An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

Disclosed is a ceramic shielding apparatus including at least one shield made of a ceramic material and provided inside or outside an X-ray tube to shield radiation; and supports configured to support the shield. According to such a configuration, disadvantages of conventional shielding materials such as lead can be addressed, so that a shield apparatus having excellent shielding properties while being harmless to the human body can be provided.

Disclosed is a ceramic shielding apparatus including at least one shield made of a ceramic material and provided inside or outside an X-ray tube to shield radiation; and supports configured to support the shield. According to such a configuration, disadvantages of conventional shielding materials such as lead can be addressed, so that a shield apparatus having excellent shielding properties while being harmless to the human body can be provided.

An x-ray source can have increased x-ray flux and can simultaneously provide characteristic peaks and from multiple, different chemical elements. The target can include multiple layers of different chemical compositions. These layers can be distinguished by a higher atomic number, a higher energy K-alpha x-ray characteristic line, and a higher density in one layer compared to another layer. The layer that is lower in these characteristics can face the x-ray window. The layers can be formed by sputter deposition.

An x-ray source can have increased x-ray flux and can simultaneously provide characteristic peaks and from multiple, different chemical elements. The target can include multiple layers of different chemical compositions. These layers can be distinguished by a higher atomic number, a higher energy K-alpha x-ray characteristic line, and a higher density in one layer compared to another layer. The layer that is lower in these characteristics can face the x-ray window. The layers can be formed by sputter deposition.

A method for producing a radiation window includes patterning a photo resist structure onto a double-sided silicon wafer, plasma etching the silicon wafer to create an etched silicon wafer having a silicon supporting structure etched upon a first side of the double-sided silicon wafer, applying a silicon nitride thin film to the etched silicon wafer, patterning a photo resist structure and plasma etching a second side of the double-sided silicon wafer to create an initial window in the silicon nitride thin film, and wet etching the second side of the double-sided silicon wafer to release the silicon nitride thin film and supporting structure from the portion of the double-sided silicon wafer defined by the initial window.

System and method for imaging an integrated circuit (IC). The imaging system comprises an x-ray source including a plurality of spatially and temporally addressable electron sources, an x-ray detector arranged such that incident x-rays are oriented normal to an incident surface of the x-ray detector and a three-axis stage arranged between the x-ray source and the x-ray detector, the three-axis stage configured to have mounted thereon an integrated circuit through which x-rays generated by the x-ray source pass during operation of the imaging system. The imaging system further comprises at least one controller configured to move the three-axis stage during operation of the imaging system and selectively activate a subset of the electron sources during movement of the three-axis stage to acquire a set of intensity data by the x-ray detector as the three-axis stage moves along a three-dimensional trajectory.

An x-ray source includes an anode assembly having at least one surface configured to rotate about an axis, the at least one surface in a first region. The x-ray source further includes an electron-beam source configured to emit at least one electron beam configured to bombard the at least one surface of the anode assembly. The electron-beam source includes a housing, a cathode assembly, and a window. The housing at least partially bounds a second region and comprises an aperture. The cathode assembly is configured to generate the at least one electron beam within the second region. The window is configured to hermetically seal the aperture, to maintain a pressure differential between the first region and the second region, and to allow the at least one electron beam to propagate from the second region to the first region.

An x-ray source includes an anode assembly having at least one surface configured to rotate about an axis, the at least one surface in a first region. The x-ray source further includes an electron-beam source configured to emit at least one electron beam configured to bombard the at least one surface of the anode assembly. The electron-beam source includes a housing, a cathode assembly, and a window. The housing at least partially bounds a second region and comprises an aperture. The cathode assembly is configured to generate the at least one electron beam within the second region. The window is configured to hermetically seal the aperture, to maintain a pressure differential between the first region and the second region, and to allow the at least one electron beam to propagate from the second region to the first region.