An arrayed X-ray source and an X-ray imaging apparatus are described. An example X-ray source includes a housing and X-ray generators located in the housing. The X-ray generators are arranged in an array. The X-ray generators are provided separately from each other and configured to emit X-rays independently of each other.

Methods and systems for realizing a high radiance x-ray source based on a high density electron emitter array are presented herein. The high radiance x-ray source is suitable for high throughput x-ray metrology and inspection in a semiconductor fabrication environment. The high radiance X-ray source includes an array of electron emitters that generate a large electron current focused over a small anode area to generate high radiance X-ray illumination light. In some embodiments, electron current density across the surface of the electron emitter array is at least 0.01 Amperes/mm.sup.2, the electron current is focused onto an anode area with a dimension of maximum extent less than 100 micrometers, and the spacing between emitters is less than 5 micrometers. In another aspect, emitted electrons are accelerated from the array to the anode with a landing energy less than four times the energy of a desired X-ray emission line.

Disclosed herein is an apparatus for electromagnetic x-ray control. The apparatus comprises a thermionic filament, positioned at a first end of a micro-focus x-ray tube and configured to generate an electron stream. The apparatus also comprises an x-ray generation target, positioned within the micro-focus x-ray tube at a second end of the micro-focus x-ray tube, opposite the first end, to receive the electron stream and to generate x-rays in response to the electron stream impinging on the x-ray generation target. The apparatus further comprises an electromagnetic field element, configured to generate an electromagnetic field that receives the electron stream and operable to vary the electromagnetic field to redirect the electron stream, within the micro-focus x-ray tube, to impinge on the x-ray generation target at variable locations on the x-ray generation target. Each one of the variable locations corresponds to a different one of multiple variations of the electromagnetic field.

During operation of a reflection target x-ray source, heat must be removed from many components. The electron beam must be steered to the target and may interact with structures along this path. There is also heat generated in the target itself. This can be excessive, since only a very small percentage of the electron beam's energy is transformed into x-rays. Finally, the x-rays must exit the vacuum through the window, which can also be heated both by the x-rays, reflected electrons, and radiant heat from the target. A water cooled reflective x-ray source provides for water or other fluid cooling of the centering aperture, x-ray target, and/or exit window.

An X-ray source including a liquid target source configured to provide a liquid target in an interaction region of the X-ray source, an electron source adapted to provide an electron beam directed towards the interaction region, such that the electron beam interacts with the liquid target to generate X-ray radiation, and an electron collector arranged at a distance downstream of the interaction region, as seen along a travel direction of the electron beam. The electron collector includes an impact portion configured to absorb electrons of the electron beam impinging thereon, and the impact portion is arranged so as to be oblique with respect to the travel direction of the electron beam at the impact portion.

Disclosed is a field emission-type tomosynthesis system including a vacuum body having a space therein; a plurality of sources provided inside the body, wherein each of the sources emits a plurality of electrons; and a plurality of anodes disposed inside the body to face the sources and responsible for emitting a plurality of X-rays, wherein each of the anodes faces a corresponding source among the sources, and the electrons collide with each of the anodes to generate X-rays, wherein the X-ray emission angle of each of the anodes is capable of being independently adjusted so as to focus the X-rays emitted toward an object located outside the body. With this configuration, a plurality of X-rays is focused on an object and is emitted to the object to obtain information, and the information is synthesized, thereby improving the reliability of information about the object.

A MBFEX tube (1) for an x-ray device comprises, in a vacuum tube (20), an anode (30) designed as a cooling finger and securely arranged in the vacuum tube, and a plurality of securely arranged cathodes (40, 41, 42), wherein the vacuum tube (20) comprises a plurality of cathode feed lines (50) and no more than two high-voltage bushings (51, 52), in a high-voltage bushing (52) a coolant pipe (31) is passed through by an internal coolant inner pipe (32), the coolant pipe (31) and the coolant inner pipe (32) are provided for cooling the anode (30) with a liquid coolant, the cathodes (40, 41, 42) are provided for field emission of electrons and are arranged on the anode (30) for generating x-ray sources (Q).

Compact x-ray devices, systems, and methods for capturing in tomosynthesis, two-dimensional radiography, fluoroscopy, and stereotactic imaging modes. In some embodiments, the compact x-ray imaging system includes an x-ray source array including spatially distributed x-ray focal spots and a digital area x-ray detector. In some embodiments, the imaging system includes an electronic switching device configured to alternate the imaging mode of the system. In some embodiments, the imaging system includes a mechanical support configured to enable a position and orientation of the x-ray source array and the digital area x-ray detector to be adjusted such that both upper and lower extremities of a patient can be imaged using various imaging modes while a position of the plurality of spatially distributed x-ray focal spots with respect to the digital area x-ray detector remains unchanged.

The invention comprises a method and apparatus for tuning a charged particle beam path of a charged particle beam system used to treat a tumor of a patient, comprising the steps of: positioning a two-dimensional charged particle detector in a beam line downstream from a magnet pair; operating windings of the magnet pair at a first power level to generate a first magnetic field; measuring a beam position with the first two-dimensional charged particle detector; adjusting a correction magnetic field by driving voltage of a correction coil at a second power level, the second power level less than five percent of the first power level, where the first magnetic field and the correction magnetic field combine to yield an operational magnetic field; and the steps of measuring and adjusting the correction magnetic field changing the operational magnetic field to adjust a measured beam position toward a target beam position.

Provided is a miniaturized X-ray tube including an extractor and provides a miniaturized X-ray tube including a filament that emit electrons if a voltage is applied, a base having two filament through-holes for fixing the filament and for connecting power to both electrodes of the filament, a cylindrical extractor in close contact with the base and surrounding the filament without being in contact with the filament, a cutoff voltage providing unit configured to apply a cutoff voltage between one electrode of the extractor and one electrode of the filament, a body that is formed of a ceramic material, surrounds the extractor, and includes one end in close contact with the base, and a target that is connected to the other end of the body, receives the electrons emitted from the filament, and emits X-rays.