Systems for x-ray illumination that have an x-ray brightness several orders of magnitude greater than existing x-ray technologies. These may therefore useful for applications such as trace element detection or for micro-focus fluorescence analysis. The higher brightness is achieved in part by using designs for x-ray targets that comprise a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux. The high brightness/high flux x-ray source may have a take-off angle from 0 to 105 mrad. and be coupled to an x-ray optical system that collects and focuses the high flux x-rays to spots that can be as small as one micron, leading to high flux density.

Systems for x-ray illumination that have an x-ray brightness several orders of magnitude greater than existing x-ray technologies. These may therefore useful for applications such as trace element detection or for micro-focus fluorescence analysis. The higher brightness is achieved in part by using designs for x-ray targets that comprise a number of microstructures of one or more selected x-ray generating materials fabricated in close thermal contact with a substrate having high thermal conductivity. This allows for bombardment of the targets with higher electron density or higher energy electrons, which leads to greater x-ray flux. The high brightness/high flux x-ray source may have a take-off angle from 0 to 105 mrad. and be coupled to an x-ray optical system that collects and focuses the high flux x-rays to spots that can be as small as one micron, leading to high flux density.

For manufacturing a radiation window for an X-ray measurement apparatus, an etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a boron carbide layer on an opposite side of the etch stop layer than the carrier. The combined structure including the carrier, the etch stop layer, and the boron carbide layer is attached to a region around an opening in a support structure with the boron carbide layer facing the support structure. The middle area of carrier is etched away, leaving an additional support structure.

For manufacturing a radiation window for an X-ray measurement apparatus, an etch stop layer is first produced on a polished surface of a carrier. A thin film deposition technique is used to produce a boron carbide layer on an opposite side of the etch stop layer than the carrier. The combined structure including the carrier, the etch stop layer, and the boron carbide layer is attached to a region around an opening in a support structure with the boron carbide layer facing the support structure. The middle area of carrier is etched away, leaving an additional support structure.

A mounted x-ray window 10 and 20 can include an x-ray window 18 mounted on the flange 11f of a housing 11. The x-ray window 18 can include the following layers: a top strong layer 17, a stress-relief layer 16, a bottom strong layer 15, an adhesive layer 14 then a support ring 13. These layers can have a material composition and thickness for optimizing x-ray window low gas permeability, low outgassing, high strength, low visible and infrared light transmission, high x-ray flux, low atomic number materials, corrosion resistance, high reliability, and low-cost.

A mounted x-ray window 10 and 20 can include an x-ray window 18 mounted on the flange 11f of a housing 11. The x-ray window 18 can include the following layers: a top strong layer 17, a stress-relief layer 16, a bottom strong layer 15, an adhesive layer 14 then a support ring 13. These layers can have a material composition and thickness for optimizing x-ray window low gas permeability, low outgassing, high strength, low visible and infrared light transmission, high x-ray flux, low atomic number materials, corrosion resistance, high reliability, and low-cost.

Linear ribs are formed radially with a center at a through-hole on one face of an X-ray transmissive film (radiolucent film) in an X-ray transmissive window (radiolucent window) to be used for an X-ray detector (radiation detector). The X-ray transmissive window faces a sample. A beam for irradiation to the sample passes through the through-hole, and X-rays (radiation) are radially emitted on a line extending through the through-hole and enter the X-ray transmissive window. Since the linear ribs are formed radially with the center at the through-hole, even X-rays entering at shallow angles with respect to the X-ray transmissive window are transmitted through the X-ray transmissive window at a probability equivalent to X-rays entering at deep angles. More X-rays are transmitted through the X-ray transmissive window, and thus the X-ray detector can detect X-rays with high efficiency.

An x-ray source comprising a housing, in which a target in the form of an ionized cloud based on metal vapor is provided. The ionized cloud can be excited by means of an electron beam for emitting monochromatic x-rays. The low atom density advantageously produces only a little braking radiation. The robustness of the plasma with respect to the inevitable thermal energy input is also advantageous with respect to the solid target materials. The cloud can be filled at any time with target material which can be vaporized by means of an electric arc. A method for producing x-rays with the above-mentioned x-ray source is also provided. The use of an x-ray source for emitting monochromatic x-rays for x-raying a body is further provided.

According to one embodiment, an X-ray tube includes an envelope with an opening, an X-ray transmission assembly mounted on the envelope and vacuum-tightly blocking the opening, a cathode and an anode target. The X-ray transmission assembly includes a window frame, an X-ray transmission window, an X-ray-resistive resin film, a sealing member and a dry gas. The X-ray transmission window is formed of a beryllium thin plate, accommodated in the window frame, and configured to maintain, along with the window frame, a vacuum-tight state inside the envelope. The X-ray-resistive resin film forms a space inside along with the window frame and the X-ray transmission window. The dry gas fills the space.

According to one embodiment, an X-ray tube includes an envelope with an opening, an X-ray transmission assembly mounted on the envelope and vacuum-tightly blocking the opening, a cathode and an anode target. The X-ray transmission assembly includes a window frame, an X-ray transmission window, an X-ray-resistive resin film, a sealing member and a dry gas. The X-ray transmission window is formed of a beryllium thin plate, accommodated in the window frame, and configured to maintain, along with the window frame, a vacuum-tight state inside the envelope. The X-ray-resistive resin film forms a space inside along with the window frame and the X-ray transmission window. The dry gas fills the space.