H01J29/51

LOW-BLUR ELECTROSTATIC TRANSFER LENS FOR MULTI-BEAM ELECTRON GUN

An electrostatic beam transfer lens for a multi-beam apparatus that includes a series of multiple, successive electrodes, such that an aperture bore of each electrode is aligned along an electron gun axis and is configured to allow multiple beams to pass therethrough. The first electrode in the series is a cylindrical electrode configured to receive the multiple beams at an entrance plane. The first electrode has a bore length and a bore diameter such that a ratio of bore diameter/bore length<0.3. The shape of the first electrode defines the electrostatic field penetration to the entrance plane of the first electrode to prevent lens focusing fields of the electrostatic beam transfer lens from extending through the first electrode and beyond the entrance plane, thus providing a uniform, flat electric field at the entrance area of the electrostatic transfer lens.

Apparatus of plural charged-particle beams

A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

WIRELESS COMMUNICATION APPARATUS AND METHOD
20200178120 · 2020-06-04 · ·

The present technology relates to a wireless communication apparatus and method by which communication can be performed with a higher efficiency.

The wireless communication apparatus includes a preamble generation section that generates a preamble that is to be deployed at the top of a transmission frame and includes header information, a midamble generation section that generates a midamble that is to be deployed in the middle of the transmission frame and includes information of at least part of the header information, and a wireless transmission processing section that transmits the transmission frame including the preamble and the midamble. The present technology can be applied to a wireless communication apparatus.

Wireless communication apparatus and method for generating midamble and controlling transmission power

The present technology relates to a wireless communication apparatus and method by which communication can be performed with a higher efficiency. The wireless communication apparatus includes a preamble generation section that generates a preamble that is to be deployed at the top of a transmission frame and includes header information, a midamble generation section that generates a midamble that is to be deployed in the middle of the transmission frame and includes information of at least part of the header information, and a wireless transmission processing section that transmits the transmission frame including the preamble and the midamble. The present technology can be applied to a wireless communication apparatus.