Patent classifications
H01J61/32
Lamp comprising multiple component designs and constructions
The present invention provides a bulb (100, 110, 120, 130, 140, 140′) an excitation chamber (200, 210, 220, 230, 230′) a ferrite core (300, 310, 310′), a spool (400, 410); an assembly or subassembly of such components, and a lamp (100, 1100, 1200, 1300, 1400, 1500, 1600, 1600′, 1600″, 1700, 1800) for producing electromagnetic radiation, such as in the light spectrum, UV or IR.
Lamp comprising multiple component designs and constructions
The present invention provides a bulb (100, 110, 120, 130, 140, 140′) an excitation chamber (200, 210, 220, 230, 230′) a ferrite core (300, 310, 310′), a spool (400, 410); an assembly or subassembly of such components, and a lamp (100, 1100, 1200, 1300, 1400, 1500, 1600, 1600′, 1600″, 1700, 1800) for producing electromagnetic radiation, such as in the light spectrum, UV or IR.
VACUUM ULTRAVIOLET EXCIMER LAMP WITH AN INNER AXIALLY SYMMETRIC WIRE ELECTRODE
A dielectric barrier VUV excimer lamp has an elongated dielectric tube for holding an excimer-forming gas, a first electrode disposed within the dielectric tube, and a second electrode arranged outside of the dielectric tube. The first electrode is a wire electrode disposed along a centre axis of the dielectric tube, axially symmetric with respect to the centre axis, and physically connected to each end of the dielectric tube. The dielectric barrier VUV excimer lamp is an AC dielectric barrier discharge VUV excimer lamp or the dielectric barrier VUV excimer lamp is a pulsed DC dielectric barrier discharge VUV excimer lamp. A photochemical system has the dielectric barrier VUV excimer lamp. An excimer lamp system has the dielectric barrier VUV excimer lamp, and also has a power supply to supply electric power to the first electrode and the second electrode.
VACUUM ULTRAVIOLET EXCIMER LAMP WITH AN INNER AXIALLY SYMMETRIC WIRE ELECTRODE
A dielectric barrier VUV excimer lamp has an elongated dielectric tube for holding an excimer-forming gas, a first electrode disposed within the dielectric tube, and a second electrode arranged outside of the dielectric tube. The first electrode is a wire electrode disposed along a centre axis of the dielectric tube, axially symmetric with respect to the centre axis, and physically connected to each end of the dielectric tube. The dielectric barrier VUV excimer lamp is an AC dielectric barrier discharge VUV excimer lamp or the dielectric barrier VUV excimer lamp is a pulsed DC dielectric barrier discharge VUV excimer lamp. A photochemical system has the dielectric barrier VUV excimer lamp. An excimer lamp system has the dielectric barrier VUV excimer lamp, and also has a power supply to supply electric power to the first electrode and the second electrode.
LAMP COMPRISING MULTIPLE COMPONENT DESIGNS AND CONSTRUCTIONS
The present invention provides a bulb (100, 110, 120, 130, 140, 140) an excitation chamber (200, 210, 220, 230, 230) a ferrite core (300, 310, 310), a spool (400, 410); an assembly or subassembly of such components, and a lamp (100, 1100, 1200, 1300, 1400, 1500, 1600, 1600, 1600, 1700, 1800) for producing electromagnetic radiation, such as in the light spectrum, UV or IR.
LAMP DEVICE, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.
LAMP DEVICE, EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING ARTICLE
The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.
Lamp comprising multiple component designs and constructions
The present invention provides a bulb (100, 110, 120, 130, 140, 140) an excitation chamber (200, 210, 220, 230, 230) a ferrite core (300, 310, 310), a spool (400, 410); an assembly or subassembly of such components, and a lamp (100, 1100, 1200, 1300, 1400, 1500, 1600, 1600, 1600, 1700, 1800) for producing electromagnetic radiation, such as in the light spectrum, UV or IR.
LIGHT IRRADIATION DEVICE AND FLASH LAMP
To provide a light irradiation device using a plurality of flash lamps in which a structure that can emit high intensity light as a whole and enables a flash lamp to be used for a practical lifetime without increasing an input current to each lamp is adopted.
A light emission surface is provided on a distal end on a second electrode introducing part side of a light-emitting tube of a flash lamp including a first electrode introducing part and the second electrode introducing part, and a plurality of flash lamps are arranged in a standing manner on a top plate of a processing chamber so that the light emission surface faces the inside of the processing chamber.
Laser driven lamp
A laser driven lamp includes a metallic main body having a columnar shape. The lamp also includes an ellipsoidal reflecting surface formed in the main body such that the ellipsoidal reflecting surface has a focal point at which the laser beam converges. The lamp also includes a light exit window in front of the ellipsoidal reflecting surface. The light exit window transmits ultraviolet light. The lamp also includes a laser beam passing hole formed at a predetermined position of the main body such that this hole penetrates the main body in an optical axial direction of the lamp. The lamp also includes a light entrance window behind the laser light passing hole such that the laser beam is incident to the light entrance window. The main body, the light exit window and the light entrance window form a closed space to contain a light emitting gas.