H01J27/024

Varied component density for thermal isolation

A system that utilizes a component that controls thermal gradients and the flow of thermal energy by variation in density is disclosed. Methods of fabricating the component are also disclosed. The component is manufactured using additive manufacturing. In this way, the density of different regions of the component can be customized as desired. For example, a lattice pattern may be created in the interior of a region of the component to reduce the amount of material used. This reduces weight and also decreases the thermal conduction of that region. By using low density regions and high density regions, the flow of thermal energy can be controlled to accommodate the design constraints.

Systems, devices, and methods for contaminant resistant insulative structures

Embodiments of systems, devices, and methods relate to an electrode standoff isolator. An example electrode standoff isolator includes a plurality of adjacent insulative segments positioned between a proximal end and a distal end of the electrode standoff isolator. A geometry of the adjacent insulative is configured to guard a surface area of the electrode standoff isolator against deposition of a conductive layer of gaseous phase materials from a filament of an ion source.

Ion implanter and ion implantation method

An ion implanter includes an ion source configured to generate an ion beam including an ion of a first nonradioactive nuclide, a beamline configured to support an ion beam irradiated target formed of a solid material including a second nonradioactive nuclide different from the first nonradioactive nuclide, and a controller configured to calculate at least one of an estimated radiation dosage of a radioactive ray and an estimated generation amount of a radioactive nuclide generated by a nuclear reaction between the first nonradioactive nuclide and the second nonradioactive nuclide.

Method of manufacturing actively cooled accelerator grid with full penetration weld configuration

Disclosed is an improved method of manufacturing cooled accelerator grid with full penetration weld configuration. In a preferred form, the method includes the steps of: machining a plurality of stubs, a first and a second end of a plurality of inconel pipes; welding the stubs with the first end of the inconel pipes forming a water connector assembly; machining of a base plate; welding the base plate with the water connector assembly; machining the base plate welded with the water connector assembly, wherein machining further comprises milling of plurality of cooling channels across angled plane of the base plate welded with the water connector assembly; closing of plurality of cooling channels located on the base plate welded with the water connector assembly; and welding each of plurality of external hydraulic circuits with the second end of each of the plurality of inconel pipes.

Extraction apparatus and system for high throughput ion beam processing

In one embodiment, an ion extraction optics for extracting a plurality of ion beams is provided. The ion extraction optics may include, an extraction plate, the extraction plate defining a cut-out region, the cut-out region being elongated along a first direction. The extraction apparatus may include a slidable insert, the slidable insert disposed to overlap the cut-out region, and slidably movable with respect to the extraction plate, along the first direction, wherein the slidable insert and cut-out region define a first aperture and a second aperture.

GLOW DISCHARGE SYSTEM, ION EXTRACTION STRUCTURE THEREOF, AND GLOW DISCHARGE MASS SPECTROSCOPE
20190304766 · 2019-10-03 · ·

There is provided a glow discharge mass spectroscope having a higher analytical sensitivity by increasing an amount of extracted ion beams without a significant change in device construction and drive conditions of conventional glow discharge systems. An extraction plate 25 that is disposed at an ion extraction port of a discharge cell 20 and functions as an extraction electrode includes a first plate 26 that has a projection 26a projected toward a discharge region 27 in an opening 25a and that is disposed on the discharge region 27 side, and a second plate 28 that is connected to the first plate 26 in an outer circumferential edge and that is disposed with a gap provided between the first plate 26 and the second plate 28.

HIGH RELIABILITY, LONG LIFETIME, NEGATIVE ION SOURCE

A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species including hyperthermal neutral atoms. The negative ion converter converts the hyperthermal neutral atoms to negative ions. The magnetic filter reduces a temperature of an electron density provided between the plasma chamber and the negative ion converter. The beam formation mechanism extract the negative ions.

MEMS device for generating an ion beam

A generator of an ion beam is provided, including an ionization chamber provided with an inlet of a fluid to be ionized; a source of ionizing particles configured to impact the fluid in an impact zone of the ionization chamber so as to generate ions; and an extractor of ions generated in a direction of an outlet zone of the generator, the extractor including at least two electrodes, a first electrode referred to as input electrode laterally bordering the impact zone, and at least one second electrode referred to as intermediate electrode located in the impact zone, the at least two electrodes being configured to generate a voltage gradient in the impact zone, with the voltage gradient being configured to direct the generated ions to the outlet zone of the generator.

Ion generation device, ion generation method, and ion generation program

A technique for outputting heterologous ions having the same per-nucleon energy at different timings by using one ion source is provided. An ion generation device includes: an ion generation energy setter that causes first ions and second ions generated by ionization in a vacuum chamber to be emitted in a mixed state from an opening; an electric-field voltage adjuster that imparts a same predetermined per-nucleon energy to each of the first and second ions by applying electric potential formed between the opening and extraction electrodes while switching the electric potential between first and second electric-field voltages; and an excitation current adjuster that causes the first and second ions to be outputted at different timings by supplying a coil of a separation electromagnet with an excitation current while switching the excitation current between first and second excitation currents.

High reliability, long lifetime, negative ion source

A negative ion source includes a plasma chamber, a microwave source, a negative ion converter, a magnetic filter and a beam formation mechanism. The plasma chamber contains gas to be ionized. The microwave source transmits microwaves to the plasma chamber to ionize the gas into atomic species including hyperthermal neutral atoms. The negative ion converter converts the hyperthermal neutral atoms to negative ions. The magnetic filter reduces a temperature of an electron density provided between the plasma chamber and the negative ion converter. The beam formation mechanism extract the negative ions.