An electric field blocker plate which includes an electrically conductive ceramic having a bulk resistivity of less than about 5 ohm/cm. A semiconductor processing system which includes the electric field blocker plate is also disclosed.

A chamber component of a processing chamber, including a body and a textured surface on at least one surface of the body, where the textured surface includes a lattice structure configured to absorb incident electromagnetic radiation at a plurality of frequencies and a plurality of angles of incidence.

An apparatus for thermal ablation testing is provided. The apparatus comprises a chamber; an optically transparent window in the chamber; a sample holder inside the chamber; a test sample in the sample holder; a number of bare-wire thermocouples connected to the test sample, wherein the thermocouples generate temperature data in the form of voltage; a mass balance inside the chamber, wherein the mass balance is configured to hold the sample holder and dynamically detect changes in mass of the test sample; an external radiant heat source configured to heat the test sample through the window; a plasma source configured to generate a number of atomic species in the chamber; and a pyrometer directed at the test sample.

An ion implantation system includes a spectroscopy-based safety system for nuclear reaction detection. A spectra analysis and safety system are disclosed herein. Associated methodology for use with the system includes processing data received from photon energy resolving spectrometers in order to identify detected photon energy, and alert the operator to the same and/or shutdown the system.