The present invention relates to a coaxial cable-type plasma lamp device, which has, in a coaxial cable form, a conductor formed in a concentric line inside a discharge tube, has a transparent conductor formed outside the discharge tube, and enables light to be generated through a plasma discharge by emitting an electromagnetic wave into gas filling in the discharge tube. The coaxial cable-type plasma lamp device according to the present invention comprises: a discharge tube filled with discharge gas and in which a plasma discharge occurs through the discharge gas; an inner conductor formed by penetrating the discharge tube; an outer conductor formed by surrounding the discharge tube; a terminator for connecting, at a one-sided terminal of the discharge tube, the inner conductor and the outer conductor through a resistor; and an adaptor for fixing and supporting the inner conductor, the discharge tube, and the outer conductor on the other side of the discharge tube, and for separably connecting the inner conductor to an external coaxial cable.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; and a second window portion provided to the housing and from which second light that is light from the plasma is emitted. The second window portion includes a second window member made of a material containing diamond. A protective layer made of an inorganic material is formed at least on a surface of the second window member on a side of the internal space.

A light emitting sealed body includes: a housing containing light-emitting gas in an internal space; a first window portion provided to the housing and on which first light that is laser light for maintaining a plasma generated in the light-emitting gas is incident; and a second window portion provided to the housing and from which second light that is light from the plasma is emitted. The second window portion includes a second window member made of a material containing diamond. A protective layer made of an inorganic material is formed at least on a surface of the second window member on a side of the internal space.

A lamp has a light emitting element within a sealed transparent vessel. The vessel comprises a cylindrical section with a longitudinal axis L in parallel to a longitudinal axis F of the light emitting element. In order to provide a lamp suited for compact reflectors, a heat shielding element is arranged to shield at least infrared light. The heat shielding element is arranged in parallel to the longitudinal axis F of the light emitting element and has an axial extension of at least 80% of the light emitting element. The heat shielding element is arranged to shield infrared light emitted into directions perpendicular to the longitudinal axis F covering a circumferential extension of 20°-120° measured in cross section.

An excimer bulb assembly including an excimer bulb and a pass filter such that the excimer bulb assembly does not emit substantial UV radiation in wavelengths longer than 231 nm, 232 nm, 233 nm, 234 nm or 235 nm. The wavelengths are measured at an incident angle of zero (0) degrees to the filter plane. The pass filter is preferably constructed of a plurality of layers of hafnium oxide, and most preferably constructed of less than seventy five (75) layers of hafnium oxide. The excimer bulb, pass filter, and two electrical connectors may be adapted to form a cartridge which may be adapted to swivel along its main axis. The cartridge may further include a smart chip. The smart chip may retain and store information regarding the assembly and preferably retains hours of use of the excimer bulb.

A method and apparatus for a sealed high intensity illumination device are disclosed. The device is configured to receive a laser beam from a laser light source. The device has a sealed chamber configured to contain an ionizable medium. The chamber has a substantially flat ingress window disposed within a wall of the integral reflective chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, a plasma ignition region, and a high intensity light egress window configured to emit high intensity light from the chamber. The chamber has an integral reflective chamber interior surface configured to reflect high intensity light from the plasma sustaining region to the egress window. There is a direct path of the laser beam from the laser light source through the lens and ingress window to the lens focal region.

A method and apparatus for a sealed high intensity illumination device are disclosed. The device is configured to receive a laser beam from a laser light source. The device has a sealed chamber configured to contain an ionizable medium. The chamber has a substantially flat ingress window disposed within a wall of the integral reflective chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, a plasma ignition region, and a high intensity light egress window configured to emit high intensity light from the chamber. The chamber has an integral reflective chamber interior surface configured to reflect high intensity light from the plasma sustaining region to the egress window. There is a direct path of the laser beam from the laser light source through the lens and ingress window to the lens focal region.

The invention is directed to a sealed high intensity illumination device configured to receive a laser beam from a laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber includes a reflective chamber interior surface having a first parabolic contour and parabolic focal region, a second parabolic contour and parabolic focal region, and an interface surface. An ingress surface is disposed within the interface surface configured to admit the laser beam into the chamber, and an egress surface disposed within the interface surface configured to emit high intensity light from the chamber. The first parabolic contour is configured to reflect light from the first parabolic focal region to the second parabolic contour, and the second parabolic contour is configured to reflect light from the first parabolic contour to the second parabolic focal region.

The invention is directed to a sealed high intensity illumination device configured to receive a laser beam from a laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber includes a reflective chamber interior surface having a first parabolic contour and parabolic focal region, a second parabolic contour and parabolic focal region, and an interface surface. An ingress surface is disposed within the interface surface configured to admit the laser beam into the chamber, and an egress surface disposed within the interface surface configured to emit high intensity light from the chamber. The first parabolic contour is configured to reflect light from the first parabolic focal region to the second parabolic contour, and the second parabolic contour is configured to reflect light from the first parabolic contour to the second parabolic focal region.

To provide a light irradiation device using a plurality of flash lamps in which a structure that can emit high intensity light as a whole and enables a flash lamp to be used for a practical lifetime without increasing an input current to each lamp is adopted. A light emission surface is provided on a distal end on a second electrode introducing part side of a light-emitting tube of a flash lamp including a first electrode introducing part and the second electrode introducing part, and a plurality of flash lamps are arranged in a standing manner on a top plate of a processing chamber so that the light emission surface faces the inside of the processing chamber.