A magnetron is provided and includes a tube body with a plurality of communicated first cavities therein, a plurality of anodes in the first cavities including a cylinder and a plurality of vanes, outer ends of the vanes are connected with an inner circumferential surface of the cylinder; a first resonant cavity and a second resonant cavity are formed between the adjacent vanes, the cylinder is provided with a plurality of coupling slots arranged at intervals and running through the cylinder to communicate the first resonant cavity with the first cavity; a plurality of cathode arranged in and coaxially with the cylinder; the cathodes and inner ends of the vanes are spaced apart; at least part of the cathodes are located inside vanes, and an output slot is defined on the tube body for communicating the first cavity with an outside.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

A 4G magnetron is disclosed. The magnetron may include an anode, having a cylindrical member and anode vanes disposed within the cylindrical member which define resonant cavities therebetween, and a dispenser cathode, suitable for heating and located coaxially within said anode. The magnetron may operate in a temperature range of about 850-1050 C. The magnetron may include conductive cooling. The magnetron may comprise inventive anode and cathode structures. A method for preparing a plurality of magnetron tubes substantially simultaneously is further provided.

Embodiments herein are directed to a resonator for an ion implanter. In some embodiments, a resonator may include a housing, and a first coil and a second coil partially disposed within the housing. Each of the first and second coils may include a first end including an opening for receiving an ion beam, and a central section extending helically about a central axis, wherein the central axis is parallel to a beamline of the ion beam, and wherein an inner side of the central section has a flattened surface.

According to one embodiment, a klystron includes an electron gun unit, a plurality of resonant cavities, a collector, and a plurality of drift tubes. The resonant cavities include an input cavity, a plurality of intermediate cavities, and an output cavity, positioned sequentially along the traveling direction of electrons from the electron gun unit. The intermediate cavities include a plurality of second harmonic cavities. The collector captures the electrons that have passed through the resonant cavities. The drift tubes are provided between the electron gun unit and the input cavity, between the resonant cavities, and between the output cavity and the collector.

According to one embodiment, a klystron includes an electron gun unit, a plurality of resonant cavities, a collector, and a plurality of drift tubes. The resonant cavities include an input cavity, a plurality of intermediate cavities, and an output cavity, positioned sequentially along the traveling direction of electrons from the electron gun unit. The intermediate cavities include a plurality of second harmonic cavities. The collector captures the electrons that have passed through the resonant cavities. The drift tubes are provided between the electron gun unit and the input cavity, between the resonant cavities, and between the output cavity and the collector.

A device comprising an RF cavity enclosure including a tubular section having a plurality of interior structures radially or axially arranged which forms an unobstructed inner hollow center within the tubular section. Each interior structure of the plurality of interior structures includes side walls between which is formed an internal hollow sub-cavity. Resonating cavities exist between adjacent interior structures to produce a resonating frequency response. Vents are formed in at least one side wall for permeation of a gas into the internal hollow sub-cavity. A high-power microwave system and method of manufacture are provided.

A device comprising an RF cavity enclosure including a tubular section having a plurality of interior structures radially or axially arranged which forms an unobstructed inner hollow center within the tubular section. Each interior structure of the plurality of interior structures includes side walls between which is formed an internal hollow sub-cavity. Resonating cavities exist between adjacent interior structures to produce a resonating frequency response. Vents are formed in at least one side wall for permeation of a gas into the internal hollow sub-cavity. A high-power microwave system and method of manufacture are provided.

A millimeter-wave extended interaction device, including: a device body; resonant cavities; electron beam tunnels; an output waveguide; and a coupling hole. The device body includes a shell and a core, and an annular coupling channel is disposed between the shell and the core. The resonant cavities are a set of ring-shaped cavities with a radial height of 2/5, to 3/5, parallel and equally spaced around an axis of the core. The electron beam tunnels are arranged at equal radian intervals and parallel to the axis of the core. The output waveguide is disposed in the middle of the shell and communicates with the annular coupling channel through a coupling hole. The core and the inner surface of the shell are sealed and fixed, and the output waveguide and the shell are sealed and fixed.

A millimeter-wave extended interaction device, including: a device body; resonant cavities; electron beam tunnels; an output waveguide; and a coupling hole. The device body includes a shell and a core, and an annular coupling channel is disposed between the shell and the core. The resonant cavities are a set of ring-shaped cavities with a radial height of 2/5, to 3/5, parallel and equally spaced around an axis of the core. The electron beam tunnels are arranged at equal radian intervals and parallel to the axis of the core. The output waveguide is disposed in the middle of the shell and communicates with the annular coupling channel through a coupling hole. The core and the inner surface of the shell are sealed and fixed, and the output waveguide and the shell are sealed and fixed.