An RRAM cell stack is formed over an opening in a dielectric layer. The dielectric layer is sufficiently thick and the opening is sufficiently deep that an RRAM cell can be formed by a planarization process. The resulting RRAM cells may have a U-shaped profile. The RRAM cell area includes contributions from a bottom portion in which the RRAM cell layers are stacked parallel to the substrate and a side portion in which RRAM cell layers are stacked roughly perpendicular to the substrate. The combined side and bottom portions of the curved RRAM cell provide an increased area in comparison to a planar cell stack. The increased area lowers forming and set voltages for the RRAM cell.

A memory device includes a first layer, wherein the first layer includes a first memory array, a first row decoder circuit, and a first column sensing circuit. The memory device includes a second layer disposed with respect to the first layer in a vertical direction. The second layer includes a first peripheral circuit operatively coupled to the first memory array, the first row decoder circuit, and the first column sensing circuit. The memory device includes a plurality of interconnect structures extending along the vertical direction. At least a first one of the plurality of interconnect structures operatively couples the second layer to the first layer.

A first phase change material layer vertically aligned above a bottom electrode, a dielectric layer vertically aligned above the first phase change material layer, a second phase change material layer vertically aligned above the dielectric layer, an inner electrode physically and electrically connected to the first phase change material layer and the second phase change material layer, the inner electrode surrounded by the dielectric layer, a top electrode vertically aligned above the second phase change material layer. A first phase change material layer vertically aligned above a bottom electrode, a filament layer vertically aligned above the first phase change material layer, a second phase change material layer vertically aligned above the filament layer, an inner break in the filament layer connecting the first phase change material layer and the second phase change material layer, a top electrode vertically aligned above the second phase change material layer.

Provided is a method of manufacturing a resistive random access memory (RRAM) including: forming a lower electrode protruding from a top surface of a dielectric layer; conformally forming a data storage layer on the lower electrode and the dielectric layer; forming an oxygen reservoir material layer on the data storage layer; forming an opening in the oxygen reservoir material layer to expose the data storage layer on the lower electrode; forming an isolation structure in the opening, wherein the isolation structure divides the oxygen reservoir material layer into a first oxygen reservoir layer and a second oxygen reservoir layer; and forming an upper electrode on the first and second oxygen reservoir layers, wherein the first and second oxygen reservoir layers share the upper electrode.

A resistive memory device includes an ultrathin barrier layer disposed between the bottom electrode and the bottom electric contact to the memory device. The ultrathin barrier layer may reduce the overall step height of the resistive memory elements by 15% or more, including up to about 20% or more. The use of an ultrathin barrier layer may additionally improve the uniformity of the thickness of the dielectric etch stop layer that partially underlies and extends between the memory elements by at least about 15%. The use of an ultrathin barrier layer may result in improved manufacturability and provide reduced costs and higher yields for resistive memory devices, and may facilitate integration of resistive memory devices in advanced technology nodes.

A semiconductor device is provided. The semiconductor device includes a heater formed on a substrate; a hardmask formed on the heater; a phase change material layer formed on a first side of the heater and the hardmask; a first electrode formed on the phase change material layer on the first side; and a second electrode formed on the substrate on a second side of the heater and the hardmask.

A method for co-manufacturing a FeRAM and an OxRAM includes depositing a layer of first electrode carried out identically for a zone Z1 and a zone Z2; depositing a layer of hafnium dioxide-based active material carried out identically for Z1 and Z2; depositing a first conductive layer carried out identically for Z1 and Z2; making a mask at Z2, leaving Z1 free; removing the layer at Z1, with Z2 being protected by the mask; removing the mask at Z2; and depositing a second conductive layer in contact with the layer at Z2 and in contact with the layer at Z1, the material of the layer being chosen to create oxygen vacancies in the active layer and depositing a third conductive layer carried out identically for Z1 and Z2.

A method for programming a phase change memory including a first layer of a phase change material capable of switching between a crystalline and an amorphous state and vice versa, the method including applying a programming current through the first layer so that an evolution of the areal density of this current as a function of time t decreases from a first level, between a first time and a second time, following a first evolution in time respecting, or being close to $J_0\left(t\right)=\frac{K}{\sqrt{t}}$
where K is a constant.

The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first resistive random access memory (RRAM) element and a second RRAM element over a substrate. A conductive element is arranged below the first RRAM element and the second RRAM element. The conductive element electrically couples the first RRAM element to the second RRAM element. An upper insulating layer continuously extends over the first RRAM element and the second RRAM element. An upper inter-level dielectric (ILD) structure laterally surrounds the first RRAM element and the second RRAM element. The upper insulating layer separates the first RRAM element and the second RRAM element from the upper ILD structure.

A memory device includes a memory cell array. The memory cell array includes first-tier word lines extending in a first direction, second-tier word lines disposed below the first-tier word lines and extending in a second direction angularly offset from the first direction, and bit lines extending in a third direction angularly offset from the first and second directions. The bit lines are arranged between a pair of the first-tier word lines and between a pair of the second-tier word lines.