H10N70/25

Method to produce 3D semiconductor devices and structures with memory
11600667 · 2023-03-07 · ·

A method for producing a 3D semiconductor device including: providing a first level, the first level including a first single crystal layer; forming first alignment marks and control circuits in and/or on the first level, where the control circuits include first single crystal transistors and at least two interconnection metal layers; forming at least one second level disposed above the control circuits; performing a first etch step into the second level; forming at least one third level disposed on top of the second level; performing additional processing steps to form first memory cells within the second level and second memory cells within the third level, where each of the first memory cells include at least one second transistor, where each of the second memory cells include at least one third transistor, performing bonding of the first level to the second level, where the bonding includes oxide to oxide bonding.

Vertical nonvolatile memory device including memory cell string

A vertical nonvolatile memory device including memory cell strings using a resistance change material is provided. Each of the memory cell strings of the nonvolatile memory device includes a semiconductor layer extending in a first direction; a plurality of gates and a plurality of insulators alternately arranged in the first direction; a gate insulating layer extending in the first direction between the plurality of gates and the semiconductor layer and between the plurality of insulators and the semiconductor layer; and a resistance change layer extending in the first direction on a surface of the semiconductor layer. The resistance change layer includes a metal-semiconductor oxide including a mixture of a semiconductor material of the semiconductor layer and a transition metal oxide.

Semiconductor device and method for manufacturing semiconductor device

A semiconductor device with a large storage capacity per unit area is provided. The semiconductor device includes a first insulator including a first opening, a first conductor that is over the first insulator and includes a second opening, a second insulator that is over the first insulator and includes a third opening, and an oxide penetrating the first opening, the second opening, and the third opening. The oxide includes a first region at least in the first opening, a second region at least in the second opening, and a third region at least in the third opening. The resistances of the first region and the third region are lower than the resistance of the second region.

SEMICONDUCTOR DEVICE
20230138698 · 2023-05-04 ·

A semiconductor memory may include at least one memory cell. The memory cell may include: a first electrode layer; a second electrode layer separated from the first electrode layer, wherein the first and second electrode layers are coupled to receive a voltage applied to the first and second electrode layers; and a self-selecting memory layer interposed between the first electrode layer and the second electrode layer and configured to store data and operable to disconnect or connect a conducting path between the first electrode layer and the second electrode layer, to respond to the voltage applied to the first and second electrode layers, wherein the self-selecting memory layer includes an insulating material layer, a first dopant that creates a shallow trap providing a path for conductive carriers in the insulating material layer, and a second dopant that is movable in the insulating material layer according to a polarity of the voltage applied to the first and second electrode layers.

MEMORY COMPRISING CONDUCTIVE FERROELECTRIC MATERIAL IN SERIES WITH DIELECTRIC MATERIAL
20230147275 · 2023-05-11 · ·

A memory device including a three dimensional crosspoint memory array comprising a plurality of memory cells, wherein a memory cell of the plurality of memory cells comprises a conductive ferroelectric material and wherein the conductive ferroelectric material is in series with a dielectric material.

SELF-ALIGNED MULTILAYER SPACER MATRIX FOR HIGH-DENSITY TRANSISTOR ARRAYS AND METHODS FOR FORMING THE SAME

A two-dimensional array of discrete dielectric template structures is formed over a substrate. A first dielectric spacer matrix may be formed in lower portions of the trenches between the discrete dielectric template structures. A second dielectric spacer matrix layer may be formed in upper portions of the trenches. A pair of a source cavity and a drain cavity may be formed within a volume of each of the discrete dielectric template structures. A source electrode and a drain electrode may be formed in each source cavity and each drain cavity, respectively. The gate electrodes may be formed prior to, or after, formation of the two-dimensional array of discrete dielectric template structures to provide a two-dimensional array of field effect transistors that may be connected to, or may contain, memory elements.

3D SEMICONDUCTOR DEVICES AND STRUCTURES
20230189537 · 2023-06-15 · ·

A semiconductor device, the device comprising: a plurality of transistors, wherein at least one of said plurality of transistors comprises a first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a second single crystal source, channel, and drain, wherein said second single crystal source, channel, and drain is disposed above said first single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a third single crystal source, channel, and drain, wherein said third single crystal source, channel, and drain is disposed above said second single crystal source, channel, and drain, wherein at least one of said plurality of transistors comprises a fourth single crystal source, channel, and drain, and wherein said third single crystal channel is self-aligned to said fourth single crystal channel being processed following the same lithography step.

SWITCHING ELEMENT, RESISTIVE MEMORY DEVICE INCLUDING SWITCHING ELEMENT, AND METHODS OF MANUFACTURING THE SAME
20170338409 · 2017-11-23 ·

A method of manufacturing a switching element includes forming a pillar-shaped structure over a substrate, performing a dopant injection process to form a first doping region in an insulation layer. The method further includes performing the dopant injection process to form a second doping region in a first electrode, to form a third doping region in a second electrode, or both. The pillar-shaped structure includes the first electrode, the insulation layer, and the second electrode that are disposed over a substrate. The first and second doping regions form a first interface therebetween, and the first and third doping regions form a second interface therebetween. The first doping region corresponds to a region in which a threshold switching operation region is performed.

3D SEMICONDUCTOR DEVICE AND STRUCTURE WITH REPLACEMENT GATES

A 3D semiconductor device, the device including: a first level including a first single crystal layer and first single crystal transistors; a first metal layer; a second metal layer disposed atop the first metal layer; second transistors disposed atop of the second metal layer; third transistors disposed atop of the second transistors, where at least one of the third transistors includes at least one replacement gate, being processed to replace a non-metal gate material with a metal based gate, and where a distance from at least one of the third transistors to at least one of the first transistors is less than 2 microns.

Electronic synaptic device and method for manufacturing same

An electronic synaptic device includes: a lower electrode; an upper electrode; and an active layer provided between the lower electrode and the upper electrode and including a plurality of conductive nanoparticles, wherein the conductive nanoparticles are dispersed in a matrix forming a continuous phase, and the matrix is composed of a protein. The electronic synaptic device has a low switching operation voltage, is capable of implementing a transition phenomenon from a short term potentiation state to a long term potentiation state even with a relatively low voltage, and has high stability; and, therefore, can be preferably applied as a memristive device for implementing neuromorphic computing.