The excimer lamp includes: a discharge container having a substantially quadrangular shape with a cross section, the discharge container having a pair of flat walls extending in a longitudinal direction and a pair of side walls connecting the flat walls; a pair of external electrodes facing each other disposed on outer surfaces of the pair of flat walls, respectively; a first internal electrode disposed inside the discharge container so as to extend toward inner surfaces of the pair of flat walls; and a second internal electrode disposed inside the discharge container at a position spaced apart from the first internal electrode in the longitudinal direction so as to extend toward the inner surfaces of the pair of flat walls. The first internal electrode and the second internal electrode are respectively disposed at positions between end parts and central parts of the external electrodes in the longitudinal direction.

Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

A radiation source apparatus comprising: a container for being pressurised with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation, wherein said container is operable substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.

The excimer lamp includes: a discharge container having a substantially quadrangular shape with a cross section, the discharge container having a pair of flat walls extending in a longitudinal direction and a pair of side walls connecting the flat walls; a pair of external electrodes facing each other disposed on outer surfaces of the pair of flat walls, respectively; a first internal electrode disposed inside the discharge container so as to extend toward inner surfaces of the pair of flat walls; and a second internal electrode disposed inside the discharge container at a position spaced apart from the first internal electrode in the longitudinal direction so as to extend toward the inner surfaces of the pair of flat walls. The first internal electrode and the second internal electrode are respectively disposed at positions between end parts and central parts of the external electrodes in the longitudinal direction.

A radiation source apparatus comprising: a container (400) for being pressurized with a gaseous medium in which plasma which emits plasma emitted radiation is generated following excitation of the gaseous medium by a driving radiation (50), wherein said container is operable (66, 67) substantially to remove radiation with a wavelength of 10-400 nm from said plasma emitted radiation before said plasma emitted radiation exits said container as output radiation. In an embodiment the container comprises: an inlet radiation transmitting element (64) operable to transmit said driving radiation from outside said container to inside said container, and an outlet radiation transmitting element (65) operable to transmit at least some of said plasma emitted radiation from inside said container to outside said container as output radiation; wherein at least one of said inlet and outlet radiation transmitting elements comprises a plane parallel plate.

There is provided a light-emitting device capable of suppressing a decrease in a light emission amount. A light-emitting device including a container member including a ceramic package provided with a depressed portion serving as a discharge space, and a light transmitting member which is attached to the ceramic package via a joining layer formed of a joining material so as to close the depressed portion; an inert gas encapsulated inside the discharge space; and a couple of discharge electrodes which are disposed in the depressed portion of the ceramic package so as to be spaced from each other, the joining material including glass exhibiting a white color, and oxide ceramic powder.

A discharge lamp driving device according to one aspect of the invention includes a discharge lamp driving section configured to supply a driving current to a discharge lamp including electrodes and a control section configured to control the discharge lamp driving section. The control section controls the discharge lamp driving section such that a mixed period is provided in which a first period in which an alternating current having a first frequency is supplied to the discharge lamp and a second period in which a direct current is supplied to the discharge lamp are alternately repeated. The first frequency includes a plurality of frequencies different from one another. The control section temporally changes the length of the first period.

Disclosed herein a vacuum ultra violet light source device that is capable of suppressing an amount of ozone generation when the vacuum ultra violet light is emitted into an atmosphere containing oxygen, a light irradiation device incorporating the vacuum ultra violet light device, and a method of patterning a self-assembled monolayer employing the light irradiation device. The light irradiation device is configured to irradiate a self-assembled monolayer (SAM) formed on a workpiece with light containing vacuum ultra violet light through a mask M on which a prescribed pattern is formed so as to perform a patterning process of the SAM. The light containing the vacuum ultra violet light to be irradiated onto the SAM is light that is pulsed light and has a duty ratio of light emission equal to or greater than 0.00001 and equal to or less than 0.01.

There is provided a light-emitting device capable of suppressing a decrease in a light emission amount. A light-emitting device including a container member including a ceramic package provided with a depressed portion serving as a discharge space, and a light transmitting member which is attached to the ceramic package via a joining layer formed of a joining material so as to close the depressed portion; an inert gas encapsulated inside the discharge space; and a couple of discharge electrodes which are disposed in the depressed portion of the ceramic package so as to be spaced from each other, the joining material including glass exhibiting a white color, and oxide ceramic powder.