A collimator for an x-ray tube can be a monolithic, integral structure. The collimator can include a proximal-end closest to a cathode and a distal-end farthest from the cathode. The proximal-end can adjoin a vacuum inside of the x-ray tube. The distal-end can adjoin the air. The collimator can include an aperture extending therethrough. An x-ray window can be mounted across the aperture. The aperture can include a collimation-region between the x-ray window and the distal-end, and a drift-region between the x-ray window and the proximal-end. X-rays can be generated inside of the collimator.

A collimator for an x-ray tube can be a monolithic, integral structure. The collimator can include a proximal-end closest to a cathode and a distal-end farthest from the cathode. The proximal-end can adjoin a vacuum inside of the x-ray tube. The distal-end can adjoin the air. The collimator can include an aperture extending therethrough. An x-ray window can be mounted across the aperture. The aperture can include a collimation-region between the x-ray window and the distal-end, and a drift-region between the x-ray window and the proximal-end. X-rays can be generated inside of the collimator.

An inspection apparatus for inspecting an inspection target surface arranged on an inspection plane, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection plane, and an X-ray detector configured to detect X-rays emitted from a foreign substance existing on the inspection target surface irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface. The X-ray detector includes a long X-ray receiver.

An x-ray window 60 or 70 can include a thin film 61 sealed to a support structure 10. The support structure 10 can include an outer ring 11 encircling an outer ring aperture 15, an inner ring 12 encircling an inner aperture, and multiple spokes 13. The inner ring 12 can be located in the outer ring aperture 15. The inner ring 12 can be attached to the outer ring 11 by the multiple spokes 13. The support structure 10 shapes can optimize strength and percent open area.

An x-ray window 60 or 70 can include a thin film 61 sealed to a support structure 10. The support structure 10 can include an outer ring 11 encircling an outer ring aperture 15, an inner ring 12 encircling an inner aperture, and multiple spokes 13. The inner ring 12 can be located in the outer ring aperture 15. The inner ring 12 can be attached to the outer ring 11 by the multiple spokes 13. The support structure 10 shapes can optimize strength and percent open area.

An x-ray device utilizes a band of material to exchange charge through tribocharging within a chamber maintained at low fluid pressure. The charge is utilized to generate x-rays within the housing, which may pass through a window of the housing. Various contact rods may be used as part of the tribocharging process.

A method of manufacturing an X-ray tube component, includes diffusion bonding or brazing an anode of rhodium, molybdenum or tungsten to a heat spreader of molybdenum, tungsten, or a composite of molybdenum and/or tungsten. Suitable joint materials for diffusion bonding include gold; suitable joint materials for brazing include an alloy of silver and copper, an alloy of silver, copper and palladium, an alloy of gold and copper or an alloy of gold, copper and nickel. The resulting tube component delivers reliable behaviors and the joint can withstand high temperatures, high temperature gradients, fast temperature changes, extremely high radiation and extremely high electric field, while maintaining good high vacuum properties.

Technology is described for an antiwetting coating attached to a substrate (e.g., metal substate) on a liquid metal container. In one example, the liquid metal container includes a first enclosure member, a second enclosure member, liquid metal, and an antiwetting coating. The first enclosure member includes a first substrate with a first surface. The second enclosure member includes a second substrate with a second surface. The first enclosure member is positioned proximate to the second enclosure member such that a gap is formed between the first surface and the second surface. The liquid metal positioned within the gap. An antiwetting coating attached to the first surface and/or the second surface. The antiwetting coating includes chromium nitride (CrN), dichromium nitride (Cr.sub.2N), chromium (III) oxide (Cr.sub.2O.sub.3), and/or titanium aluminum nitride (TiAlN) attached to the first surface and/or the second surface.

Technology is described for an antiwetting coating attached to a substrate (e.g., metal substate) on a liquid metal container. In one example, the liquid metal container includes a first enclosure member, a second enclosure member, liquid metal, and an antiwetting coating. The first enclosure member includes a first substrate with a first surface. The second enclosure member includes a second substrate with a second surface. The first enclosure member is positioned proximate to the second enclosure member such that a gap is formed between the first surface and the second surface. The liquid metal positioned within the gap. An antiwetting coating attached to the first surface and/or the second surface. The antiwetting coating includes chromium nitride (CrN), dichromium nitride (Cr.sub.2N), chromium (III) oxide (Cr.sub.2O.sub.3), and/or titanium aluminum nitride (TiAlN) attached to the first surface and/or the second surface.

A window member for separating an internal environment of an x-ray device from an environment external to the x-ray device is provided. The window member comprises a substrate and a coating layer disposed upon a surface of the substrate. The substrate is formed from a polycrystalline material and is substantially transparent to low-energy x-rays. The coating layer is non-porous, covers the crystal grains at the surface of the substrate and extends into the grain boundaries therebetween, such that the coating layer forms an impermeable barrier between the substrate and the external environment.