H01J1/15

Vacuum electron tube with planar cathode based on nanotubes or nanowires
10720298 · 2020-07-21 · ·

A vacuum electron tube comprises at least one electron-emitting cathode and at least one anode arranged in a vacuum chamber, the cathode having a planar structure comprising a substrate comprising a conductive material, a plurality of nanotube or nanowire elements electrically insulated from the substrate, the longitudinal axis of the nanotube or nanowire elements substantially parallel to the plane of the substrate, and at least one first connector electrically linked to at least one nanotube or nanowire element so as to be able to apply a first electrical potential to the nanowire or nanotube element.

Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun

The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

Focusing electrode for cathode arrangement, electron gun, and lithography system comprising such electron gun

The invention relates to a cathode arrangement comprising: a thermionic cathode comprising an emission portion provided with an emission surface for emitting electrons, and a reservoir for holding a material, wherein the material, when heated, releases work function lowering particles that diffuse towards the emission portion and emanate at the emission surface at a first evaporation rate; a focusing electrode comprising a focusing surface for focusing the electrons emitted from the emission surface of the cathode; and an adjustable heat source configured for keeping the focusing surface at a temperature at which accumulation of work function lowering particles on the focusing surface is prevented.

Low temperature, high-brightness, cathode

Thermionic cathodes and an electron emission apparatus are provided. The thermionic cathodes comprise perovskite material in crystal or sintered form. The thermionic cathodes provide strong electron emission at low operating temperatures.

Low temperature, high-brightness, cathode

Thermionic cathodes and an electron emission apparatus are provided. The thermionic cathodes comprise perovskite material in crystal or sintered form. The thermionic cathodes provide strong electron emission at low operating temperatures.

Conical heat shield for electron emitting cathode

An electron emission cathode which includes a base, a heater connected to the base, an electron emitter connected to the heater at a mounting location distal to the base, and a conical heat shield surrounding a portion of the heater, having a truncated cone shape comprising a narrow end oriented toward the base and a wide end oriented toward the electron emitter. The conical heat shield is configured to reflect heat radiated by the heater toward the electron emitter. The conical heat shield reduces an overheating required to bring the electron emitter to an emission temperature and reduces a heating power required to operate the cathode.

ESTIMATION OF CATHODE SPACE CURRENT FOR A THERMIONIC VACUUM TUBE USING A POLYNOMIAL BASED ON A HEURISTICALLY DETERMINED VARIABLE REPRESENTING THE GRID AND PLATE VOLTAGES
20190362926 · 2019-11-28 ·

A method includes performing by a processor: estimating a total cathode space current for a thermionic vacuum tube having at least one grid and a plate, such that at least one amplification factor associated with the at least one grid is determined by a polynomial based on a variable that represents at plurality of voltages associated with the at least one grid and the plate, the variable being heuristically determine. Transitions between positive and negative grid operation may experience a step change in estimated current value caused by the inclusion or elimination of grid current. A part of the grid current may be added back into the plate current during transition. This small contribution to plate current may gradually diminish as tube operation moves farther away from the transition boundary.

ESTIMATION OF CATHODE SPACE CURRENT FOR A THERMIONIC VACUUM TUBE USING A POLYNOMIAL BASED ON A HEURISTICALLY DETERMINED VARIABLE REPRESENTING THE GRID AND PLATE VOLTAGES
20190362926 · 2019-11-28 ·

A method includes performing by a processor: estimating a total cathode space current for a thermionic vacuum tube having at least one grid and a plate, such that at least one amplification factor associated with the at least one grid is determined by a polynomial based on a variable that represents at plurality of voltages associated with the at least one grid and the plate, the variable being heuristically determine. Transitions between positive and negative grid operation may experience a step change in estimated current value caused by the inclusion or elimination of grid current. A part of the grid current may be added back into the plate current during transition. This small contribution to plate current may gradually diminish as tube operation moves farther away from the transition boundary.

ANNULAR GAP CATHODES WITH GRAPHITE CAPS
20240161993 · 2024-05-16 ·

A cathode device including an emitter element for generating electrons. The emitter element can have an outer periphery and a distal tip. The tip can have a first angled surface that angles inwardly from the outer periphery, and a second angled surface that angles inwardly and is separated and inwardly offset from the first angled surface by a shoulder. A graphite cap which can be solid, extends around the emitter element and has an internal angled surface that engages the first angled surface of the tip of the emitter element, forming a gap of a controlled size separating the internal angled surface of the graphite cap from the second angled surface of the tip of the emitter element.

ANNULAR GAP CATHODES WITH GRAPHITE CAPS
20240161993 · 2024-05-16 ·

A cathode device including an emitter element for generating electrons. The emitter element can have an outer periphery and a distal tip. The tip can have a first angled surface that angles inwardly from the outer periphery, and a second angled surface that angles inwardly and is separated and inwardly offset from the first angled surface by a shoulder. A graphite cap which can be solid, extends around the emitter element and has an internal angled surface that engages the first angled surface of the tip of the emitter element, forming a gap of a controlled size separating the internal angled surface of the graphite cap from the second angled surface of the tip of the emitter element.