There are provided a glass tube in which a rare gas under predetermined pressure is sealed, a cathode electrode and an anode electrode disposed in a first end portion and a second end portion of the glass tube, respectively, facing each other, and a trigger electrode including a transparent conductive film formed on an outer peripheral surface of the glass tube. The trigger electrode includes an electrode body disposed on the outer peripheral surface of the glass tube, along a tube axis direction of the glass tube, and an enlarged portion that covers at least any one of the cathode electrode and the anode electrode, and that has a circumferential width wider than a circumferential width of the electrode body. This provides a flash discharge tube capable of reducing variations in optical distribution characteristics during light emission with a small amount of light, and improving life durability during continuous emission of a large amount of light and at short intervals.

There are provided a glass tube in which a rare gas under predetermined pressure is sealed, a cathode electrode and an anode electrode disposed in a first end portion and a second end portion of the glass tube, respectively, facing each other, and a trigger electrode including a transparent conductive film formed on an outer peripheral surface of the glass tube. The trigger electrode includes an electrode body disposed on the outer peripheral surface of the glass tube, along a tube axis direction of the glass tube, and an enlarged portion that covers at least any one of the cathode electrode and the anode electrode, and that has a circumferential width wider than a circumferential width of the electrode body. This provides a flash discharge tube capable of reducing variations in optical distribution characteristics during light emission with a small amount of light, and improving life durability during continuous emission of a large amount of light and at short intervals.

There are provided a glass tube in which a rare gas under predetermined pressure is sealed, a cathode electrode and an anode electrode disposed in a first end portion and a second end portion of the glass tube, respectively, facing each other, and a trigger electrode including a transparent conductive film formed on an outer peripheral surface of the glass tube. The trigger electrode includes an electrode body disposed on the outer peripheral surface of the glass tube, along a tube axis direction of the glass tube, and an enlarged portion that covers at least any one of the cathode electrode and the anode electrode, and that has a circumferential width wider than a circumferential width of the electrode body. This provides a flash discharge tube capable of reducing variations in optical distribution characteristics during light emission with a small amount of light, and improving life durability during continuous emission of a large amount of light and at short intervals.

The present invention relates a spectrometer (1) having a lamp (2) that extends in substantially tubular fashion for the purposes of forming a light emission zone (3) that extends in the direction of the tubular extent and between two points to the end of emitting a first light beam (L1) and a second light beam (L2) that have the same origin on the light emission zone (3), a sample container (6) that is arranged in the beam path of the first light beam (L1) for receiving a sample to be measured, a first detection apparatus (D1) that is arranged in the direction of the first light beam (L1) for quantitative and/or qualitative determination of the sample to be measured in the sample container (6) on the basis of an interaction between the sample to be measured and the first light beam (L1), and a second detection apparatus (D2) that is arranged in the direction of the second light beam (L2) for the purposes of referencing the quantitative and/are qualitative determination, on the basis of the second light beam (L2), of the sample to be measured. The invention further relates to a spectrometer (1′) having a lamp (2) that extends in substantially tubular fashion for the purposes of emitting at least two light beams (L1, L3), respectively one sample container (6, 16) arranged in the beam path of each light beam (L1, L3) for the purposes of receiving a sample to be measured, and a detection apparatus (D1, D3) that is arranged in the direction of each light beam (L1, L3) for the purposes of quantitative and/or qualitative determination of the sample to be measured in the respective sample container (6, 16) on the basis of an interaction between the sample to be measured and the respective light beam (L1, L3).

The present invention relates a spectrometer (1) having a lamp (2) that extends in substantially tubular fashion for the purposes of forming a light emission zone (3) that extends in the direction of the tubular extent and between two points to the end of emitting a first light beam (L1) and a second light beam (L2) that have the same origin on the light emission zone (3), a sample container (6) that is arranged in the beam path of the first light beam (L1) for receiving a sample to be measured, a first detection apparatus (D1) that is arranged in the direction of the first light beam (L1) for quantitative and/or qualitative determination of the sample to be measured in the sample container (6) on the basis of an interaction between the sample to be measured and the first light beam (L1), and a second detection apparatus (D2) that is arranged in the direction of the second light beam (L2) for the purposes of referencing the quantitative and/are qualitative determination, on the basis of the second light beam (L2), of the sample to be measured. The invention further relates to a spectrometer (1′) having a lamp (2) that extends in substantially tubular fashion for the purposes of emitting at least two light beams (L1, L3), respectively one sample container (6, 16) arranged in the beam path of each light beam (L1, L3) for the purposes of receiving a sample to be measured, and a detection apparatus (D1, D3) that is arranged in the direction of each light beam (L1, L3) for the purposes of quantitative and/or qualitative determination of the sample to be measured in the respective sample container (6, 16) on the basis of an interaction between the sample to be measured and the respective light beam (L1, L3).

An electrode insert that has: (a) an intermediate wall made of an electrically insulating material, (b) a cathode-side assembly which is mounted on a front side of the intermediate wall and comprises a cathode, a cathode window and a light emission window, (c) an anode-side assembly which is mounted on a rear side of the intermediate wall and comprises an anode and at least one diaphragm, which together with the light emission window defines an optical axis along which a beam generated by discharge is emitted out of the light emission window, wherein at least the anode and the diaphragm are grouped to form a component ensemble, and wherein at least one retaining profile for retaining the component ensemble projects from the rear of the intermediate wall.

An electrode insert that has: (a) an intermediate wall made of an electrically insulating material, (b) a cathode-side assembly which is mounted on a front side of the intermediate wall and comprises a cathode, a cathode window and a light emission window, (c) an anode-side assembly which is mounted on a rear side of the intermediate wall and comprises an anode and at least one diaphragm, which together with the light emission window defines an optical axis along which a beam generated by discharge is emitted out of the light emission window, wherein at least the anode and the diaphragm are grouped to form a component ensemble, and wherein at least one retaining profile for retaining the component ensemble projects from the rear of the intermediate wall.

A discharge chamber for a deep ultraviolet (DUV) light source includes a housing; and a first electrode and a second electrode in the housing, the first electrode and the second electrode being separated from each other to form a discharge region between the first electrode and the second electrode, the discharge region being configured to receive a gain medium including at least one noble gas and a halogen gas. At least one of the first electrode and the second electrode includes a metal alloy including more than 33% and less than 50% zinc by weight.

A light-emitting tube array-type light source device includes: a plurality of light-emitting gas discharge tubes 11; and an electrode substrate 30 supporting the light-emitting gas discharge tubes in parallel on an upper surface thereof, the electrode substrate having a plurality of slits partially exposes a bottom surface of each light-emitting tube, thereby the light-emitting gas discharge tubes can be cooled through the slits.

A light-emitting tube array-type light source device includes: a plurality of light-emitting gas discharge tubes 11; and an electrode substrate 30 supporting the light-emitting gas discharge tubes in parallel on an upper surface thereof, the electrode substrate having a plurality of slits partially exposes a bottom surface of each light-emitting tube, thereby the light-emitting gas discharge tubes can be cooled through the slits.