An ion manipulation device and systems and methods for controlling the ion manipulation device. The ion manipulation device includes a pair of counter-facing surfaces and a plurality of electrodes arranged in one or more linear array on each of the counter-facing surfaces. At least one RF power source is coupled to the electrodes and configured to apply an RF potential to the electrodes to create an electric field that inhibits charged particles from approaching the counter-facing surfaces. At least one DC power source is coupled to the electrodes and configured to apply a DC potential to affect the movement of ions between the counter-facing surfaces in a direction parallel to the counter-facing surfaces. The DC potential and the RF potential are applied to the electrodes simultaneously.

An ion manipulation device and systems and methods for controlling the ion manipulation device. The ion manipulation device includes a pair of counter-facing surfaces and a plurality of electrodes arranged in one or more linear array on each of the counter-facing surfaces. At least one RF power source is coupled to the electrodes and configured to apply an RF potential to the electrodes to create an electric field that inhibits charged particles from approaching the counter-facing surfaces. At least one DC power source is coupled to the electrodes and configured to apply a DC potential to affect the movement of ions between the counter-facing surfaces in a direction parallel to the counter-facing surfaces. The DC potential and the RF potential are applied to the electrodes simultaneously.

A measurement system for a plasma processing system includes a detector and an ion current meter coupled to the ion current collector and configured to provide a signal based on the measurements from the ion current collector. The detector includes an insulating substrate including a cavity, an ion angle selection grid configured to be exposed to a bulk plasma disposed in an upper portion of the cavity, and an ion current collector disposed within the cavity at an opposite side of the cavity below the ion angle selection grid. The ion angle selection grid includes an ion angle selection substrate and a plurality of through openings extending through the ion angle selection substrate, where each of the plurality of through openings has a depth into the ion angle selection substrate and a width orthogonal to the depth, where a ratio of the depth to the width is greater than or equal to 40.

An ion guide or mass analyser is disclosed comprising a plurality of electrodes having apertures through which ions are transmitted in use. A pseudo-potential barrier is created at the exit of the ion guide or mass analyser. The amplitude or depth of the pseudo-potential barrier is inversely proportional to the mass to charge ratio of an ion. One or more transient DC voltages are applied to the electrodes of the ion guide or mass analyser in order to urge ions along the length of the ion guides or mass analyser. The amplitude of the transient DC voltage applied to the electrode may be increased with time so that ions are caused to be emitted from the ion guide or mass analyser in reverse order of their mass to charge ratio.

An ion guide or mass analyser is disclosed comprising a plurality of electrodes having apertures through which ions are transmitted in use. A pseudo-potential barrier is created at the exit of the ion guide or mass analyser. The amplitude or depth of the pseudo-potential barrier is inversely proportional to the mass to charge ratio of an ion. One or more transient DC voltages are applied to the electrodes of the ion guide or mass analyser in order to urge ions along the length of the ion guides or mass analyser. The amplitude of the transient DC voltage applied to the electrode may be increased with time so that ions are caused to be emitted from the ion guide or mass analyser in reverse order of their mass to charge ratio.

A device for performing field asymmetric waveform ion mobility spectrometry, “FAIMS” including first and second segmented planar electrodes, each electrode including three or more segments and extending in a direction parallel to an analytical axis of the device, the first and second segmented electrodes are separated from each other to provide an analytical gap therebetween; and propelling means for propelling ions through the analytical gap in a direction parallel to the analytical axis. The device is configured to operate in: a FAIMS mode in which a power supply applies voltage waveforms to the segments to produce an asymmetric time dependent electric field in the analytical gap for FAIMS analysis of ions propelled through the analytical gap; and a transparent mode in which the power supply applies voltage waveforms to the to produce a confining electric field in the analytical gap for focussing ions towards the longitudinal axis.

A device for performing field asymmetric waveform ion mobility spectrometry, “FAIMS” including first and second segmented planar electrodes, each electrode including three or more segments and extending in a direction parallel to an analytical axis of the device, the first and second segmented electrodes are separated from each other to provide an analytical gap therebetween; and propelling means for propelling ions through the analytical gap in a direction parallel to the analytical axis. The device is configured to operate in: a FAIMS mode in which a power supply applies voltage waveforms to the segments to produce an asymmetric time dependent electric field in the analytical gap for FAIMS analysis of ions propelled through the analytical gap; and a transparent mode in which the power supply applies voltage waveforms to the to produce a confining electric field in the analytical gap for focussing ions towards the longitudinal axis.

Control of an amplitude of a signal applied to a component of a mass spectrometer is described. In one aspect, a mass spectrometer includes a component and a resonant circuit to generate a radio frequency (RF) signal applied to the component. An amplitude control circuit can be inductively coupled with inductors of the resonant circuit to selectively discharge energy from the resonant circuit and, therefore, adjust the amplitude of the signal in particular situations.

Control of an amplitude of a signal applied to a component of a mass spectrometer is described. In one aspect, a mass spectrometer includes a component and a resonant circuit to generate a radio frequency (RF) signal applied to the component. An amplitude control circuit can be inductively coupled with inductors of the resonant circuit to selectively discharge energy from the resonant circuit and, therefore, adjust the amplitude of the signal in particular situations.

Methods and systems for performing ionization, including applying radio frequency energy to a chemical compound so that at least one ion of the compound or of a compound fragment is generated, and detecting at least one such ion.