament and one or more lateral regions including a doping material that are between a top region and a bottom region of the switching layer. The RRAM further includes a top electrode disposed above the switching layer.

Method of forming phase-change memory layers on recessed electrodes

A device and a method of forming same are provided. The device includes a substrate, a first dielectric layer over the substrate, a bottom electrode extending through the first dielectric layer, a phase-change layer over the bottom electrode, and a top electrode over the phase-change layer. The phase-change layer includes a first portion extending into the bottom electrode and a second portion over the first portion and the first dielectric layer. A width of the first portion decreases as the first portion extends toward the substrate. The second portion has a first width. The top electrode has the first width.

Three dimensional memory arrays

The present disclosure includes three dimensional memory arrays. An embodiment includes a first plurality of conductive lines separated from one another by an insulation material, a second plurality of conductive lines arranged to extend substantially perpendicular to and pass through the first plurality of conductive lines and the insulation material, and a storage element material formed between the first and second plurality of conductive lines where the second plurality of conductive lines pass through the first plurality of conductive lines. The storage element material is between and in direct contact with a first portion of each respective one of the first plurality of conductive lines and a portion of a first one of the second plurality of conductive lines, and a second portion of each respective one of the first plurality of conductive lines and a portion of a second one of the second plurality of conductive lines.

High electron affinity dielectric layer to improve cycling

Various embodiments of the present disclosure are directed towards a memory cell comprising a high electron affinity dielectric layer at a bottom electrode. The high electron affinity dielectric layer is one of multiple different dielectric layers vertically stacked between the bottom electrode and a top electrode overlying the bottom electrode. Further, the high electrode electron affinity dielectric layer has a highest electron affinity amongst the multiple different dielectric layers and is closest to the bottom electrode. The different dielectric layers are different in terms of material systems and/or material compositions. It has been appreciated that by arranging the high electron affinity dielectric layer closest to the bottom electrode, the likelihood of the memory cell becoming stuck during cycling is reduced at least when the memory cell is RRAM. Hence, the likelihood of a hard reset/failure bit is reduced.

Phase-change memory and method of forming same

A device and a method of forming the same are provided. The device includes a substrate, a first dielectric layer over the substrate, a bottom electrode extending through the first dielectric layer, a first buffer layer over the bottom electrode, a phase-change layer over the first buffer layer, a top electrode over the phase-change layer, and a second dielectric layer over the first dielectric layer. The second dielectric layer surrounds the phase-change layer and the top electrode. A width of the top electrode is greater than a width of the bottom electrode.

Semiconductor device having three-dimensional cell structure
11696520 · 2023-07-04 · ·

A semiconductor device includes a substrate, a plurality of word line structures disposed over the substrate to be spaced apart from each other in a first direction perpendicular to a surface of the substrate. Each of the plurality of word line structures extends in a second direction parallel to the surface of the substrate. In addition, the semiconductor device includes a switching layer disposed over the substrate to contact side surfaces of the plurality of word line structures, and bit line structures disposed over the substrate to extend in the first direction and to contact a surface of the switching layer. The switching layer is configured to perform a threshold switching operation, and has a variable programmable threshold voltage.

1T1R MEMORY WITH A 3D STRUCTURE

A memory structured in lines and columns over several superimposed levels, each level comprising an array of memory elements and gate-all-around access transistors, each transistor including a semiconductor nanowire and each gate being insulated from the gates of the other levels, further comprising: conductive portions, each crossing at least two levels and coupled to first ends of the nanowires of one column of the levels; memory stacks, each crossing the levels and coupled to second ends of the nanowires of said column; first conductive lines, each connected to the conductive portions of the same column; word lines each extending in the same level while coupling together the gates of the same line and located in said level.

PHASE CHANGE MEMORY WITH CONDUCTIVE RINGS

A phase change memory, system, and method for gradually changing the conductance and resistance of the phase change memory while preventing resistance drift. The phase change memory may include a phase change material. The phase change memory may also include a bottom electrode. The phase change memory may also include a heater core proximately connected to the bottom electrode. The phase change memory may also include a set of conductive rings surrounding the heater core, where the set of conductive rings comprises one or more conductive rings, and where the set of conductive rings are proximately connected to the phase change material. The phase change memory may also include a set of spacers, where a spacer, from the set of spacers, separates a portion of a conductive ring, from the set of conductive rings, from the heater core.

PHASE CHANGE MEMORY WITH GRADED HEATER
20220416162 · 2022-12-29 ·

A heater, a system, and a method for linearly changing the resistance of the phase change memory through a graded heater. The system may include a phase change memory. The phase change memory may include a dielectric. The phase change memory may also include a heater patterned on the dielectric, the heater including: an outside conductive heating layer that has a higher resistance than other layers of the heater, and an inside conductive heating layer that has a lower resistance than the outside conductive heating layer, where the outside conductive heating layer is at an outside area of the heater and the inside conductive heating layer is at an inside area of the heater. The phase change memory may also include a phase change material proximately connected to the heater. The phase change memory may also include a top electrode proximately connected to the phase change material.

PHASE CHANGE MEMORY WITH CONCENTRIC RING-SHAPED HEATER

A ring-shaped heater, system, and method to gradually change the conductance of the phase change memory through a concentric ring-shaped heater. The system may include a phase change memory. The phase change memory may include a bottom electrode. The phase change memory may also include a ring-shaped heater patterned on top of the bottom electrode, the ring-shaped heater including: a plurality of concentric conductive heating layers, and a plurality of insulator spacers, where each insulator spacer separates each conductive heating layer. The phase change memory may also include a phase change material proximately connected to the ring-shaped heater. The phase change memory may also include a top electrode proximately connected to the phase change material.