Patent classifications
H
H01
H01J
29/00
H01J29/02
H01J29/06
H01J29/07
H01J29/07
SHADOW FRAME WITH SIDES HAVING A VARIED PROFILE FOR IMPROVED DEPOSITION UNIFORMITY
20190096624
·
2019-03-28
·
Embodiments of the present disclosure generally relates a shadow frame including two opposing major side frame members adjacent to two opposing minor side frame members coupled together with a corner bracket, wherein the corner bracket includes a corner inlay having legs that extend in directions generally orthogonal to each other.