A method for filtering matter waves (MW) from a composite particle beam, comprising: obtaining the composite particle beam from a first particle path, the beam comprising a matter-wave-energy (an MWE) particle component and a matter wave (an MW) component, wherein the MW component does not correspond to the MWE particle component; directing the composite particle beam toward a unit having a distribution of a non-uniform spatial field; tilting the MWE particle component of the composite particle beam toward a second path away from the first path; generating an output beam of the MW component along the first path going through the non-uniform spatial field; and receiving the output beam of the MW component for processing in a subsequent step.

A non-invasive measuring/diagnosis/treatment apparatus and method includes an MWE particle source for emitting particles, the particles comprises a first particle beam and a second particle beam with enclosed space at a partial vacuum and low humidity environment. A first beam splitter for making MW of a first particle beam and MWE of a second particle beam toward a first path, and making MW of the second particle beam and MWE of the first particle beam toward a second path. An MW filter having a distribution of a non-uniform spatial field located at the first path for tilting the MWE of the second particle beam and let the MW of the first particle beam transmit a sample located on the first path and a first detector for detecting a plurality of peaks or valleys of the first interference pattern.

To implement a charged particle beam device including an iron thin film spin detector. The charged particle beam device includes: a charged particle column 201 configured to perform scanning on a sample 203 with a charged particle beam 202; a spin detector including an iron thin film 207, a plurality of coils 208 configured to magnetize the iron thin film, a conveying lens 206 configured to focus, on the iron thin film, secondary electrons 204 emitted from the sample due to irradiation of the charged particle beam, and an electron detector 210 configured to detect backscattered electrons 209 emitted due to the iron thin film being irradiated with the secondary electrons; and a control unit 217 configured to control switching of a magnetization direction of the iron thin film in synchronization with scanning of one line with the charged particle beam from the charged particle column.

Examples include a photoelectric film that emits electrons by irradiation of an excitation light, an extraction electrode for extracting emitted electrons, and a differential exhaust diaphragm through which extracted electrons pass. A control unit controls an electric field formed in relation to the extraction electrode to make the extracted electrons pass through the differential exhaust diaphragm both in a first case in which the excitation light is irradiated to a first position of the photoelectric film, and in a second case in which the excitation light is irradiated to a second position different from the first position of the photoelectric film.