An x-ray source can include an x-ray tube, and a heat sink for removal of heat from the x-ray tube. The heat sink can be thermally coupled to the anode and can extend away from the anode along a heat sink longitudinal axis. The heat sink can have a base and a fin extending from the base. The base can have a greater thickness nearer the anode, and a reduced thickness along the heat sink longitudinal axis to a smaller thickness farther from the anode.

An x-ray source can include an x-ray tube, and a heat sink for removal of heat from the x-ray tube. The heat sink can be thermally coupled to the anode and can extend away from the anode along a heat sink longitudinal axis. The heat sink can have a base and a fin extending from the base. The base can have a greater thickness nearer the anode, and a reduced thickness along the heat sink longitudinal axis to a smaller thickness farther from the anode.

A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.

An emitter for a closed x-ray tube includes an emitter body formed of a low work function emitter material, the emitter body having a major surface and a secondary surface. The major surface is adapted for emission of electrons from the low work function material. The emitter assembly is adapted to reduce an emission current density emitted from the secondary surface of the emitter body, as compared to the major surface.

An emitter for a closed x-ray tube includes an emitter body formed of a low work function emitter material, the emitter body having a major surface and a secondary surface. The major surface is adapted for emission of electrons from the low work function material. The emitter assembly is adapted to reduce an emission current density emitted from the secondary surface of the emitter body, as compared to the major surface.

Technology is described for steep angle of a focal track of an anode of an x-ray tube. In one example, an anode includes a disc-shaped anode and a focal track. The disc-shaped anode includes a bearing-facing surface, a window-facing surface positioned opposite the bearing-facing surface, and a focal track positioned between the window-facing surface and the bearing-facing surface, wherein the focal track is angled with respect to the window-facing surface, and the angle between the focal track and the window-facing surface is between 45 and 89.

Methods and systems for realizing a high brightness, liquid based x-ray source suitable for high throughput x-ray metrology are presented herein. A high brightness x-ray source is produced by bombarding a rotating liquid metal anode material with a stream of electrons to generate x-ray radiation. A rotating anode support structure supports the liquid metal anode material in a fixed position with respect to the support structure while rotating at the constant angular velocity. In another aspect, a translational actuator is coupled to the rotating assembly to translate the liquid metal anode in a direction parallel to the axis of rotation. In another aspect, an output window is coupled to the rotating anode support structure. Emitted x-rays are transmitted through the output window toward the specimen under measurement. In another further aspect, a containment window maintains the shape of the liquid metal anode material independent of rotational angular velocity.

Methods and systems for realizing a high brightness, liquid based x-ray source suitable for high throughput x-ray metrology are presented herein. A high brightness x-ray source is produced by bombarding a rotating liquid metal anode material with a stream of electrons to generate x-ray radiation. A rotating anode support structure supports the liquid metal anode material in a fixed position with respect to the support structure while rotating at the constant angular velocity. In another aspect, a translational actuator is coupled to the rotating assembly to translate the liquid metal anode in a direction parallel to the axis of rotation. In another aspect, an output window is coupled to the rotating anode support structure. Emitted x-rays are transmitted through the output window toward the specimen under measurement. In another further aspect, a containment window maintains the shape of the liquid metal anode material independent of rotational angular velocity.

Systems, methods, and apparatus for a multi-spectral X-ray target and source are disclosed. In one or more embodiments, a disclosed method comprises emitting, by a source of the X-ray generator, electrons towards a section of a multi-spectral X-ray target of the X-ray generator. In one or more embodiments, the multi-spectral X-ray target is rotatable and comprises a plurality of sections, which each comprise an X-ray generating material and at least two of the sections comprise a different X-ray generating material. The method further comprises generating a set of X-rays, when the electrons impinge on the section of the multi-spectral X-ray target. The method further comprises rotating the multi-spectral X-ray target such that the source is in position to project the electrons towards another section of the multi-spectral X-ray target. Further, the method comprises repeating the above method steps for all of the remaining sections of the multi-spectral X-ray target.

Systems, methods, and apparatus for a multi-spectral X-ray target and source are disclosed. In one or more embodiments, a disclosed method comprises emitting, by a source of the X-ray generator, electrons towards a section of a multi-spectral X-ray target of the X-ray generator. In one or more embodiments, the multi-spectral X-ray target is rotatable and comprises a plurality of sections, which each comprise an X-ray generating material and at least two of the sections comprise a different X-ray generating material. The method further comprises generating a set of X-rays, when the electrons impinge on the section of the multi-spectral X-ray target. The method further comprises rotating the multi-spectral X-ray target such that the source is in position to project the electrons towards another section of the multi-spectral X-ray target. Further, the method comprises repeating the above method steps for all of the remaining sections of the multi-spectral X-ray target.