A chemical vapor deposition system for coating one or more workpieces is described herein. The deposition system includes a plurality of processing chambers which may be operated independently to increase throughput of the deposition system. Each chamber includes a modular fixture that is configured to maintain the workpieces in a predetermined arrangement which allows for a hollow cathode effect to be maintained in an Interior space of the chamber. The deposition system achieves significantly faster, higher-quality deposition and more complete, conformal coverage.

A film formation method is provided with a step for disposing a non-electroconductive long thin tube 102 in a chamber 101 in which the internal pressure thereof is adjustable, generating a plasma inside the long thin tube 102 in a state in which a starting material gas including a hydrocarbon is supplied, and forming a diamond-like carbon film on an inner wall surface of the long thin tube 102. The long thin tube 102 is disposed in the chamber 101 in a state in which a discharge electrode 125 is disposed in one end part of the long thin tube 102 and the other end part is open. An alternating-current bias is intermittently applied between the discharge electrode 125 and a counter electrode 126 provided so as to be separated from the long thin tube 102.

Method for treating in an enclosure an inner surface of a container made from polymer material, in order to deposit a barrier coating there on, comprises: inserting the container into the enclosure; introducing a precursor gas into the container intended, once transformed into the plasma state, to be deposited at least partially on the inner surface of the container in order to constitute the coating; wherein the method further comprises: transforming the precursor gas into the plasma state by a combination of excitations comprising a main excitation by means of electromagnetic waves comprising microwaves, and a secondary excitation by means of an electrical discharge of alternating voltage having a frequency between 1 kHz and 15 MHz.

Sterilization apparatus comprising a sterilization instrument configured to be inserted through the instrument channel of a surgical scoping device and a withdrawal device for withdrawing the sterilization instrument from the instrument channel at a predetermined rate. The sterilization instrument comprises an elongate probe having a probe tip with a first electrode and a second electrode arranged to produce an electric field from received RF and/or microwave frequency EM energy. In operation the instrument may disinfect an inner surface of the instrument channel by emitting energy while being withdrawn through the channel.

An apparatus (9) for plasma treating multiple containers. The apparatus includes a manifold (2) comprising at least a first chamber with multiple outlet openings and multiple hollow, electrically-conductive nozzles (10) for at least one of delivering or exhausting plasma-generating gas. The multiple hollow, electrically-conductive nozzles are connected to the multiple outlet openings and protrude from the manifold. A method of plasma treating multiple containers is also disclosed. The method includes providing a reactor system comprising an apparatus disclosed herein, inserting the multiple hollow, electrically-conductive nozzles into the multiple containers (30), evacuating the multiple containers, grounding the multiple hollow, electrically-conductive nozzles while applying radio frequency power to the multiple containers, providing a gas inside the containers, and generating a plasma. At least one of evacuating or providing the gas is carried out through the hollow, electrically-conductive nozzles.

A system includes a cold plasma applicator configured to couple directly to a container, wherein the cold plasma applicator is configured to generate a cold plasma within the container. A method includes operating a cold plasma applicator to generate a cold plasma to treat contents within a container, wherein the cold plasma applicator is configured to directly couple to the container, or the cold plasma applicator comprises a varying geometry application surface having a plurality of protruding electrode portions spaced apart from one another to define a plurality of intermediate recessed portions, or a combination thereof.

A resin container coating device of the present invention includes a plurality of chambers storing a plurality of resin containers respectively in independent states, a plurality of internal electrodes in which gas conductive parts for conducting a source gas are formed to inner peripheral parts thereof and which are respectively inserted inside the plurality of resin containers stored in the chambers, a gas supply unit for supplying the source gas to the plurality of chambers, a high frequency power source for supplying a high frequency electric power to the plurality of chambers, and an electric power switching part capable of switching a supply designation of the high frequency electric power, which is supplied from the high frequency power source, from first and second chambers forming a first unit to third and fourth chambers forming a second unit.

A method for producing a plastic element provided with fine surface roughness is provided. In the method, etching of a surface of the plastic element is performed separately in a first step and in a second step, in the first step, fine roughness having a predetermined average value of pitch in the range from 0.05 to 1 micrometer is generated on the surface through reactive ion etching in an atmosphere of a first gas; and in the second step, an average value of depth of the fine roughness generated in the first step is adjusted to a predetermined value in the range from 0.15 to 1.5 micrometers while the predetermined average value of pitch is substantially maintained through reactive ion etching in an atmosphere of a second gas, reactivity to the plastic element of the second gas being lower than reactivity to the plastic element of the first gas.

An apparatus and a method for coating an inner wall of a metal tube are provided. The apparatus for coating an inner wall of a metal tube includes mounting posts on which both end openings of a metal tube are mounted and configured to block the inside of the metal tube from the ambient air so that a pressure in the metal tube is adjustable by the vacuum exhaust and inflow of process gases, a sputtering target metal tube installed inside the metal tube coaxially with the metal tube, a pulse electromagnet installed around an outside perimeter of the metal tube coaxially with the metal tube to apply a pulse magnetic field in an axial direction of the metal tube, an electromagnetic pulse power supply unit configured to apply pulse power to the pulse electromagnet, and a sputtering pulse power supply unit configured to synchronize a negative high-voltage pulse with the pulse power applied to the pulse electromagnet and apply to the sputtering target metal tube.

A method of applying a treatment to a surface of an open body having a volume within an interior of the open body comprises; providing an inner structure (110) shaped to complement the shape of the interior of the open body and to fill a major portion of the volume or a major portion of a width of the interior of the open body; positioning the inner structure (110) within the open body in order to form a treatment fluid inner volume comprising an inner space (150) confronting an inner surface within the interior of the open body; and introducing a treatment fluid into the treatment fluid inner volume to thereby modify the inner surface of the open body by applying the treatment using the treatment fluid. Optionally, the method includes providing a tank (120) shaped to complement and contain the open body; positioning the open body within the tank (120) in order to form a treatment fluid outer volume comprising an outer space confronting the outer surface of the open body; and introducing the treatment fluid into the treatment fluid outer volume to thereby modify the outer surface of the open body by applying the treatment using the treatment fluid.