An x-ray window can include an adhesive layer sandwiched between and providing a hermetic seal between a thin film and a housing. The adhesive layer can include liquid crystal polymer. The liquid crystal polymer can be opaque, gas-tight, made of low atomic number elements, able to withstand high temperature, low outgassing, low leakage, able to relieve stress in the x-ray window thin film, capable of bonding to many different materials, or combinations thereof.

An X-ray source for ionizing of gases includes a field emission tip array within a vacuum region enclosed by a hood and a part of a support plate. The field emission tip array is arranged electrically insulated with respect to the carrier plate and wired as a cathode connected to a high-voltage source. A transmission window transparent to X-ray radiation is arranged in the hood centrally above the field emission tip array, and the hood is wired as an anode.

An X-ray source for ionizing of gases includes a field emission tip array within a vacuum region enclosed by a hood and a part of a support plate. The field emission tip array is arranged electrically insulated with respect to the carrier plate and wired as a cathode connected to a high-voltage source. A transmission window transparent to X-ray radiation is arranged in the hood centrally above the field emission tip array, and the hood is wired as an anode.

A method, target, and apparatus are disclosed for investigating a specimen using X-ray tomography. The specimen in mounted on a specimen holder. An X-ray target has a substrate of relatively low-atomic-number material carrying an array of mutually isolated nuggets of a relatively high-atomic number material. X-rays are generated by irradiating a single nugget in the target with a charged particle beam, which then illuminates the specimen along a first line of sight through the specimen. A flux of X-rays transmitted through the specimen is detected to form a first image. The illumination process is repeated for a series of different lines of sight through the specimen, to produce a series of images. A mathematical reconstruction on the series of images is then performed to produce a tomogram of at least part of the specimen.

A radiation emitting target, a radiation generating device, and a radiography system are provided in which adhesion between a target layer and a diamond substrate is improved and stable radiation emitting properties are exhibited. A transmission type target includes a target layer, a carbon-containing region including sp2 bonds, and a diamond substrate that supports the target layer. The carbon-containing region is positioned between the target layer and the diamond substrate.

A lightweight X-ray tube assembly and X-ray CT equipment having the same. The X-ray tube assembly includes an X-ray tube and a tube housing. The X-ray tube includes: a cathode for generating an electron beam; an anode for radiating X rays by collision of the electron beam; an envelope for holding the cathode and the anode in a vacuum atmosphere; and an X-ray window provided in the envelope to irradiate some of X rays radiated from the anode toward a test subject. The tube housing encapsulates the X-ray tube together with an insulating oil. The X-ray tube assembly further includes a protective member that is provided at least around the X-ray window on an outer wall of the envelope and shields the X rays.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane; and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector has an energy resolution not less than 1 keV or the X-ray detector has no energy analysis function.

In at least one embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, the transmission window configured to let through X-rays generated by the accelerated electrons, wherein the transmission window incudes a carbon carrier, and wherein the carbon carrier includes sp2-hybridized carbon.

In at least one embodiment an X-ray source includes an electron source configured to emit electrons, an acceleration set-up configured to accelerate the emitted electrons and a transmission window downwards of the acceleration set-up, the transmission window configured to let through X-rays generated by the accelerated electrons, wherein the transmission window incudes a carbon carrier, and wherein the carbon carrier includes sp2-hybridized carbon.