A method of determining a design of a transmission waveguide, the method comprising: providing a system comprising a transmission waveguide connected at a first end thereof to an RF source; generating an electromagnetic field in the system by application of RF energy of a harmonic frequency of the RF source to the transmission waveguide; determining whether a reference location in the RF source meets a requirement relating directly or indirectly to an electromagnetic field in the RF source; and if the requirement is met, outputting the current design of the transmission waveguide as its design.

A method of determining a design of a transmission waveguide, the method comprising: providing a system comprising a transmission waveguide connected at a first end thereof to an RF source; generating an electromagnetic field in the system by application of RF energy of a harmonic frequency of the RF source to the transmission waveguide; determining whether a reference location in the RF source meets a requirement relating directly or indirectly to an electromagnetic field in the RF source; and if the requirement is met, outputting the current design of the transmission waveguide as its design.