A vacuum exhaust method is for decreasing a pressure in a processing chamber in which a mounting table configured to mount thereon a substrate is provided by using a gas exhaust unit. The vacuum exhaust method includes mounting a non-evaporated getter (NEG) on the mounting table, and adsorbing an active gas in the processing chamber on the NEG mounted on the mounting table. In the adsorbing the active gas, the NEG is maintained at a predetermined temperature.

A non-evaporable getter 1 includes a mesh 3, a frame 2 which is attached to the mesh 3 and suppresses deformation of the mesh 3, and a powder-state getter material 4 which is surrounded by the mesh 3 and the frame 2, and whose particle size is larger than a mesh opening of the mesh 3.

Disclosed is an x-ray tube including a hybrid electron emission source, which uses, as an electron emission source, a cathode including both a field electron emission source and a thermal electron emission source. An x-ray tube includes an electron emission source emitting an electron beam, and a target part including a target material that emits an x-ray as the emitted electron beam collides with the target part, wherein the electron emission source includes a thermal electron emission source and a field electron emission source, and emits the electron beam by selectively using at least one of the thermal electron emission source and the field electron emission source.

There is provided a pipe in a solar thermal power plant. The pipe includes an inner tube configured for carrying a heated heat transfer fluid, an outer tube surrounding the inner tube, wherein the space between the inner and outer tube is evacuated, and a getter restraint structure configured for maintaining getters in a predetermined position. The getter restraint structure is in contact with the outer tube and otherwise entirely free of contact with the inner tube and/or is in thermal isolation from the inner tube.

Some embodiments include an apparatus, comprising: a vacuum enclosure including an opening; a support structure disposed in the vacuum enclosure, the support structure comprising: a first portion attached to the vacuum enclosure at the opening; and a second portion extending within the vacuum enclosure; and a plurality of getters disposed on the second portion of the support structure.