Patent classifications
H
ELECTRICITY
Load children
H01
ELECTRIC ELEMENTS
Load children
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
Load children
37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
Load children Filter patents View analytics View as hierarchy
H01J37/32
Gas-filled discharge tubes
Load children Filter patents View analytics View as hierarchy
H01J37/32009
Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
Load children Filter patents View analytics View as hierarchy
H01J37/32366
Localised processing
Load children Filter patents View analytics View as hierarchy