A method for detecting radicals in process gases in a semiconductor fabrication assembly is provided where the semiconductor fabrication includes a plasma source and a mass spectrometer with an ion source. The method includes separating ions from the process gases and determining a fixed electron energy in which to measure the process gases. Process gases in the semiconductor fabrication assembly are continuously sampled. A first measurement is performed on the sampled process gases at the electron energy using the mass spectrometer, where the first measurement is performed with the plasma source off. A second measurement of the sampled process gases is performed at the fixed electron energy using the mass spectrometer, where the second measurement is performed with the plasma source on. An amount of a radical present in the sampled process gases is determined as a difference between the second measurement and the first measurement.

In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.

In a system for processing gas, a gas analyzer in a gas analyzer chamber measures a quantity of ions generated from a gas. An ionization source includes an ionization chamber and an electron source for generating ions for the gas analyzer. The ionization chamber encompasses an ionization region in which particles of the gas are charged to form the ions. A channel directs the gas from a gas source into the ionization chamber, and the channel extends to a surface of the ionization chamber. An ionization source vacuum pump is in gaseous communication with the ionization chamber via a substantially large opening, and operates to draw gas from the ionization chamber.

A method of spectrometric analysis comprises obtaining one or more sample spectra for an aerosol, smoke or vapour sample. The one or more sample spectra are subjected to pre-processing and then multivariate and/or library based analysis so as to classify the aerosol, smoke or vapour sample. The results of the analysis are used for various surgical or non-surgical applications.

A method of spectrometric analysis comprises obtaining one or more sample spectra for an aerosol, smoke or vapour sample. The one or more sample spectra are subjected to pre-processing and then multivariate and/or library based analysis so as to classify the aerosol, smoke or vapour sample. The results of the analysis are used for various surgical or non-surgical applications.

A method of operating an inductively coupled plasma mass spectrometry apparatus for analyzing an analyte sample, the mass spectrometry apparatus including a plasma ion source, a mass analyzer and an interface arrangement positioned between the plasma ion source and the mass analyzer of the mass spectrometer, the interface arrangement at least including an interface structure, including a sampling or skimmer cone, and at least one passage with an inlet and an outlet into a reaction zone, the method including: generating a plasma using the plasma ion source and forming a plasma flux to flow towards the mass analyzer; supplying the analyte sample into the reaction zone via the passage such that the analyte sample interacts with the plasma flux; and analyzing the analyte sample using the mass analyzer.

The invention relates to a chemical ionisation method, in particular an adduct ionisation method, for ionising a sample including analytes to be ionised, wherein ligand compound ions formed from reactant ions and a dopant substance are made available in a reaction volume (2), wherein said sample with said analytes is introduced into said reaction volume (2) to react with said ligand compound ions to form adduct ions and a neutral byproduct, said adduct ions including ionised analytes being adducts of said reactant ions and the respective said analytes, wherein said reactant ions and said dopant substance provide a higher binding energy when binding together to said ligand compound ions than a binding energy said reactant ions and a ligand forming substance provide when binding together, wherein said ligand forming substance is present at least in traces in said reaction volume (2) when said sample with said analytes react with said ligand compound ions to form said adduct ions and said neutral byproduct. Furthermore, the invention relates to An ion molecule reactor (1) for ionising a sample including analytes to be ionised with the chemical ionisation method according to one of claims 1 to 11, in particular for use with a mass spectrometer (100), including: a reaction volume (2) adapted for ionising inside said reaction volume (2)said sample including said analytes to be ionised by chemical ionisation, in particular adduct ionisation, wherein inside of said reaction volume (2) ligand compound ions formed from reactant ions and a dopant substance can be made available to react with said sample including said analytes to form adduct ions and a neutral byproduct, said adduct ions including ionised analytes being adducts of said reactant ions and the respective said analytes, at least one sample inlet (4) for introducing said sample including said analytes into said reaction volume (2); at least one reactant inlet (5, 6) for introducing at least one substance into said reaction volume (2) for making said ligand compound ions available inside said reaction volume (2); and an outlet (7) for letting out said adduct ions from said reaction volume (2).

An ionizer 1 including an ionization chamber 10, a sample gas introduction port 14 provided in the ionization chamber 10 for introducing sample gas, an electron beam emitting section 11 which emits an electron beam toward the ionization chamber 10, electron beam passage openings 10a and 10b which are formed on a path of the electron beam emitted from the electron beam emitting section 11 on a wall of the ionization chamber 10 and has a length in a direction of the path longer than a width of a cross section orthogonal to the direction, and an ion outlet 10c provided in the ionization chamber 10 for emitting an ion of the sample gas generated by irradiation with the electron beam, and a mass spectrometer 60 including the ionizer 1.

A method of analysis using mass spectrometry and/or ion mobility spectrometry is disclosed. The method comprises: using a first device to generate smoke, aerosol or vapour from a target comprising or consisting of a microbial population; mass analysing and/or ion mobility analysing said smoke, aerosol or vapour, or ions derived therefrom, in order to obtain spectrometric data; and analysing said spectrometric data in order to analyse said microbial population.

A method of analysis using mass spectrometry and/or ion mobility spectrometry is disclosed. The method comprises: using a first device to generate smoke, aerosol or vapour from a target comprising or consisting of a microbial population; mass analysing and/or ion mobility analysing said smoke, aerosol or vapour, or ions derived therefrom, in order to obtain spectrometric data; and analysing said spectrometric data in order to analyse said microbial population.