Patent classifications
H01J49/0468
CLEANLINESS MONITOR AND A METHOD FOR MONITORING A CLEANLINESS OF A VACUUM CHAMBER
A cleanliness monitor for monitoring a cleanliness of a vacuum chamber. The cleanliness monitor may include a mass spectrometer, a molecule aggregation and release unit and an analyzer. The molecule aggregation and release unit is configured to (a) aggregate, during an aggregation period, organic molecules that are present in the vacuum chamber and (b) induce, during a release period, a release of a subset of the organic molecules towards the mass spectrometer. The mass spectrometer is configured to monitor an environment within the vacuum chamber and to generate detection signals indicative of a content of the environment; wherein a first subset of the detection signals is indicative of a presence of the subset of the organic molecules. The analyzer is configured to determine the cleanliness of the vacuum chamber based on the detection signals.
APPARATUS FOR DELIVERING REAGENT IONS TO A MASS SPECTROMETER
Disclosed herein is an apparatus for supplying reagent ions, for example ETD or PTR reagent ions, to a mass spectrometer. The apparatus includes a reagent material reservoir, coupled to a carrier gas supply, which delivers an entrained reagent vapor flow to an inlet of a mixing junction through a first flow restrictor. A control gas flow of carrier gas is delivered to another inlet of the mixing junction via a variable pressure regulator and a second flow restrictor. The outlet of the mixing junction is coupled via a third flow restrictor and a reagent transfer junction to an inlet of an ionizer, such as a glow-discharge ionizer. By dynamic adjustment of the output pressure of the variable pressure regulator, the flow rate of reagent vapor may be controlled over a broad range, even for reagent materials of relatively high volatility.
ICP MASS SPECTROMETER
Provided is an ICP mass spectrometer which is able to effectively discharge residual water by limiting the consumption of Ar gas and a fluctuation in supply pressure of an Ar gas source at the time of an Ar gas purge for a coolant system. The ICP mass spectrometer is provided with: a device body part 1; a coolant system 2 that supplies a coolant from a water source 20 to to-be-cooled structure parts including a high-freqency power supply 12, a high-frequency coil 18, and a sample introduction part 13, which need to be cooled; and an Ar gas supply system 3. Intermediate valves V2, V3 are disposed on the downstream side of a main valve V0, a purge gas channel 32 having a purge valve V1, and a meeting point G of the purge gas channel 32. The to-be-cooled structure parts are connected to a cooling-use pipe on the downstream side of the intermediate valves V2, V3. A valve control part 35 in configured to perform intermittent purge control of repeating accumulation and discharge of the Ar gas on the upstream side of the intermediate valves V2, V3 by intermediately opening and closing the intermediate valves V2, V3 where the Ar gas is being sent.
Analysis device
Provided is an analysis device capable of obtaining sufficient sensitivity to a gas phase component, which is the analysis target, by a mass spectrometer even when a reactive gas is used as a carrier gas in evolved gas analysis. An analysis device 1 includes a heating device 3, a first carrier gas introduction device 4, a connecting conduit 5, a capillary tube 6, an oven 2, a mass spectrometer 7, and a second carrier gas introduction device 8. The second carrier gas introduction device 8 is configured to introduce helium, hydrogen and/or nitrogen into the connecting conduit 5.
PRACTICAL ION MOBILITY SPECTROMETER APPARATUS AND METHODS FOR CHEMICAL AND/OR BIOLOGICAL DETECTION
The present invention relates to drift tubes for ion mobility spectrometers. In one embodiment, the drift tube of the present invention uses a simplified design having helical resistive material to form substantially constant electric fields that guide ion movements. The drift tube for ion mobility spectrometers described herein is constructed with a non-conductive structure. This configuration provides a robust ion mobility spectrometer that is simple to build. One feature of the present invention is that the drift tube design described herein enables the ion mobility spectrometer to be built with a lower weight, lower power consumption, lower manufacturing cost, and free of sealants.
AUTOMATED SYSTEMS AND METHODS FOR SEPARATING COMPOUNDS
A gas introduction system for a differential mobility spectrometer (DMS) includes a manifold including a gas inlet and a gas outlet. A mixing channel fluidically couples the gas inlet to the gas outlet. A plurality of modifier liquid supply inlets is coupled to the mixing channel and a plurality of selectively operable valves. One of the plurality of selectively operable valves is coupled to one of the plurality of modifier liquid supply inlets. A control system is in communication with each of the plurality of the selectively operable valves. The control system is configured to actuate each of the plurality of selectively operable valves.
SYSTEM AND METHOD FOR SAMPLING
This relates to sampling systems, wherein the sampling is based on removal of material from a sample immersed in a fluid by cavitation induced by high-intensity focused ultrasound. The system includes also a feeding unit for transporting at least part of the removed material from the fluid to a detecting unit. The invention relates also to a method for feeding material from the sample to a detecting unit using the sampling system.
SAMPLE LIQUID ATOMIZATION DEVICE AND ANALYSIS DEVICE
A sample liquid atomization device according to the present invention includes: an ultrasonic sample liquid atomization unit (5) including an exciting part (3) that emits ultrasonic vibration, a vibration surface (1) to be excited by the exciting part (3), a vibration member (2) including the vibration surface (1), and a pipe (7a) that supplies a sample liquid (7) to the vibration surface (1), the ultrasonic sample liquid atomization unit (5) atomizing the sample liquid (7) supplied to the vibration surface (1) by the ultrasonic vibration of the vibration surface (1); and a first pipeline part (10) that is a tubular member. The first pipeline part (10) extends in a direction of the ultrasonic vibration of the vibration surface (1). The ultrasonic sample liquid atomization unit (5) is provided inside the first pipeline part (10) and supported by a holding member (11) in the first pipeline part (10).
GAS SAMPLING APPARATUS FOR A PHYSICAL VAPOR TRANSPORT SYSTEM
Systems for providing a gas sample from a physical vapor transport system include a sampling tube with a first end connected to a crucible retort of the physical vapor transport system to sample a gas phase. The systems include a heater around at least a part of the sampling tube to maintain a temperature within the sampling tube. The sampling tube is integrated with an orifice and a skimmer with a skimmer divergent nozzle. An output of the skimmer is connected to a gas analyzer. An output of the sampling tube is connected to a differential pumping port.
METHODS AND DEVICES FOR EVALUATING THE CONTENTS OF MATERIALS
Methods for determining the hardness and/or ductility of a material by compression of the material are provided as a first aspect of the invention. Typically, compression is performed on multiple sides of a geologic material sample in a contemporaneous manner. Devices and systems for performing such methods also are provided. These methods, devices, and systems can be combined with additional methods, devices, and systems of the invention that provide for the analysis of compounds contained in such samples, which can indicate the presence of valuable materials, such as petroleum-associated hydrocarbons. Alternatively, these additional methods, devices, and systems can also stand independently of the methods, devices, and systems for analyzing ductility and/or hardness of materials.