A gasket assembly for use in a UV lamp system is provided. The gasket assembly includes an RF screen, and an elastomeric gasket material affixed to the RF screen.

An electrodeless discharge lamp with one or more stationary light emitting bulbs inside a common conductive shield to confine an electromagnetic excitation field provided by a plurality of sources. Each bulb can be excited by several electromagnetic radiation sources or by an individual electromagnetic radiation source. Tubular realization of the lamp, with two magnetron or transistor electromagnetic sources facing each other at the extremity of a tubular bulb, are particularly suitable for installation at the focal line of parabolic trough reflector. Some variants combine bulbs of different compositions, and excitation levels can be independently set to control the spectrum of emitted light.

An ultraviolet lamp system is provided. The ultraviolet lamp system includes: (a) a bulb; (b) at least one magnetron configured to emit microwave energy configured to be received by the bulb; and (c) a power supply configured to provide electrical energy to the at least one magnetron, the power supply being adapted to modulate the electrical energy provided to the at least one magnetron such that light output from the bulb is more uniform in at least one of intensity and spectral output.

A light source to be powered by microwave energy, having a dielectric body or fabrication of material lucent for exit of light therefrom, a receptacle within the dielectric body or fabrication, and a lucent microwave-enclosing Faraday cage surrounding the dielectric body or fabrication. The dielectric body or fabrication within the Faraday cage forms at least part of a microwave resonant cavity. A sealed plasma enclosure of lucent material within the receptacle has a means for locating the plasma enclosure within the receptacle with respect to the dielectric body or fabrication.

An embodiment of a system includes an RF signal source, a first electrode, a second electrode, and a cavity configured to receive an electrodeless bulb. The RF signal source is configured to generate an RF signal. The first electrode is configured to receive the RF signal and to convert the RF signal into electromagnetic energy that is radiated by the first electrode. The cavity is defined by first and second boundaries that are separated by a distance that is less than the wavelength of the RF signal so that the cavity is sub-resonant. The first electrode is physically positioned at the first boundary, and the second electrode is physically positioned at the second boundary. The first electrode, the second electrode, and the cavity form a structure that is configured to capacitively couple the electromagnetic energy into the electrodeless bulb when the electrodeless bulb is positioned within the cavity.

An electrodeless lamp driven by a microwave generator is disclosed. The electrodeless lamp includes a first infill composed of mercury-free metal halide and provides a continuous full spectrum radiation including ultraviolet ray, visible light, and infrared ray. Thereby, the electrodeless lamp, which meets the standard of AM 1.5 G, has advantages of environmental friendliness, high efficacy lighting, long service life, and low light decay, and therefore, have become applicable in the field of solar simulators.

A single-side stopping and vibration absorbing lamp sleeve for fitting with an end part of an electrodeless lamp and being partially disposed in a mounting hole of a metal member includes: a large-diameter part; and a small-diameter part coaxially connected to the large-diameter part, wherein a through hole is formed in the large-diameter part and the small-diameter part, the end part fits with the through hole, an aperture of the through hole ranges between 2.9 mm and 3.1 mm, and an outer diameter of the small-diameter part ranges between 3.2 mm and 3.6 mm. Thus, it is possible to optimize mounting and working states of the lamp sleeves, decrease the vibration, movement and rotation generated when the electrodeless lamp is operating, and increase the service lifetime of the electrodeless lamp. An electrodeless lamp illumination device is also disclosed.

A single-side stopping and vibration absorbing lamp sleeve for fitting with an end part of an electrodeless lamp and being partially disposed in a mounting hole of a metal member includes: a large-diameter part; and a small-diameter part coaxially connected to the large-diameter part, wherein a through hole is formed in the large-diameter part and the small-diameter part, the end part fits with the through hole, an aperture of the through hole ranges between 2.9 mm and 3.1 mm, and an outer diameter of the small-diameter part ranges between 3.2 mm and 3.6 mm. Thus, it is possible to optimize mounting and working states of the lamp sleeves, decrease the vibration, movement and rotation generated when the electrodeless lamp is operating, and increase the service lifetime of the electrodeless lamp. An electrodeless lamp illumination device is also disclosed.

An envelope of an ultraviolet (UV) bulb comprises a tube of UV transmissive material configured to contain a UV emissive material and a plasma resistant coating on an inner surface of the tube wherein the coating has been deposited by atomic layer deposition (ALD) and is the only material attached to the inner surface of the tube. The tube can be an endless tube having a circular shape and the coating can be an ALD aluminum oxide coating. The UV transmissive material can comprise quartz or fused silica and the tube can have a wall thickness of about 1 to about 2 mm. The coating can have a thickness of no greater than about 200 nm such as about 120 nm to 160 nm. The circular tube can be formed into a torus shape which can have an outer diameter of about 200 mm and the tube itself can have an outer diameter of about 30 mm. The ALD aluminum oxide coating can be a pinhole free conformal coating. A UV bulb comprising the envelope can contain mercury and inert gas such as argon with pressure inside the UV bulb below 100 Torr. A method of curing a film on a semiconductor substrate, comprises supporting a semiconductor substrate in a curing chamber and exposing a layer on the semiconductor substrate to UV radiation produced by the UV bulb. Other uses include semiconductor substrate surface cleaning or sterilization of fluids and objects.

A UV system for irradiating a substrate includes a RF source capable of generating RF energy, a UV lamp capable of emitting UV energy when excited by the RF energy generated by the RF source, and a monitor coupled to the RF source. The monitor includes data relating to the RF source. The UV system further includes a controller capable of communication with the monitor, and the controller determines if the RF source is suitable for operation with the UV system based on the data of the monitor and/or the end of its useful life.