Patent classifications
H01J2237/2003
EXAMINATION CONTAINER AND ELECTRON MICROSCOPE
An examination container includes a main body, a cover and a carrier stage. The main body has an accommodating trough for holding a sample. The cover is detachably connected to the main body to close the accommodating trough. The cover has a first through-hole penetrating through an outer surface and an inner surface of the cover, and includes a membrane arranging on the inner surface of the cover. The membrane has a second through-hole opposite to the first through-hole for passing a charged particle beam through the first through hole and the second through hole. The carrier stage is installed in a position corresponding to the second through-hole. The carrier stage is detachably arranged in the accommodating trough for a variety of examination purposes. An electron microscope using the abovementioned examination container is also disclosed.
Electron microscope sample holder for forming a gas or liquid cell with two semiconductor devices
A novel sample holder for specimen support devices for insertion in electron microscopes. The novel sample holder of the invention allows for the introduction of gases or liquids to specimens for in situ imaging, as well as electrical contacts for electrochemical or thermal experiments.
OBSERVATION SUPPORT UNIT FOR CHARGED PARTICLE MICROSCOPE AND SAMPLE OBSERVATION METHOD USING SAME
In order to observe a water-containing sample with excellent convenience under an air atmosphere or a gas atmosphere, or under a desired pressure, in the present invention, there is provided an observation support unit for observation by irradiating the sample disposed in a non-vacuum space separated by a diaphragm from an inner space of a charged particle optical lens barrel that generates a charged particle beam, with the charged particle beam. The observation support unit includes a main body portion for covering a hole portion that forms an observation region where the sample is observed, and the sample, and the observation support unit is directly mounted between the sample and the diaphragm, that is, on the sample.
ELECTROCHEMISTRY DEVICE WITH IMPROVED ELECTRODE ARRANGEMENT
An electrochemistry device for electrically measuring a sample during electron microscope imaging includes: a planar chip having a first longitudinal end along which at least three laterally spaced contact electrodes are positioned; a laterally extending working electrode in electrical communication with a first of the three contact electrodes; a counter electrode spaced from and at least partially encircling the working electrode, the counter electrode in electrical communication with a second of the three contact electrodes; and a reference electrode in electrical communication with a third of the three contact electrodes, the reference electrode positioned outside of an area defined between the working electrode and counter electrode.
THIN-FILM-BASED ASSEMBLY
A thin-film-based assembly includes a support base and a thin film placed on the support base. The thin film has a thickness of less than 10 nm, such as, for example, a graphene film. One or more spherical nanoparticles are disposed between the thin film and the support base. The spherical nanoparticles functionally constitute spacers between the thin film and the support base.
METHOD FOR ENABLING MODULAR PART REPLACEMENT WITHIN AN ELECTRON MICROSCOPE SAMPLE HOLDER
An electron microscope sample holder that includes at least one capillary having a sufficient inner diameter to act as a catheter pathway that allows objects that can be accommodated within the at least one capillary to be replaced or swapped with other objects. The sample holder having at least one capillary allows the user to insert and remove temporary fluidic pathways, sensors or other tools without the need to dissemble the holder.
MEMs frame heating platform for electron imagable fluid reservoirs or larger conductive samples
A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.
METHOD FOR OPTIMIZING FLUID FLOW ACROSS A SAMPLE WITHIN AN ELECTRON MICROSCOPE SAMPLE HOLDER
A support for an electron microscope sample includes a body defining a void for receiving a first micro-electronic device, and a first gasket positioned about the first surface. The first gasket further defines an arm extending at an angle away from a horizontal extending through the first micro-electronic device. In operation, the first micro-electronic device is installed onto the first gasket and the arm engages an outer facing side of the first micro-electronic device to grip the first micro-electronic device.
Charged particle beam device and sample holder for charged particle beam device
The purpose of the present invention is to provide a charged particle beam device and a sample holder for the charged particle beam device by which it is possible to form various environments, and perform in-situ observation and analysis without removing a sample from the charged particle beam device. In the present invention, inserting a detachable reverse side entry portion from a side facing a sample holding means, said portion being provided with a function for changing the state of a sample attached to the sample holding means, makes it possible to observe/analyze changes in the sample by a different process without removing the sample from the charged particle beam device by combining a reverse side entry portion having a different function with the sample holding means. The reverse side entry portion comprises two parts, and a tip thereof, which is one of the parts, is removable. After mounting the reverse side entry portion onto the sample holding means, the sample can be transported while maintaining the same atmosphere, and the sample can be transported between different devices without exposing the sample to air.
WIDE FIELD ATOMOSPHERIC SCANNING ELECTRON MICROSCOPE
Atmospheric scanning electron microscope achieves a wide field of view at low magnifications in a broad range of gaseous pressure, acceleration voltage and image resolution. This is based on the use of a reduced size pressure limiting aperture together with a scanning beam pivot point located at the small aperture at the end of electron optics column. A second aperture is located at the principal plane of the objective lens. Double deflection elements scan and rock the beam at a pivot point first at or near the principal plane of the lens while post-lens deflection means scan and rock the beam at a second pivot point at or near aperture at the end of the optics column. The aperture at the first pivot may act also as beam limiting aperture. In the alternative, with no beam limiting aperture at the principal plane, maximum amount of beam rays passes through the lens and with no post-lens deflection means, the beam is formed (limited) by a very small aperture at or near-and-below the final lens while the aperture skims a shifting portion of the wide beam, which is physically rocked with a pivot on the principal plane but with an apparent pivot point close and above the aperture, all of which result in a wide field of view on the examined specimen.