An embodiment provides a lamp apparatus, including: at least one filament; an amount of amalgam; a heat-sink assembly connected to the lamp apparatus; and at least one control circuit comprising a heating element and a temperature measurement element connected to the at least one filament, wherein the control circuit varies the electrical power delivered to the heating element, thereby controlling an internal temperature of the lamp apparatus relative to a temperature set point. Other aspects are described and claimed.

UV lamp modules for the ultraviolet irradiation of a substrate. The modules include multiple low-pressure mercury lamps, each having a longitudinal axis, located in a waterproof housing having a bottom, a top and a beam exit opening in the bottom which is closed by a beam exit window. To maintain hygiene, homogeneity and compactness, a first airflow zone for the supply of cooling air and a second, separate airflow zone for the discharge of heated cooling air are formed iii the housing. Viewed in a cross-section through the housing perpendicular to the longitudinal axes of the lamps and in a viewing direction from the bottom to the top, the beam exit window, the lamps and the airflow zones are arranged one after the other. The first airflow zone comprises an air supply duct which is equipped with at least one air-guiding mechanism for supplying cooling air to the lamps.

An exposure apparatus comprising a holding part for holding an electric discharge lamp, the electric discharge lamp includes an electric discharge tube which covers an electric discharge space in which a pair of electrodes are disposed to face each other, a socket provided on one end of the electric discharge tube, a metal member which guides one of the pair of electrodes into the socket, wherein an opening for ventilation is provided in a bottom of the socket, the holding part includes a ventilation pipe to form a path for ventilation through the opening in the bottom of the socket, and a cooling part for cooling the metal member by supplying a cooling medium to the metal member through the ventilation pipe.

A germicidal UV amalgam lamp with an elongated tubular lamp body and at least two filaments located on opposite ends of the lamp body. The lamp body is hermetically sealed with a pinch-sealed portion at both opposite ends, confining a gas volume in which a gas discharge can be produced along a discharge path between the filaments. Each filament has two electrical connectors, each including an internal portion connected to the filament and pinch-sealed into the lamp body. Each connector also includes an external portion located outside the lamp body for electrical connection of the lamp to a controlled power supply. The pinch-sealed portion bears a socket with an electrical temperature sensor and at least two electrical connections mounted to the socket. The at least two electrical connections of the temperature sensor are connected in parallel to the electrical connectors of the filament.

A mercury discharge lamp includes: a discharge tube having encapsulated therein mercury in the form of an amalgam; and a temperature control member that controls an ambient temperature of the amalgam in such a manner as to compensate for a change in the ambient temperature of the amalgam. The temperature control member may include a bimetal supporting the amalgam at a predetermined position, and the support member is formed or constituted by a bimetal. By the bimetal deforming in response to a change in the ambient temperature of the amalgam, the temperature control member changes a spaced-apart distance of the amalgam to a filament within the discharge tube and thereby changes an influence of heat generation by the filament on the amalgam. The temperature control member may include, near the amalgam, a resistance element whose resistance value changes in response to a temperature to control heat generation thereby.

A support member is made of a material(s) that excel in both of electrical conductivity and thermal conductivity. Phosphors are applied to the surface of the support member. The phosphors include layers having a very small thickness as close as possible to a minimum quantity of phosphors that can be obtained. The phosphors are disposed on a surface of the support member in a thickness small enough to an extent that the support member is slightly glimpsed in part from between the phosphors. The support member is exposed in part out of the lighting device.

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma. The plasma bulb is transparent to light from a pump laser, wherein the plasma bulb is transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma. The plasma bulb of the plasma cell is configured to filter short wavelength radiation, such as VUV radiation, emitted by the plasma sustained within the bulb in order to keep the short wavelength radiation from impinging on the interior surface of the bulb.

A germicidal UV amalgam lamp with an elongated tubular lamp body and at least two filaments located on opposite ends of the lamp body. The lamp body is hermetically sealed with a pinch-sealed portion at both opposite ends, confining a gas volume in which a gas discharge can be produced along a discharge path between the filaments. Each filament has two electrical connectors, each including an internal portion connected to the filament and pinch-sealed into the lamp body. Each connector also includes an external portion located outside the lamp body for electrical connection of the lamp to a controlled power supply. The pinch-sealed portion bears a socket with an electrical temperature sensor and at least two electrical connections mounted to the socket. The at least two electrical connections of the temperature sensor are connected in parallel to the electrical connectors of the filament.

A UV lamp module for the ultraviolet irradiation of a substrate includes a lamp arrangement, a waterproof housing, and first and second airflow zones. The lamp arrangement includes multiple low-pressure mercury lamps each having a longitudinal axis. The waterproof housing surrounds the lamp arrangement and has a bottom side, a top side and at least two side walls connecting the bottom side and the top side to each other, and a beam exit opening on the bottom side which is closed by a beam exit window. The first airflow zone is formed in the housing and has an air supply duct with at least one air-guide for the supply of cooling air to the lamp arrangement. The second airflow zone is separated from the first airflow zone, and is formed in the housing and has an exhaust air duct for the discharge of heated cooling air. When viewed in a cross-section through the housing perpendicular to the longitudinal axes of the low-pressure mercury lamps and in a viewing direction from the bottom side to the top side, the beam exit window, the lamp arrangement and the airflow zones are arranged one after the other.