An embodiment of the inventive concept provides an X-ray tube including a chamber having a hollow pillar shape using a first axis as a central axis, a cathode electrode disposed on a bottom surface of the chamber, an emitter provided at a position at which the cathode electrode meets the first axis, an anode electrode including a through-hole using the first axis as a central axis and a target layer inclined to the first axis, a gate electrode disposed between the cathode electrode and the anode electrode and having an opening exposing the emitter, a focusing electrode disposed between the gate electrode and the anode electrode, a window spaced apart from the target layer of the anode electrode, and a window electrode provided on a top surface of the chamber to fix a side surface of the window. Here, the window electrode is grounded.

An embodiment of the inventive concept provides an X-ray tube including a chamber having a hollow pillar shape using a first axis as a central axis, a cathode electrode disposed on a bottom surface of the chamber, an emitter provided at a position at which the cathode electrode meets the first axis, an anode electrode including a through-hole using the first axis as a central axis and a target layer inclined to the first axis, a gate electrode disposed between the cathode electrode and the anode electrode and having an opening exposing the emitter, a focusing electrode disposed between the gate electrode and the anode electrode, a window spaced apart from the target layer of the anode electrode, and a window electrode provided on a top surface of the chamber to fix a side surface of the window. Here, the window electrode is grounded.

An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

An X-ray generation device includes: a sealed X-ray tube including a cathode and an anode; a magnetic field generation portion applying a magnetic field to the electron beam, the magnetic field extending in a first direction, which crosses a traveling direction of the electron beam; and a rotary drive system configured to rotate the sealed X-ray tube, the anode having a surface including a first region and a second region arranged on one side and another side, with respect to a straight division line, the first region having a first metal arranged therein, and the second region having a second metal arranged therein, the second metal being different from the first metal, and by means of the rotary drive system rotating the sealed X-ray tube, the sealed X-ray tube being arranged with respect to the magnetic field generation portion so that the straight division line lies along the first direction.

An X-ray generation device includes: a sealed X-ray tube including a cathode and an anode; a magnetic field generation portion applying a magnetic field to the electron beam, the magnetic field extending in a first direction, which crosses a traveling direction of the electron beam; and a rotary drive system configured to rotate the sealed X-ray tube, the anode having a surface including a first region and a second region arranged on one side and another side, with respect to a straight division line, the first region having a first metal arranged therein, and the second region having a second metal arranged therein, the second metal being different from the first metal, and by means of the rotary drive system rotating the sealed X-ray tube, the sealed X-ray tube being arranged with respect to the magnetic field generation portion so that the straight division line lies along the first direction.

A system for generating X-ray beams from a liquid target includes a vacuum chamber, a diamond window assembly, an electron source, a target material flow system, and an X-ray detector/imager. An electron beam from the electron source travels through the diamond window assembly and into a dynamic target material of the flow system. Preferably, the dynamic target material is lead bismuth eutectic in a liquid state. Upon colliding with the dynamic target material, X-rays are generated. The generated X-rays exit through an X-ray exit window to be captured by the X-ray detector/imager. Since the dynamic target material is constantly in fluid motion within a pipeline of the flow system, the electron beam always has a new target area which is at a controlled operational temperature and thus, prevents overheating issues. By providing a small focus area for the electron beams, the overall imaging resolution of the X-rays is also improved.

A system for generating X-ray beams from a liquid target includes a vacuum chamber, a diamond window assembly, an electron source, a target material flow system, and an X-ray detector/imager. An electron beam from the electron source travels through the diamond window assembly and into a dynamic target material of the flow system. Preferably, the dynamic target material is lead bismuth eutectic in a liquid state. Upon colliding with the dynamic target material, X-rays are generated. The generated X-rays exit through an X-ray exit window to be captured by the X-ray detector/imager. Since the dynamic target material is constantly in fluid motion within a pipeline of the flow system, the electron beam always has a new target area which is at a controlled operational temperature and thus, prevents overheating issues. By providing a small focus area for the electron beams, the overall imaging resolution of the X-rays is also improved.

A system for x-ray analysis includes at least one x-ray source configured to emit x-rays. The at least one x-ray source includes at least one silicon carbide sub-source on or embedded in at least one thermally conductive substrate and configured to generate the x-rays in response to electron bombardment of the at least one silicon carbide sub-source. At least some of the x-rays emitted from the at least one x-ray source includes Si x-ray emission line x-rays. The system further includes at least one x-ray optical train configured to receive the Si x-ray emission line x-rays and to irradiate a sample with at least some of the Si x-ray emission line x-rays.

A system for x-ray analysis includes at least one x-ray source configured to emit x-rays. The at least one x-ray source includes at least one silicon carbide sub-source on or embedded in at least one thermally conductive substrate and configured to generate the x-rays in response to electron bombardment of the at least one silicon carbide sub-source. At least some of the x-rays emitted from the at least one x-ray source includes Si x-ray emission line x-rays. The system further includes at least one x-ray optical train configured to receive the Si x-ray emission line x-rays and to irradiate a sample with at least some of the Si x-ray emission line x-rays.