H01J27/205

ION GENERATION APPARATUS AND ION MOBILITY ANALYSIS APPARATUS

An ion generation apparatus according to the present invention includes an electron emission device, an opposite electrode, and a controller, the electron emission device includes a lower electrode, a surface electrode, and an intermediate layer provided between the lower electrode and the surface electrode, the opposite electrode is provided to be opposite to the surface electrode, and the controller is provided to apply a voltage to the surface electrode, the lower electrode, or the opposite electrode such that a potential of the surface electrode becomes higher than a potential of the lower electrode and a potential of the opposite electrode in a positive ion mode.

NEGATIVE ION SOURCE AND NEGATIVE ION GENERATION METHOD
20230256408 · 2023-08-17 · ·

Provided is a negative ion source and a negative ion generation method capable of providing a high negative ion generation efficiency. A negative ion source includes a housing that includes: an inlet from which a sample is introduced; a plasma generation region communicated with the inlet, a plasma being generated by discharge in the plasma generation region; a negative ion generation region in which particles dissociated or excited by a reaction of the generated plasma with the sample are converted into negative ions; and an extraction port communicated with the negative ion generation region, the generated negative ions being extracted outside through the extraction port. The negative ion generation region is filled with a thermionic emission material for generating thermoelectrons by high frequency heating.

Electron source

An electron source in a gas-source mass spectrometer the electron source comprising: an electron emitter cathode presenting a thermionic electron emitter surface in communication with a gas-source chamber of the gas-source mass spectrometer for providing electrons there to; a heater element electrically isolated from the electron emitter cathode and arranged to be heated by an electrical current therein and to radiate heat to the electron emitter cathode sufficient to liberate electrons thermionically from said electron emitter surface, therewith to provide a source of electrons for use in ionising a gas the gas-source chamber.

System and method for improved beam current from an ion source

An IHC ion source that employs a negatively biased cathode and one or more side electrodes is disclosed. The one or more side electrodes are left electrically unconnected in certain embodiments and are grounded in other embodiments. The floating side electrodes may be beneficial in the formation of certain species. In certain embodiments, a relay is used to allow the side electrodes to be easily switched between these two modes. By changing the configuration of the side electrodes, beam current can be optimized for different species. For example, certain species, such as arsenic, may be optimized when the side electrodes are at the same voltage as the chamber. Other species, such as boron, may be optimized when the side electrodes are left floating relative to the chamber. In certain embodiments, a controller is in communication with the relay so as to control which mode is used, based on the desired feed gas.

ELECTRON SOURCE
20230028580 · 2023-01-26 ·

An electron source in a gas-source mass spectrometer the electron source comprising: an electron emitter cathode presenting a thermionic electron emitter surface in communication with a gas-source chamber of the gas-source mass spectrometer for providing electrons there to; a heater element electrically isolated from the electron emitter cathode and arranged to be heated by an electrical current therein and to radiate heat to the electron emitter cathode sufficient to liberate electrons thermionically from said electron emitter surface, therewith to provide a source of electrons for use in ionising a gas the gas-source chamber.

ION SOURCE FOR NEUTRON GENERATOR USABLE IN WELLBORE
20230380046 · 2023-11-23 ·

A neutron generator with an ion source within a housing may be used for generating neutrons for neutron logging downhole in a wellbore. The ion source within the housing of the neutron generator may include a hot cathode, an ion source cylinder, a first grid separated from the ion source cylinder, and an extractor separated from the ion source cylinder, the extractor having a second grid.

Ion implantation system and source bushing thereof

The present disclosure describes an ion implantation system that includes a bushing designed to reduce the accumulation of IMP by-produces on the bushing's inner surfaces. The ion implantation system can include a chamber, an ion source configured to generate an ion beam, and a bushing coupling the ion source and the chamber. The bushing can include (i) a tubular body having an inner surface, a first end, and a second end and (ii) multiple angled trenches disposed within the inner surface of the tubular body, where each of the multiple angled trenches extends towards the second end of the tubular body.

Thermally isolated repeller and electrodes

An ion source having a thermally isolated repeller is disclosed. The repeller comprises a repeller disk and a plurality of spokes originating at the back surface of the repeller disk and terminating in a post. In certain embodiments, the post may be hollow through at least a portion of its length. The use of spokes rather than a central stem may reduce the thermal conduction from the repeller disk to the post. By incorporating a hollow post, the thermal conduction is further reduced. This configuration may increase the temperature of the repeller disk by more than 100° C. In certain embodiments, radiation shields are provided on the back surface of the repeller disk to reduce the amount of radiation emitted from the sides of the repeller disk. This may also help increase the temperature of the repeller. A similar design may be utilized for other electrodes in the ion source.

INNER SOURCE ASSEMBLY AND ASSOCIATED COMPONENTS

An inner source assembly for a mass spectrometer, the assembly comprising: a base; and a volume housing removably connectable to the base for retaining a repeller assembly therebetween, wherein one of the base and volume housing comprises at least two protrusions and the other of the volume housing and base comprises at least two corresponding slots to receive and retain said protrusions, wherein the protrusions are dissimilar to one another and/or the slots are dissimilar to one another.

ECR ion source and method for operating an ECR ion source
11094510 · 2021-08-17 · ·

An ECR (Electron Cyclotron Resonance) ion source includes a plasma chamber having a circular cylindrical cross-section, magnets for generating a magnetic field for confinement of the plasma in the plasma chamber, and a microwave generator disposed outside the plasma chamber and generating at least two microwave signals. Several antennas protrude radially into the plasma chamber with a predetermined angular offset α. The antennas receive phase-shifted microwave signals from the microwave generator and radiate linearly polarized microwaves, which in turn produce a circularly polarized microwave inside the plasma chamber. A method for operating an ECR ion source is also described.